Abstract: A machining head capable of coping with impacts from different directions with a simple configuration of one buffer, and a three-dimensional laser processing machine using the machining head. A machining head having a multi-axis structure that rotatably supports orientation of a tip that emits a laser beam used for a three-dimensional laser processing machine according to the present disclosure includes a buffer in an arm that forms a predetermined angle with a direction in which a laser beam is emitted. The buffer includes: a first coupler that includes a first coupling surface provided near a tip; a second coupler that includes a second coupling surface facing the first coupling surface; and a coupling member that couples the first coupling surface and the second coupling surface 3b. When the tip is collided with a collision force, the first coupling surface and the second coupling surface are separated.

Abstract: Methods for laser micromachining a material are disclosed. The methods include machining a hole in the material by guiding a laser along a predefined path or applying the laser at a predefined beam angle. A shape of the hole is then characterized. Then, the difference between the shape of the hole and a target shape for the hole is calculated. The predefined path or beam angle of the laser is adjusted based on the difference between the shape of the hole and the target shape for the hole.