Abstract: An object of the present invention is to provide a polishing method for diminishing concave defects of a glass substrate used in a reflective mask for EUVL and the like. The invention relates to a method of polishing a glass substrate which comprises polishing a major surface of the glass substrate while feeding a polishing slurry between the glass substrate and a pad surface of a polishing pad, wherein the polishing load of the polishing pad is from 1 to 60 g/cm2. The pad surface of the polishing pact is preferably dressing-processed.

Abstract: There is provided an optical sheet which can prevent problems when it is superimposed on another member. The optical sheet (10) includes: a sheet-like base layer (32); a light control layer (35) having unit shaped elements (38) arranged in a direction parallel to a sheet surface of the base layer; and a light diffusing layer (40) disposed between the base layer and the light control layer. The light diffusing layer includes a binder resin portion (42) and particles (45) dispersed in the binder resin portion (42). The particles (45) in the binder resin portion (42) includes a single particle (46) and an aggregate (47) formed of aggregated single particles (46).

Abstract: N drivers convert n digital values into n voltages. N amplifiers amplify the n voltages, thereby generate n drive voltages. An amplifier voltage supply supplies an amplifier voltage for driving the n amplifiers. An amplifier voltage controller detects a maximum digital value among a plurality of digital values, and sets the amplifier voltage to a voltage value dependent on the maximum digital value.

Abstract: The present invention provides a driving device, a display panel module, a display apparatus, and a method of manufacturing the driving device, which are capable of reducing the number of a driving circuit elements without reducing the number of display panels to be taken or increasing a wiring area of a film. The driving device according to an aspect of the present invention drives a display panel and includes: a film on which wires and a circuit element are mounted; and a first film portion and a second film portion separated by providing a first slit in the film. Each of the first film portion and the second film portion is folded at least once and connected to the display panel.

Abstract: The present invention relates to a low expansion glass substrate which serves as a substrate of a reflective mask used in a lithography step of semiconductor production steps, wherein two side surfaces positioned to face each other among side surfaces formed along a periphery of the low expansion glass substrate, each have a flatness of 25 ?m or less.

Abstract: An object of the present invention is to provide a display panel module which enhances, in a display panel module, heat dissipation characteristics of a driving circuit element without reducing the number of display panels to be taken, and allows reduction in the number of display circuit elements. The display panel module according to the present invention includes: a film package; a display panel; a plurality of first electrodes connected to the film package; a plurality of second electrodes provided at a larger pitch than the first electrodes connected to the display panel; and a flexible printed circuit board 10 that relays pixel data between the film package 5 and the display panel.

Abstract: A vibration isolator having an inner passage of a communication tube that communicates the negative pressure chamber with the valve chamber. A pipe connection part and a supply/discharge pipe communicate the valve chamber with the supply/discharge port of a switching valve on the outside of the vibration isolator. The switching valve selectively communicates the supply/discharge port to either an intake manifold as the negative pressure supply source, or an atmosphere space. The negative pressure chamber communicates with the valve chamber through the communication tube on the inner peripheral side of the outer cylinder member. Thus, either of a negative pressure and an atmospheric pressure, which is same as a pressure in the valve chamber, can be supplied into the negative pressure chamber, by supplying either of the negative pressure and the atmospheric pressure into the valve chamber through the supply/discharge pipe and the pipe connection part.

Abstract: A current driving device comprises: a voltage supply part; a current supply part; and a plurality of current output parts, each comprising a current-voltage converting function, a voltage-current converting function, and a voltage holding capacitance element. The current output part takes three operation modes. Under a voltage supply mode, the current output part receives a voltage from the voltage supply part and holds the voltage in the voltage holding capacitance element. Under a current supply mode, the current output part receives the current from the current supply part, generates a second voltage by the current-voltage converting function and holds the voltage in the voltage holding capacitance element. Under a current output part, the current output part outputs an output current according to the voltage held in the voltage holding capacitance element by the voltage-current converting function.

Abstract: A current driving circuit includes: a reference input terminal to which a first reference current is given; a current mirror circuit for receiving the first reference current and outputting a first internal current corresponding to the first reference current; a bias voltage generation section for receiving the first internal current and generating a bias voltage corresponding to the first internal current; an output reference current generation section for receiving the bias voltage and generating a second reference current corresponding to the bias voltage; a reference current output terminal for outputting the second reference current; an internal current generation transistor for receiving at a gate thereof the bias voltage and generating a second internal current corresponding to the bias voltage; and an output current generation section for receiving the second internal current and generating n output currents corresponding to the second internal current.

Abstract: The present invention aims at providing a glass substrate required to have a surface polished with extremely high accuracy as in glass substrates for reflective masks for use in EUVL; and a polishing method for producing the glass substrate. The present invention provides a glass substrate for mask blank, which is a glass substrate comprising SiO2 as a main component and having a polished main surface, wherein concave defects and convex defects on the main surface have a depth of 2 nm or smaller and a height of 2 nm or smaller, respectively, and have a half-value width of 60 nm or smaller, so that the concave defects and/or the convex defects do not cause phase defects when the glass substrate is used to produce a mask for exposure and the mask is used. Also disclosed are a polishing method for producing the glass substrate, and a mask blank and a mask for exposure using the glass substrate.

Abstract: A liquid transporting apparatus includes: a microchannel; a transporting liquid supply port through which transporting liquid is supplied to the microchannel; a partition wall as defined herein, and that has an opening; a first split channel that is provided on an upper side of the partition wall; a second split channel that is provided on a lower side of the partition wall; a particle dispersion supply port through which a particle dispersion is supplied to a middle portion of a width direction of the first split channel; and at least one drain port through which the fluid is discharged from downstreams of the first and second split channels, and a pattern that generates an upward-directed flow with respect to a vertical direction in a middle portion of a section of the microchannel is formed in an inner wall of the microchannel or in the partition wall.

