Abstract: A multi-charged particle beam writing apparatus according to one aspect of the present invention includes a region setting unit configured to set, as an irradiation region for a beam array to be used, the region of the central portion of an irradiation region for all of multiple beams of charged particle beams implemented to be emittable by a multiple beam irradiation mechanism, and a writing mechanism, including the multiple beam irradiation mechanism, configured to write a pattern on a target object with the beam array in the region of the central portion having been set in the multiple beams implemented.

Abstract: A multi-beam writing method includes acquiring a plurality of deflection coordinates for deflecting a beam to each of a plurality of pixels which are in each beam pitch region of a plurality of beam pitch regions, a number of pixels to be exposed by a beam in the each beam pitch region during each of tracking control period performed such that the multiple beams collectively follow a movement of a stage, and a deflection movement amount of the multiple beams at a time of tracking reset for resetting a tracking starting position after each of the tracking control period has passed; and generating a deflection sequence defined using the plurality of deflection coordinates, the number of pixels to be exposed during each of the tracking control period, and the deflection movement amount of the multiple beams at the time of tracking reset.

Abstract: A machining control system according to an aspect of the present disclosure includes: a program storage unit which stores a machining program including a plurality of data blocks; a program cache unit which temporarily stores a part of the machining program; a schedule storage unit which stores schedule information specifying a transmission sequence to the program cache unit of the plurality of data blocks; a transmission control unit which controls transmission of the data blocks to the program cache unit from the program storage unit, based on the schedule information; and a machining processing unit which reads out the data blocks from the program cache unit and performs processing required in machining.

Abstract: An onboard power supply device includes: a first system; a second system; a first switch; a second switch; an abnormality detecting unit; and a switch setting unit configured to set a normal state, if occurrence of the power supply fault is not detected, and set a fail-safe state in which the first switch is in an OFF state, if occurrence of the power supply fault is detected, and after the first switch is set to the fail-safe state, with respect to each of the systems, the abnormality detecting unit detects whether any system power supply fault has occurred, and after the first switch is set to the fail-safe state, if occurrence of a system power supply fault is not detected from both of the systems, the switch setting unit sets each of the switches to the normal state.

Abstract: In one embodiment, a multi charged particle beam writing apparatus includes an objective lens adjusting focus positions of multiple beams, an astigmatism correction element correcting astigmatism of the multiple beams, an inspection aperture allowing one of the multiple beams to pass therethrough, a deflector deflecting the multiple beams and causing the multiple beams to scan over the inspection aperture, a current detector detecting beam currents of the individual multiple beams after passing through the inspection aperture, a beam image formation unit forming a beam image based on the detected beam currents, a feature amount calculation unit generating a first waveform and a second waveform by adding brightnesses of the beam image in a first direction and in a second direction, and calculating a first and a second feature amounts from the first and the second waveforms, and a parameter calculation unit calculating an exciting parameter that is to be set for the astigmatism correction element based on the f

Abstract: A semiconductor package in an aspect of the present invention includes a metal board, a first frame, a second frame, and a bond. The metal board has an upper surface including a mount on which a semiconductor device is mountable. The first frame has a side surface facing a side surface of the metal board and has a smaller thermal expansion coefficient than the metal board. The second frame is on upper surfaces of the metal board and the first frame and surrounds the mount, and has a smaller thermal expansion coefficient than the metal board. The bond is between the metal board and the first frame, between the metal board and the second frame, and between the first frame and the second frame. The semiconductor package includes an alloy layer between the metal board and the bond.

Abstract: An imaging method is provided which is capable of performing a color measurement easily and appropriately by using a camera. An imaging apparatus captures an image of a face of a user together with a correction device placed close to the face of the user, and identifies a part in the image of the face of the user for which a color measurement is to be performed. The imaging apparatus acquires a colorimetric value of the identified part and corrects the acquired colorimetric value by using the image of the correction device.

Abstract: A semiconductor device according to an embodiment includes: a substrate including a plurality of through holes provided at predetermined intervals along a first direction in a substrate surface and along a second direction intersecting the first direction in the substrate surface; an insulating layer provided on the substrate, the insulating layer being penetrated by the through holes; a plurality of first electrodes provided on the insulating layer, the first electrodes being adjacent to the respective through holes in the first direction; a plurality of second electrodes provided on the insulating layer, the second electrodes being adjacent to the respective through holes in the first direction, the second electrodes being provided to face the first electrodes, the second electrodes being held at a predetermined potential; and a wiring layer provided on the insulating layer, the wiring layer electrically connecting the adjacent second electrodes.

Abstract: A power supply device includes: a first system connected to a first load; a second system connected to a second load; an inter-system switch configured to connect and disconnect the first system and the second system to and from each other; a controller configured to normally supply power of a first power supply to the first system and the second system and, in response to a fault of the first system being detected, turn off the inter-system switch to supply power of a second power supply to the second system; and a backup circuit which includes a discharge regulation unit configured to regulate discharging of the second power supply.

Abstract: An image forming apparatus includes a connection portion to which a first optional device and a second optional device are selectively detachably connectable, and a determination portion configured to determine whether to prohibit an operation of the image forming apparatus. A plurality of first optional devices are stacked and connectable to the image forming apparatus. The second optional device is installed on a floor and is connectable to the first optional device. In a case in which the second optional device is not connected and the first optional devices of a number larger than a first threshold value are connected to the image forming apparatus, and in a case in which the second optional device is connected and the first optional devices of a number larger than a second threshold value are connected to the image forming apparatus, the determination portion prohibits the operation of the image forming apparatus.

