Abstract: The present invention provides a stage apparatus which holds a substrate, including a first moving stage, a second moving stage supported by the first moving stage, a linear motor including a coil arranged on the first moving stage, and a magnet arranged on the second moving stage in correspondence with the coil, a first channel formed in the first moving stage to supply a first refrigerant for recovering heat from the coil not to contact the coil, a cover member arranged on the first moving stage to surround the coil and be spaced apart from the coil, and a second channel formed in the cover member to supply a second refrigerant for recovering heat from the cover member not to contact the coil.

Abstract: The present invention provides a stage apparatus which holds a substrate, including a first moving stage, a second moving stage supported by the first moving stage, a linear motor including a coil arranged on the first moving stage, and a magnet arranged on the second moving stage in correspondence with the coil, a first channel formed in the first moving stage to supply a first refrigerant for recovering heat from the coil not to contact the coil, a cover member arranged on the first moving stage to surround the coil and be spaced apart from the coil, and a second channel formed in the cover member to supply a second refrigerant for recovering heat from the cover member not to contact the coil.

Abstract: The present invention provides a holding apparatus for holding a substrate by an electrostatic force, the apparatus including a base including an electrode for generating the electrostatic force, a plurality of pins provided on the base, and a seal provided on the base and configured to seal a first space surrounding the plurality of pins, wherein a cavity and a first hole connecting the cavity and the first space is formed in the base, wherein a gas is sealed in the first space, the first hole and the cavity in a vacuum by holding the substrate on the pins and the seal by the electrostatic force.

Abstract: The preset invention provides a stage apparatus which holds a substrate, the apparatus including a driving unit which includes a first coil arranged on a fixed portion, and a first magnet which is arranged on a movable portion and opposed to the first coil, and is configured to move the movable portion by a magnetic field generated by supplying a current to the first coil, and an attracting unit which includes a first yoke arranged on the fixed portion, and a second coil wound around the first yoke, and is configured to attract the movable portion to a side of the fixed portion by a magnetic field generated by supplying a current to the second coil.