Patents by Inventor Hiroshi Shimoike

Hiroshi Shimoike has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate conveying system in semiconductor manufacturing apparatus
    Patent number: 6438458
    Abstract: A substrate conveying system wherein, at a substrate transfer position of a conveyance robot, a robot arm is moved upwardly at a normal speed from its lowermost position, and wherein the movement speed is changed to a lower speed at a predetermined position. During upward motion at the lower speed, the substrate is received and, while continuing the upward motion, the movement speed is changed back to the normal speed, at a second predetermined position. The robot arm continues its upward motion to its topmost position, with this normal speed.
    Type: Grant
    Filed: January 28, 2000
    Date of Patent: August 20, 2002
    Assignee: Canon Kabushiki Kaisha
    Inventors: Hiroshi Shimoike, Takashi Nakahara
  • SUBSTRATE CONVEYING SYSTEM IN SEMICONDUCTOR MANUFACTURING APPARATUS
    Publication number: 20010047225
    Abstract: A substrate conveying system wherein, at a substrate transfer position of a conveyance robot, a robot arm is moved upwardly at a normal speed from its lowermost position, and wherein the movement speed is changed to a lower speed at a predetermined position. During upward motion at the lower speed, the substrate is received and, while continuing the upward motion, the movement speed is changed back to the normal speed, at a second predetermined position. The robot arm continues its upward motion to its topmost position, with this normal speed.
    Type: Application
    Filed: January 28, 2000
    Publication date: November 29, 2001
    Inventors: Hiroshi Shimoike, Takashi Nakahara