Abstract: A plasma processing apparatus, comprising: a processing chamber; a gas supply part; a first electrode and a second electrode facing each other; first and second high-frequency power supply for supplying high-frequency powers to the first and second electrodes; a sensor part for measuring a state of plasma in the processing chamber; and a controller, wherein the first electrode applies a high-frequency voltage to generate the plasma from the processing gas, the second high-frequency power supply is a broadband power supply that is capable of setting a frequency of the high-frequency power supplied to the second electrode, the controller obtains an ion plasma frequency for a specific type of ion based on the measurement result, and the controller applies a high-frequency voltage of the ion plasma frequency to the plasma by setting the frequency of the high-frequency power supplied from the second high-frequency power supply as the ion plasma frequency.

Abstract: A method analyzes physical transport in a proton exchange membrane fuel cell (PEMFC) having three adjacent layers L1, L2, L3, each with a distinct porous structure. A first small scale multiphase simulation S1 of a first portion of the L1/L2 interface is used to characterize the L1/L2 interface. The S1 results are statistically extended to a larger second portion of the L1/L2 interface. The statistically extended L1/L2 interface is used as a boundary condition for a second multiphase simulation S2 to characterize the L2/L3 interface. S1 is repeated using the characterized L2/L3 interface as a boundary condition. S1 and S2 respectively simulate of one or more of momentum, energy, species, and charge transport across the L1/L2 and L2/L3 interface.

Abstract: Disclosed are computer implemented techniques for conducting a fluid simulation of a porous medium. These techniques involve retrieving a representation of a three dimensional porous medium, the representation including pore space corresponding to the porous medium, with the representation including at least one portion of under-resolved pore structure in the porous medium, defining a representative flow model that includes the under-resolved pore structure in the representation, and constructing by the computer system fluid force curves that correspond to fluid forces in the under-resolved pore structure in the representation.

Abstract: There is provided a plasma processing apparatus comprising: a chamber; a lower electrode provided in the chamber and included in a substrate support; an upper electrode provided in the chamber and disposed to face the lower electrode; a gas supply configured to supply a processing gas; a high-frequency power supply electrically connected to the upper electrode and configured to generate a plasma of the processing gas by applying a high-frequency voltage to the upper electrode; a first meter configured to measure a potential waveform of the upper electrode; a second meter configured to measure a potential waveform of the lower electrode; a detector configured to detect a voltage waveform; an impedance adjusting device configured to adjust an impedance of the lower electrode; and a controller configured to control the impedance adjusting device to adjust the impedance of the lower electrode based on the voltage waveform detected by the detector.

Abstract: There is provided a plasma processing apparatus comprising: a processing container; a lower electrode provided inside the processing container; an upper electrode disposed to face the lower electrode; a gas supply configured to supply a processing gas between the upper electrode and the lower electrode; a high frequency power source configured to generate plasma of the processing gas by applying a high frequency voltage to the upper electrode; and a voltage waveform shaping part provided between the high frequency power source and the upper electrode and configured to shape a voltage waveform of a high frequency voltage output from the high frequency power source by converting a positive voltage component into a negative voltage component.

Abstract: Disclosed are computer implemented techniques for conducting a fluid simulation of a porous medium. These techniques involve retrieving a representation of a three dimensional porous medium, the representation including pore space corresponding to the porous medium, with the representation including at least one portion of under-resolved pore structure in the porous medium, defining a representative flow model that includes the under-resolved pore structure in the representation, and constructing by the computer system fluid force curves that correspond to fluid forces in the under-resolved pore structure in the representation.

Abstract: A plasma processing apparatus is provided to perform plasma processing on a substrate. The plasma processing apparatus includes a processing chamber, a substrate support disposed in the processing chamber to place thereon the substrate, a grounded lower electrode provided in the substrate support, an upper electrode disposed to face the lower electrode, a gas supply unit to supply a processing gas to a space between the upper electrode and the substrate support, and a radio frequency power supply to apply RF power to the upper electrode to generate plasma of the processing gas. The plasma processing apparatus further includes a voltage waveform shaping unit provided between the RF power supply and the upper electrode to shape a voltage waveform of the RF power supply to suppress a positive voltage of the RF voltage applied to the upper electrode.

Abstract: This description relates to computer simulation of physical processes, such as computer simulation of multi-species flow through porous media including the determination/estimation of relative permeabilities for the multi-species flow through the porous media.

Abstract: This description relates to computer simulation of physical processes, such as computer simulation of multi-species flow through porous media including the determination/estimation of relative permeabilities for the multi-species flow through the porous media.

Abstract: This description relates to computer simulation of physical processes, such as computer simulation of multi-species flow through porous media including the determination/estimation of relative permeabilities for the multi-species flow through the porous media.

Abstract: This description relates to computer simulation of physical processes, such as computer simulation of multi-species flow through porous media including the determination/estimation of relative permeabilities for the multi-species flow through the porous media.

Abstract: A coin denomination discriminating device for improving coin dispensing devices which incorporates components formed of non-magnetic material including a non-magnetic rotor having a coin receiving portion and a non-magnetic reference guide to guide coins from a storage coin holding bowl to a coin conveying device capable of selectively releasing coins of various denominations. Magnetic sensor units can be positioned along the coin movement path to provide characteristic signals representative of the coins independent of influence of metallic components in the transporting path. The non-magnetic members can be formed from wear resistant plastic material and relatively inexpensive magnetic sensors with coil and ferrite coils can be utilized adjacent the rotor.

Abstract: A coin denomination discriminating device for improving coin dispensing devices which incorporates components formed of non-magnetic material including a non-magnetic rotor having a coin receiving portion and a non-magnetic reference guide to guide coins from a storage coin holding bowl to a coin conveying device capable of selectively releasing coins of various denominations. Magnetic sensor units can be positioned along the coin movement path to provide characteristic signals representative of the coins independent of influence of metallic components in the transporting path. The non-magnetic members can be formed from wear resistant plastic material and relatively inexpensive magnetic sensors with coil and ferrite coils can be utilized adjacent the rotor.

Abstract: The first purpose is to provide a coin selector which can be easily set up the standard data without putting coins into the coin selector. The second purpose of this invention is to provide both a coin selector and a outside setting unit which are not easily changed in the standard data. A coin selector comprises of; plural standard data memory for memorizing standard data, a selecting means which can be effective a selected standard data memory based on a direction from an outside setting unit, a distinguishing means which compares the memorized data of said selected standard data memory and the outputting data of a coin sensor and outputs an authenticity signal, a gate controlling means which controls a gate based on an output from the distinguishing means.

Abstract: A coin selector is provided which is adapted to electronically sample coins and compare the sampling data to stored data for genuine coins. The stored data can be preset or can be acquired and stored in memory by using a key coin. Data stored determines if a key coin is authentic and if it is, places the selector processor in a condition to accept and store new or modified data for determining the authenticity of other coins.