Patents by Inventor Hiroshi Sekihashi

Hiroshi Sekihashi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Chemical vapor deposition method for forming thin film
    Patent number: 5225245
    Abstract: An apparatus for forming, by a chemical vapor deposition process, a thin film of crystals such as diamond on a surface of a heated substrate placed in a reaction vessel. The apparatus has a substrate supporting structure, a heater for heating the substrate by heat conduction or by electric current supplied directly to the substrate, and a cooling device for cooling the substrate. The heater is controlled in accordance with the measured temperature of the substrate so as to accurately maintain the substrate temperature at a constant level.
    Type: Grant
    Filed: August 17, 1990
    Date of Patent: July 6, 1993
    Assignee: Kawasaki Steel Corporation
    Inventors: Tomohiro Ohta, Eiichi Kondoh, Tohru Mitomo, Kenichi Otsuka, Hiroshi Sekihashi
  • Chemical vapor deposition apparatus for forming thin film
    Patent number: 5209182
    Abstract: An apparatus for forming, by a chemical vapor deposition process, a thin film of crystals such as diamond on a surface of a heated substrate placed in a reaction vessel. The apparatus has a substrate supporting structure, a heater for heating the substrate by heat conduction or by electric current supplied directly to the substrate, and a cooling device for cooling the substrate. The heater is controlled in accordance with the measured temperature of the substrate so as to accurately maintain the substrate temperature at a constant level.
    Type: Grant
    Filed: April 29, 1992
    Date of Patent: May 11, 1993
    Assignee: Kawasaki Steel Corporation
    Inventors: Tomohiro Ohta, Eiichi Kondoh, Tohru Mitomo, Kenichi Otsuka, Hiroshi Sekihashi