Patents by Inventor Hiroshi Hiroshima
Hiroshi Hiroshima has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Patent number: 10562223Abstract: An imprint device according to the present invention is provided with a supply device that supplies a plurality of condensable gases, which have different saturated vapor pressures, at a fixed ratio by a first condensable gas tank (6) and a control valve (6a) and a second condensable gas tank (6) and a control valve (7a) when a concave portion formed in a mold is transferred in an atmosphere of a condensable gas, which condenses at a temperature and a pressure in the concave portion, the concave portion being sealed by a resist layer that enters into the concave portion formed in the mold (3). The imprint device makes it possible to prevent resist filling failure caused by capillary condensation and to adjust pattern line width and shape by using the same mold.Type: GrantFiled: October 17, 2016Date of Patent: February 18, 2020Assignee: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGYInventors: Kenta Suzuki, SungWon Youn, Hiroshi Hiroshima
-
Publication number: 20200037923Abstract: The purpose of the present invention is to enable, even in an endoscopic operation, an operation upon a specific operation site while monitoring the overall surgical site, such as an organ. An artificial magnetic field is generated such that a surgical site of a patient is positioned within a generated three-dimensional artificial magnetic field space. A plurality of magnetic sensors are respectively mounted in a plurality of predetermined locations of the surgical site of the patient. Data of a 3-D image of the surgical site and position information of the mounting locations of the magnetic sensors with respect to the surgical site are stored in a storage unit as position information of the mounting locations with respect to the 3-D image of the surgical site.Type: ApplicationFiled: July 20, 2017Publication date: February 6, 2020Applicant: University of TsukubaInventors: Jian LU, Ryutaro MAEDA, Lan ZHANG, Hiroshi HIROSHIMA, Nobuhiro OHKOHCHI, Masanao KURATA, Youichi OKUDA
-
Patent number: 10189203Abstract: Provided is a method for forming a pattern of polyimide that is simpler and is more excellent in the pattern shape and in the dimensional accuracy in comparison with the conventional techniques of patterning polyimide, such as photolithography and laser processing. In a method for forming a micropattern of polyimide, which includes using as polyimide a solvent-soluble polyimide resin composition that is photosensitive and is moldable at a temperature of less than or equal to a glass-transition temperature; patterning the composition using thermal imprinting; and thermally curing the composition, ultraviolet irradiation is performed after the composition is released from a mold after a molding step.Type: GrantFiled: August 29, 2014Date of Patent: January 29, 2019Assignee: National Institute of Advanced Industrial Science and TechnologyInventors: Sung Won Youn, Sang Cheon Park, Hiroshi Hiroshima, Hideki Takagi, Kenta Suzuki
-
Publication number: 20180304522Abstract: An imprint device according to the present invention is provided with a supply device that supplies a plurality of condensable gases, which have different saturated vapor pressures, at a fixed ratio by a first condensable gas tank (6) and a control valve (6a) and a second condensable gas tank (6) and a control valve (7a) when a concave portion formed in a mold is transferred in an atmosphere of a condensable gas, which condenses at a temperature and a pressure in the concave portion, the concave portion being sealed by a resist layer that enters into the concave portion formed in the mold (3). The imprint device makes it possible to prevent resist filling failure caused by capillary condensation and to adjust pattern line width and shape by using the same mold.Type: ApplicationFiled: October 17, 2016Publication date: October 25, 2018Applicant: National Institute of Advanced Industrial Science and TechnologyInventors: Kenta SUZUKI, SungWon YOUN, Hiroshi HIROSHIMA
-
Publication number: 20160263814Abstract: Provided is a method for forming a pattern of polyimide that is simpler and is more excellent in the pattern shape and in the dimensional accuracy in comparison with the conventional techniques of patterning polyimide, such as photolithography and laser processing. In a method for forming a micropattern of polyimide, which includes using as polyimide a solvent-soluble polyimide resin composition that is photosensitive and is moldable at a temperature of less than or equal to a glass-transition temperature; patterning the composition using thermal imprinting; and thermally curing the composition, ultraviolet irradiation is performed after the composition is released from a mold after a molding step.Type: ApplicationFiled: August 29, 2014Publication date: September 15, 2016Applicant: National Institute of Advanced Industrial Science and TechnologyInventors: Sung Won YOUN, Sang Cheon PARK, Hiroshi HIROSHIMA, Hideki Takagi, Kenta Suzuki
-