Abstract: A semiconductor device includes a first insulating layer on a semiconductor substrate. A first conductive film is on the first insulating layer. A first stacked structure is on the first conductive film and includes first electrode films and second insulating layers alternately stacked. A conductive member is along an outer edge of the first stacked structure around the first stacked structure and electrically connected to the semiconductor substrate. A second stacked structure is provided at least partially around the conductive member and includes the second insulating layers and third insulating layers alternately stacked on the first conductive film. The first conductive film includes a body part below the first stacked structure, a periphery part provided at a periphery of the body part away from the body part, and a slit part in the first conductive film between the conductive member and the second stacked structure in the periphery part.

Abstract: In one embodiment, a multi-beam blanking device includes a semiconductor substrate, an insulating film that is disposed on the semiconductor substrate, an antistatic film that is disposed on the insulating film, a plurality of cells each of which is related to a through-hole that penetrate the semiconductor substrate and the insulating film and each of which includes a blanking electrode and a ground electrode that are disposed on the insulating film, and a ground wiring line that is disposed in the insulating film. The antistatic film and the ground wiring line are connected to each other at a joint that extends through the insulating film on the ground wiring line.

Abstract: An apparatus according to one aspect of the present invention determines whether or not platoon vehicles can pass through an intersection, and includes: a calculation unit that calculates a first distance, a second distance, and a third distance described below; and a determination unit that determines whether or not the platoon vehicles can pass through the intersection, based on a result of comparison of the first distance with the second and third distances. First distance: a distance from a stop line of the intersection to a position of a leading vehicle at the present time. Second distance: a distance obtained by subtracting a platoon length from a distance of traveling for a remaining green interval at a vehicle speed at the present time. Third distance: a distance required for the leading vehicle to safely stop before the stop line of the intersection, with the vehicle speed at the present time.

Abstract: To provide a highly browsable data processing device or a highly portable data processing device, a data processing device including the following is devised: an input/output unit provided with a display portion which can be folded and unfolded and a sensor portion that can sense the folded and unfolded states of the display portion and can supply data on fold, and an arithmetic unit that stores a program for executing different processing depending on the data on fold.

Abstract: Provided is a vaporizable source material container having excellent corrosion resistance. The vaporizable source material container for storing and vaporizing a metal halide for thin film deposition S includes: a container main body including a container wall; a lid body provided with a carrier gas inlet and a mixed gas outlet; fastening members for fixing the container main body with the lid body; and joint members, wherein the container wall of the container main body is fabricated of copper with 99 to 99.9999% purity, aluminum with 99 to 99.9999% purity, or titanium with 99 to 99.9999% purity, and the container main body, the lid body, the fastening members and the joint members are each treated by fluorocarbon polymer coating and/or by electrolytic polishing.

Abstract: A traffic signal control apparatus capable of controlling signal light colors at a target intersection includes: an acquisition unit configured to acquire positional information of a tail-end vehicle among platoon vehicles traveling on an inflow road of the target intersection, and a vehicle speed of the platoon vehicles; and a control unit configured to, when the tail-end vehicle cannot pass a stop line of the target intersection by the time a remaining green interval elapses, execute preferential control that allows the platoon vehicles to preferentially pass through the target intersection by extending a clearance interval of the target intersection.

Abstract: A multi-charged particle beam writing apparatus includes a movable stage to mount a substrate thereon, a shot data generation circuit to generate shot data of each shot of multiple charged particle beams, a shift amount calculation circuit to calculate a shift amount for collectively correcting positions of all of the multiple charged particle beams of the k-th shot, based on parameters related to at least the (k+1)th and subsequent shots (k being a natural number) of the multiple charged particle beams, and a writing mechanism including a deflector for deflecting the multiple charged particle beams, and to perform the k-th shot onto the substrate with the multiple charged particle beams while shifting the all of the multiple charged particle beams of the k-th shot by collective deflection according to the shift amount.

Abstract: A semiconductor device includes a semiconductor substrate on which a first insulation film is provided. A first conductive film is on the first insulation film. First electrode films are on the first conductive film and stacked. A charge accumulation member is between one of the first electrode films and the semiconductor member. The first conductive film includes a main body arranged below the first electrode films and an outer peripheral portion provided in an outer periphery of the main body to be apart from the main body. First and second slits are alternately provided in the outer peripheral portion, and extend along the outer periphery of the main body. The first and second slits are apart from each other as viewed in the stacking direction, and partly overlap each other as viewed in a first direction directed from the main body toward the outer peripheral portion.

Abstract: Provided is a solid vaporization/supply system of metal halide for thin film deposition that reduces particle contamination. The system includes a vaporizable source material container for storing and vaporizing a metal halide and buffer tank coupled with the vaporizable source material container. The vaporizable source material container includes a container main body with a container wall; a lid body; fastening members; and joint members, wherein the container wall is configured to have a double-wall structure composed of an inner wall member and outer wall member, which allows a carrier gas to be led into the container main body via its space. The container wall is fabricated of 99 to 99.9999% copper, 99 to 99.9996% aluminum, or 99 to 99.9996% titanium, and wherein the container main body, the lid body, the fastening members, and the joint members are treated by fluorocarbon polymer coating and/or by electrolytic polishing.

Abstract: An information generating apparatus includes: an information managing unit that associates and manages an image obtained by photographing skin of a person, marking information indicating one or more markings that one or more operators perform with respect to one or more characteristic parts of skin in the image, and amendment information indicating amendment that a specialist makes to the marking information; and a marking-UI processing unit that superimposes and displays the one or more markings, indicated by the marking information, and the amendment, indicated by the amendment information, on the image.