Abstract: A ceramics sliding member for use in ultrapure water or pure water of the present invention is made of a non-continuous-pore SiC sintered body. The non-continuous-pore SiC sintered body includes ?-SiC at a ratio of 20% by weight or more thereto and has an average crystal structure whose aspect ratio is 2 or greater.

Abstract: A ceramics sliding member for use in ultrapure water or pure water of the present invention is made of an SiC sintered body. The SiC sintered body includes ?-SiC at a ratio of 20% or more thereto and has an average crystal structure whose aspect ratio is 2 or greater.

Abstract: A physical quantity detector, such as a pressure sensor and a load sensor, includes a cylindrical part of which one end is closed with a strain generating part and a sensor part formed on the strain generating part. The cylindrical part is produced by melting an alloying material having a composition capable of yielding an amorphous alloy, injecting the resultant molten alloy into a metal mold, and cooling the molten alloy in the metal mold to confer amorphousness on the alloy. The metal mold includes a split mold having at least two split parts for forming a cavity and an insert pin to be inserted into the cavity so as to define the inner configuration of the cylindrical part, or further an insert core to be inserted into the mold so as to form the surface of the cavity corresponding to the surface of the strain generating part.

Abstract: An object of the present invention is to provide a bearing system or a sealing system which has excellent durability when used with the purified water as a lubricating liquid. The present invention relates to a purified water-lubricated bearing system or a purified water-lubricated sealing system having a movable member and a stationary member, in which purified water having an electrical resistance in a range of 1-18.25 M?cm is used as a lubricating liquid. The bearing system or the sealing system is characterized in that a diamond-like carbon film is formed over a slide surface of at least one of said movable member and said stationary member.

Abstract: The present invention is a bearing or seal structure 1 or 10 having a movable member and a stationary member. In the bearing or seal structure, at least one of the movable member 2 or 13 and the stationary member 4 or 14 is made of a material with a coefficient of thermal expansion of 8×106/° C. or less. Polycrystalline diamond is coated on a surface of the member made of the material which lies opposite the other member.

Abstract: A cylindrical joining member is fitted into a member to be joined that is made of a material different from the joining member. Plastic deformation is effected in a soft material of the member to be joined to hermetically join the two members together. Joining faces are provided to the two members that face and are joined to each other by the plastic deformation and with an elastic deformation pressure in an axial direction. The soft material of the member to be joined, which is located in a circumferential direction of the member, bites into a joining portion of the joining member by the plastic deformation and with the elastic deformation pressure.

Abstract: A first insulating layer 1 is formed by electrodeposition coating on the surface of an outer circumference of a linear conductor m wherein the cross sectional shape thereof is substantially square, and further thereon, a second insulating layer 2 is formed by dipping. In the formation of the first insulating layer 1, swelling occurs in the first insulating layer at a corner portion of conductor m due to the electrodeposition characteristics of electrodeposition coating. The relative concavo-convex occurs on the surface of the layer 1 by the swelling. The concavo-convex is planarized by the second insulating layer formed in accordance with film-forming characteristics of the dipping, whereby an insulated square wire superior in voltage resistance and conductor space factor is obtained.

Abstract: The invention provides a method for performing abrasion resistant surface treatment on a surface of a rotary member. The abrasion resistant surface treatment method is characterized by including steps of: dividing the surface of the rotary member into a plurality of areas A1, A2 depending on peripheral speed or treatment difficulty in surface treatment of the rotary member 1; spraying an abrasion resistant material on a surface of a first area where the peripheral speed is the highest, or the treatment difficulty is low, by a high speed flame spraying method; and spraying an abrasion resistant material on a surface of the second area with high treatment difficulty, by an arc spraying method.

Abstract: An apparatus for detecting an amount of strain comprises a strain generating part, an electrical insulating layer and sensing elements. The strain generating part is a member to which strain is to be applied. The electrical insulating layer is formed on the strain generating part. The sensing elements are formed on the electrical insulating layer. Each of the sensing elements is made of a silicon film. The silicon film comprises a poly-crystalline main layer and a poly-crystalline interface-layer, which comes into contact with the electrical insulating layer.

Abstract: A fluid pressure sensor (1) for measuring the pressure of a fluid comprises a diaphragm portion (12) which is a strain generating body, a silicon oxide film (21) as an insulating film, and a strain gauge (20) made of crystalline silicon, and austenitic precipitation hardening type Fe—Ni heat-resisting steel excellent in mechanical strength and corrosion resistance is used for the diaphragm portion (12). The silicon oxide film (21) is formed with the internal stress thereof adjusted to the range from ?150 to 130 MPa. With this feature, the fluid pressure sensor (1) ensures high precision and reliability, and may be used even for measurement of a highly corrosive fluid.

Abstract: In the manufacture of a physical quantity detector, such as a pressure sensor and a load sensor, comprising a cylindrical part of which one end is closed with a strain generating part and a sensor part formed on the strain generating part, the cylindrical part mentioned above is produced by melting an alloying material having a composition capable of yielding an amorphous alloy, injecting the resultant molten alloy into a metal mold, and cooling the molten alloy in the metal mold to confer amorphousness on the alloy. The metal mold is composed of a split mold having at least two split parts for forming a cavity and an insert pin to be inserted into the cavity so as to define the inner configuration of the cylindrical part, or further an insert core to be inserted into the mold so as to form the surface of the cavity corresponding to the surface of the strain generating part.