Patent number: 8308961Abstract: In order to prevent occurrence of a residual film distribution dependent upon a pattern density of a mold, in producing the mold to be used for imprint lithography, by etching using a mask, use is made of a first mask M1 for forming a desired pattern to be formed on a surface of the mold, and a second mask M2 for partially covering the first mask such that the area covering openings of the first mask is made larger as an opening ratio of the pattern formed on the first mold surface is higher, thereby to make a volume of a recess of the mold in a given area; in which, after the mold is etched by the first mask, etching is further conducted by covering partially the first mask with the second mask without removing the first mask; or alternatively, the etching is conducted with the first mask and the second mask overlapped from the beginning, thereby to use the second mask as a mask for delaying the etching, for conduct the etching.Type: GrantFiled: July 28, 2008Date of Patent: November 13, 2012Assignee: National Institute of Advanced Industrial Science and TechnologyInventor: Hiroshi Hiroshima
-
Publication number: 20110159134Abstract: In order to prevent occurrence of a residual film distribution dependent upon a pattern density of a mold, in producing the mold to be used for imprint lithography, by etching using a mask, use is made of a first mask M1 for forming a desired pattern to be formed on a surface of the mold, and a second mask M2 for partially covering the first mask such that the area covering openings of the first mask is made larger as an opening ratio of the pattern formed on the first mold surface is higher, thereby to make a volume of a recess of the mold in a given area; in which, after the mold is etched by the first mask, etching is further conducted by covering partially the first mask with the second mask without removing the first mask; or alternatively, the etching is conducted with the first mask and the second mask overlapped from the beginning, thereby to use the second mask as a mask for delaying the etching, for conduct the etching.Type: ApplicationFiled: July 28, 2008Publication date: June 30, 2011Inventor: Hiroshi Hiroshima
-
Publication number: 20110039112Abstract: A resin composition (2) such as a photo-curable resin composition or a heat curable or thermosetting resin composition is placed on an optical substrate (1). A printing pressure is applied to the side of the resin composition (2) of the optical substrate (1) with the resin composition (2) by means of an extra-flat pressing plate having a flatter plane than the optical substrate (1). The resin composition is cured by utilizing light or a temperature change to form a composite substrate. A thin film (4) such as a functional inorganic optical film, a dielectric multilayered optical thin film, or an optical functional metallic film is stacked on the composite substrate, for example, by low-temperature sputtering or ion beam sputtering to form an optical component such as a reflection mirror, a beam splitter, a band-pass filter, a band-stop filter, and an edge filter.Type: ApplicationFiled: January 29, 2009Publication date: February 17, 2011Applicants: National Institute of Advanced Indust Sci & Tech, Tokyo University of Sci Edu Found Admin OrgInventors: Taro Itatani, Hiroyuki Ishii, Hidetoshi Fujino, Hiroshi Hiroshima, Yuichi Kurashima, Iwao Miyamoto
-
Patent number: 6065780Abstract: A vibration-isolator joint for a vacuum device is connected to a vacuum pump and to a vacuum chamber used to evacuate the vacuum chamber. The joint includes a bellows having an internal portion via which evacuation is effected, a first end connected to the vacuum pump, a second end connected to the vacuum chamber, and a support structure that, when the bellows has been compressed by a prescribed amount, prevents further compression of the bellows and also communicates to the bellows vibration in a direction other than the direction in which the bellows expands and contracts.Type: GrantFiled: October 16, 1998Date of Patent: May 23, 2000Assignee: Agency of Industries Science & Technology, Ministry of International Trade & IndustryInventor: Hiroshi Hiroshima
-
Patent number: 5493125Abstract: A charged beam apparatus comprising a vacuum chamber having a moving mechanism inside and a sample chamber, the sample chamber being used placed in an ultra-high vacuum atmosphere or a gas atmosphere, wherein a flat surface is formed on that surface of the moving mechanism which faces the sample chamber, and a flange having a flat open surface is mounted between the vacuum chamber and the sample chamber such that the open surface is opposed to the flat surface with a tiny gap being formed between the open surface and the flat surface for permitting vacuum venting without imposing any restrictions on the moving mechanism, whereby the apparatus operates without restricting the action of the moving mechanism.Type: GrantFiled: March 7, 1994Date of Patent: February 20, 1996Assignee: Agency of Industrial Science and TechnologyInventors: Shigeo Okayama, Mutsuo Ogura, Masanori Komuro, Hiroshi Hiroshima