Abstract: Systems and methods for controlling a critical dimension (CD) uniformity of a magnetic head device are described. A film stack that is part of a system for controlling a critical dimension (CD) uniformity of a magnetic head device can include a substrate, a magnetoresistive (MR) sensor layer, and a hard mask layer. The system can also include a first mask that defines critical shape patterns other than the CD. The hard mask layer can be patterned using the first mask. The system can also include a second mask that defines the CD. A mandrel pattern can be formed on the hard mask layer using the second mask.

Abstract: Methods of critical dimension (CD) uniformity control for magnetic head devices are disclosed. In some embodiments, a method can include providing a film stack, the film stack including a substrate, a magnetoresistive (MR) sensor layer, and a hard mask layer, patterning the hard mask layer using a first mask that defines critical shape patterns other than the CD, forming a mandrel pattern using a second mask that defines the CD, and forming a sidewall spacer pattern on sidewalls of the mandrel pattern, and removing the mandrel pattern.

Abstract: A composite hard mask is disclosed. In some embodiments, a first sacrificial hard mask layer comprising an amorphous carbon or silicon nitride and a second sacrificial hard mask layer comprising a silicon nitride, silicon oxide, metal, metal oxide, or metal nitride, wherein the first and second sacrificial hard mask layers are not made of the same material.

Abstract: Methods of critical dimension (CD) uniformity control for magnetic head devices are disclosed. In some embodiments, a method can include providing a film stack, the film stack including a substrate, a magnetoresistive (MR) sensor layer, and a hard mask layer, patterning the hard mask layer using a first mask that defines critical shape patterns other than the CD, forming a mandrel pattern using a second mask that defines the CD, and forming a sidewall spacer pattern on sidewalls of the mandrel pattern, and removing the mandrel pattern.

Abstract: Methods of critical dimension (CD) uniformity control for magnetic head devices are disclosed. In some embodiments, a method can include providing a film stack, the film stack including a substrate, a magnetoresistive (MR) sensor layer, and a hard mask layer, patterning the hard mask layer using a first mask that defines critical shape patterns other than the CD, forming a mandrel pattern using a second mask that defines the CD, and forming a sidewall spacer pattern on sidewalls of the mandrel pattern, and removing the mandrel pattern.

Abstract: The vehicle control apparatus is provided with a vehicle body speed deriving portion that derives a vehicle body speed of a vehicle, a wheel speed difference deriving portion that derives a wheel speed difference which is a deviation between the maximum wheel speed and the minimum wheel speed of the wheels of the vehicle, a request drive amount deriving portion that derives a request drive amount for the drive source of the vehicle, a torque suppressing device that suppresses torque of a driving wheel, a traction control portion that controls the torque suppressing device and suppresses an acceleration slip of the driving wheel based on the wheel speed difference or a combination of the wheel speed difference and at least one of the vehicle body speed and the request drive amount.

Abstract: The vehicle control apparatus is provided with a vehicle body speed deriving portion that derives a vehicle body speed of a vehicle, a wheel speed difference deriving portion that derives a wheel speed difference which is a deviation between the maximum wheel speed and the minimum wheel speed of the wheels of the vehicle, a request drive amount deriving portion that derives a request drive amount for the drive source of the vehicle, a torque suppressing device that suppresses torque of a driving wheel, a traction control portion that controls the torque suppressing device and suppresses an acceleration slip of the driving wheel based on the wheel speed difference or a combination of the wheel speed difference and at least one of the vehicle body speed and the request drive amount.

Abstract: A brake, system includes a hydraulic brake that supplies a hydraulic pressure to a cylinder provided correspondingly to each wheel mounted on a vehicle, thereby pressing friction members against the wheels and applying a hydraulic braking force; an electric brake that is mounted on at least one wheel from among the wheels and applies a braking force to the wheel by drive of an electric actuator; and a controller that executes control of supply of hydraulic pressure to each wheel cylinder by the hydraulic brake and operation control of the electric brake, regardless of a braking request by a driver, and causes a transition from hydraulic braking force control of all of the wheels to hydraulic braking force control of the wheel on which the electric brake has been mounted, when a speed of the vehicle satisfies a condition during the hydraulic braking force control of all of the wheels.

Abstract: A brake, system includes a hydraulic brake that supplies a hydraulic pressure to a cylinder provided correspondingly to each wheel mounted on a vehicle, thereby pressing friction members against the wheels and applying a hydraulic braking force; an electric brake that is mounted on at least one wheel from among the wheels and applies a braking force to the wheel by drive of an electric actuator; and a controller that executes control of supply of hydraulic pressure to each wheel cylinder by the hydraulic brake and operation control of the electric brake, regardless of a braking request by a driver, and causes a transition from hydraulic braking force control of all of the wheels to hydraulic braking force control of the wheel on which the electric brake has been mounted, when a speed of the vehicle satisfies a condition during the hydraulic braking force control of all of the wheels.

Abstract: If a condition for finishing speed limit control is satisfied, a gradient of a slope of the road is estimated based on a steady component of the longitudinal acceleration of the vehicle, and a correction factor is computed based on the slope gradient of the road, while a target acceleration of the vehicle is computed based on the vehicle speed. Then, a target vehicle speed is computed by adding the target vehicle speed of the last cycle to the product of the correction factor, target acceleration and the cycle time of the control, and the braking or driving force of each wheel is controlled so that the vehicle speed becomes equal to the target vehicle speed. In this manner, a passenger of the vehicle is prevented from feeling uncomfortable about the speed increase after the completion of the vehicle speed limit control.

Abstract: If a condition for finishing speed limit control is satisfied, a gradient of a slope of the road is estimated based on a steady component of the longitudinal acceleration of the vehicle, and a correction factor is computed based on the slope gradient of the road, while a target acceleration of the vehicle is computed based on the vehicle speed. Then, a target vehicle speed is computed by adding the target vehicle speed of the last cycle to the product of the correction factor, target acceleration and the cycle time of the control, and the braking or driving force of each wheel is controlled so that the vehicle speed becomes equal to the target vehicle speed. In this manner, a passenger of the vehicle is prevented from feeling uncomfortable about the speed increase after the completion of the vehicle speed limit control.