Abstract: A thin-film resistor (5) provided on a strain-generating part (2) via an insulating film (4) and an electrode thin-film (6) including an electrode pad (10) arranged in the thin-film resistor (5) are provided. The thin-film resistor (5) includes a strain-detecting thin-film resistive part (8) and an electrode connection (9) connected to the resistive part (8). The electrode connection (9) is formed to extend to the electrode pad (10). The electrode pad (10) includes an external-connection bonding area (12) and a testing probe area (13) formed at different positions. The electrode pad (10) is disposed on a tubular rigid body (1) provided at the outer peripheral edge of a strain-generating part (2).

Abstract: The invention provides a method for performing abrasion resistant surface treatment on a surface of a rotary member. The abrasion resistant surface treatment method is characterized by including steps of: dividing the surface of the rotary member into a plurality of areas A1, A2 depending on peripheral speed or treatment difficulty in surface treatment of the rotary member 1; spraying an abrasion resistant material on a surface of a first area where the peripheral speed is the highest, or the treatment difficulty is low, by a high speed flame spraying method; and spraying an abrasion resistant material on a surface of the second area with high treatment difficulty, by an arc spraying method.

Abstract: An inspection apparatus for a base substrate of a multi-layered board irradiates light to the base substrate of a multilayered board to which a protective film is attached. An image of a surface, to which the protective film is attached, is picturized by a camera, so that an acceptability of a state of a via hole is inspected on the basis of a difference between a light reflectivity of the via hole and a light reflectivity of the protective film. The protective film is colored so as to lower its light reflectivity so that the difference between the light reflectivity of the via hole and that of the protective film is clearly generated. Accordingly, on the basis of the image picturized by the camera, the size of the via hole, dusts therein and the acceptability of the via hole can be accurately inspected.

Abstract: An apparatus for detecting an amount of strain comprises a strain generating part, an electrical insulating layer and sensing elements. The strain generating part is a member to which strain is to be applied. The electrical insulating layer is formed on the strain generating part. The sensing elements are formed on the electrical insulating layer. Each of the sensing elements is made of a silicon film. The silicon film comprises a poly-crystalline main layer and a poly-crystalline interface-layer, which comes into contact with the electrical insulating layer.

Abstract: A fluid pressure sensor (1) for measuring the pressure of a fluid comprises a diaphragm portion (12) which is a strain generating body, a silicon oxide film (21) as an insulating film, and a strain gauge (20) made of crystalline silicon, and austenitic precipitation hardening type Fe—Ni heat-resisting steel excellent in mechanical strength and corrosion resistance is used for the diaphragm portion (12). The silicon oxide film (21) is formed with the internal stress thereof adjusted to the range from ?150 to 130 MPa. With this feature, the fluid pressure sensor (1) ensures high precision and reliability, and may be used even for measurement of a highly corrosive fluid.

Abstract: A thin-film resistor (5) provided on a strain-generating part (2) via an insulating film (4) and an electrode thin-film (6) including an electrode pad (10) arranged in the thin-film resistor (5) are provided. The thin-film resistor (5) includes a strain-detecting thin-film resistive part (8) and an electrode connection (9) connected to the resistive part (8). The electrode connection (9) is formed to extend to the electrode pad (10). The electrode pad (10) includes an external-connection bonding area (12) and a testing probe area (13) formed at different positions. The electrode pad (10) is disposed on a tubular rigid body (1) provided at the outer peripheral edge of a strain-generating part (2).

Abstract: There is provided a method of performing a surface treatment, such as coating, denaturation, modification and etching, on a surface of a substrate. The method comprises the steps of bringing a surface treatment gas into contact with a surface of a substrate, and irradiating the surface of the substrate with a fast particle beam to enhance an activity of the surface and/or the surface treatment gas, thereby facilitating a reaction between the surface and the gas. The fast particle beam may be selected from a group consisting of an electron beam, a charged particle beam, an atomic beam and molecular beam. For example, during a coating operation, chemical deposition of predetermined component elements of the gas onto the surface is effected and a predetermined portion of the surface of the substrate is irradiated with a particle beam to form a coating layer on the predetermined portion.

Abstract: An absolute-pressure type of pressure sensor is provided. The sensor has a pressure detecting device having a metal diaphragm. Strain gauges are disposed on one surface of the diaphragm, whose other surface is formed to receive fluid to be detected. The sensor comprises a lid, relay board, two seal rings, and input/output terminal. The lid provides a reference pressure space. The relay board is electrically connected to the gauge and composed of laminated ceramic members having both of through holes formed to pass through both sides thereof and a protrusion formed outwardly. The two seal rings are located to face the two sides of the board, respectively. The one seal ring air-tightly connects the relay board and the diaphragm. The other seal ring air-tightly connects the relay board and the lid. The terminal is electrically connected to the relay board and mounted on the protrusion of the relay board.

Abstract: A cylindrical joining member is fitted into a member to be joined that is made of a material different from the joining member. Plastic deformation is effected in a soft material of the member to be joined to hermetically join the two members together. Joining faces are provided to the two members that face and are joined to each other by the plastic deformation and with an elastic deformation pressure in an axial direction. The soft material of the member to be joined, which is located in at circumferential direction of the member, bites into a joining portion of the joining member by the plastic deformation and with the elastic deformation pressure.