Patents by Inventor Hiroshi Sasai

Hiroshi Sasai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Semiconductor cleaning apparatus and wafer cassette
    Patent number: 5445171
    Abstract: A semiconductor cleaning apparatus having: a loader/unloader portion for injecting/ejecting a product cassette which accommodates a wafer; a product injecting/ejecting portion for injecting/ejecting the wafer from the product cassette; a cleaning portion for cleaning the wafer; a water cleaning portion for, with water, cleaning the wafer which has been cleaned in the cleaning portion; a drying portion for drying the wafer which has been cleaned with water in the water cleaning portion; and a conveyance portion having a wafer hand for directly holding the wafer ejected from the product cassette in the product injecting/ejecting portion and sequentially conveying the wafer held by the wafer hand to the cleaning portion, the water cleaning portion and the drying portion.
    Type: Grant
    Filed: September 20, 1993
    Date of Patent: August 29, 1995
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventors: Masashi Ohmori, Hiroshi Tanaka, Akira Nishimoto, Hiroshi Sasai, Naohiko Fujino, Satoru Kotoh