Abstract: An arc extinguishing circuit for use with glow discharges employed in manufacturing thin-film apparatus (such as, sputtering apparatus etc.), and is capable of more rapidly extinguishing arc discharges occurring within a glow discharge. The arc extinguishing circuit includes a voltage sense circuit, a secondary winding, a switch element, a positive output terminal, and a negative output terminal, the voltage sense circuit having a voltage sense capacitor and a primary winding. When the potential of the negative output terminal rapidly rises so that an arc discharge occurs while generating a glow discharge across the positive output terminal and the negative output terminal, a current flows from the voltage sense capacitor connected to the negative output terminal through the primary winding, and a voltage is induced at the secondary winding magnetically coupled to the primary winding and the switch element connected to the secondary winding conducts.