Abstract: An object of the present invention is to obtain a vibration damper capable of instantly changing or rapidly increasing the spring constant of the vibration damper, with improving sealing properties. An intermediate cylinder 16 is fittingly engaged with the inner peripheral surface of an outer cylindrical metal member 12. The intermediate cylinder 16 and a mounting metal member 22 are elastically connected by a rubber elastic body 24. A circular tube portion 36A of a yoke forming member 36 is provided at a position on the inner peripheral side of the intermediate cylinder 16. A coil 46 is to disposed between the intermediate cylinder 16 and the yoke forming member 36.

Abstract: A classification device includes: a classification channel, a particle dispersion delivery channel having an opening for introducing a particle dispersion at one end thereof with the other end connected to the classification channel via a junction, a conveying fluid feed channel having an opening for introducing a conveying fluid at one end thereof with the other end connected to the classification channel, and at least one collection channel for collecting separated particles, the collection channel having an opening at one end thereof with the other end connected to the classification channel, the junction and the classification channel having substantially equal widths, and at least one of the at least one collection channel having a bottom wall with an upwardly convex shape in the middle portion of its width.

Abstract: An anti-vibration device including: a first mounting member that is coupled to either one of a vibration generating portion and a vibration receiving portion, and that is formed in an approximately cylindrical shape; a second mounting member that is coupled to the other of the vibration generating portion and a vibration receiving portion, and that is arranged on the inner circumference side of the first mounting member; a juxtaposed member that is arranged side by side with the second mounting member in the axial direction of the first mounting member; a first resilient body that resiliently supports the gap with the first mounting member and the juxtaposed member; a main liquid chamber that is arranged side by side with the juxtaposed member in the axial direction, with at least a portion of a partition wall being formed by the resilient body, and filled with a liquid; an auxiliary liquid chamber that is filled with a liquid, with at least a portion of a partition wall formed by a diaphragm, and the interio

Abstract: A classification device includes: a classification channel for classifying particles; a particle dispersion delivery channel as defined herein; a conveying fluid feed channel as defined herein; and at least one collection channel as defined herein, and the particle dispersion delivery channel satisfying relationship (1): A<B wherein A is a width of the particle dispersion inlet port as measured perpendicular to the flow in the classification channel on a cross-section taken parallel to the flow in the classification channel; and B is a width of the junction between the particle dispersion delivery channel and the classification channel as measured perpendicular to the flow in the classification channel on a cross-section taken parallel to the flow in the classification channel.

Abstract: A classifying apparatus includes: a classifying channel that, in an upper portion, has a channel through which a particle dispersion is transported, and that, in a lower portion, has a channel through which transporting liquid is transported; a particle dispersion introducing channel where one end has an opening into which the particle dispersion is introduced, and another end is connected to the channel through which the particle dispersion is transported; a transporting liquid introducing channel where one end has an opening into which the transporting liquid is introduced, and another end is connected to the channel through which the transporting liquid is transported; and at least one recovery channel as defined herein, a channel width of the channel through which the particle dispersion is transported being smaller than a channel width of the channel through which the transporting liquid is transported, in the classifying channel.

Abstract: A method for transporting dispersion, includes: introducing dispersion containing particles into a liquid transporting channel from a dispersion introducing port; transporting the dispersion in a laminar flow through the liquid transporting channel; and discharging the dispersion from a downstream of the liquid transporting channel, and the liquid transporting channel has a bent portion in a vertical direction, and a Dean vortex which cancels an exchange flow that is produced by movement of the particles caused by gravitational force is generated in the bent portion.

Abstract: A voltage generating system has a first voltage generating device for generating a plurality of voltages between a maximum voltage and a minimum voltage as a first set of voltages, and a second voltage generating device for generating a plurality of voltages between the maximum voltage and the minimum voltage as a second set of voltages, the second set of voltages being different from the first set of voltages. The first voltage generating device generates the maximum voltage, and supplies the first set of voltages and the maximum voltage to the second voltage generating device. The second voltage generating device generates the minimum voltage, and supplies the second set of voltages and the minimum voltage to the first voltage generating device. The first and second voltage generating devices each select a voltage from the first and second sets of voltages, and output the selected voltage.

Abstract: The current drive device of the present invention includes: a current source transistor for allowing a preset drive current to flow to a drain; a cascode transistor cascode-connected to the current source transistor; a switch circuit for switching ON/OFF flow of the drive current through the drain of the cascode transistor and a circuit to be driven; and a bypass circuit for allowing the drive current to flow therethrough to bypass the switch circuit and the circuit to be driven when the switch circuit is OFF.

Abstract: An optical sheet including a fly-eye lens is provided. This optical sheet can exhibit excellent optical functions, including desired light condensing ability, light diffusing ability and ability for rendering a light source image substantially invisible, as well as can be produced with high reproducibility. In one example, the optical sheet (40) includes: a sheet-like main body (45); first unit shaped elements (50) arranged on one surface (46) of the main body and constituting together the fly-eye lens; and second unit shaped elements (55) arranged on the one surface of the main body and extending in parallel with one direction on the sheet surface of the main body. In this case, the first unit shaped elements are arranged, with a space provided therebetween, on the one surface of the main body, while the second unit shaped elements are arranged, between the first unit shaped elements, on the one surface of the main body.