Abstract: A wheel operating force sensor includes: an attachment fixed to a vehicle body member supported by a suspension device; a hub to which a wheel is fixed and which is rotatably supported about a wheel axis with respect to the attachment; a sensing body having a tube formed substantially concentrically with the wheel axis, one end of the tube being fixed to the attachment, and the other end being connected to the hub, with a hub bearing being interposed between the other end and the hub; and a component force sensing unit having a bridge circuit including per component force at least four strain gauges that are provided on a circumferential surface of the tube of the sensing body. The hub bearing has: a radial bearing provided between the sensing body and the hub and receiving a load in a radial direction; and a thrust bearing provided between the sensing body and the hub and receiving a load in a thrust direction, and moreover provided separately from the radial bearing.

Abstract: Disclosed is an apparatus for driving a placing table that contributes to saving a space and reducing the weight of an inspecting apparatus. The apparatus for driving a placing table according to an exemplary embodiment of the present disclosure includes a horizontal driving mechanism that horizontally moves a placing table in an inspecting chamber, a base that supports horizontal driving mechanism, a placing table lifting mechanism (for example, air bearing) that lifts placing table from support, using compressed air in inspecting chamber, a connecting mechanism that connects horizontal driving mechanism with placing table, and a case that accommodates the horizontal driving mechanism and the base.

Abstract: An electron gun includes: an electron source; an accelerating electrode; an extraction electrode for extracting electrons from an electron emission surface of the electron source; a suppressor electrode for suppressing emission of electrons from a side surface of the electron source; and an electron beam converging unit for converging an electron beam of thermal field emission electrons emitted from the electron emission surface by applying an electric field to the electron emission surface. The electron beam converging unit is an electrostatic lens electrode which is placed between the extraction electrode and the accelerating electrode and having an opening portion in its center. A voltage is applied to the electrostatic lens electrode to converge the electron beam.

Abstract: A wafer inspection apparatus includes a first and second wafer transfer mechanisms, an alignment chamber, a second wafer transfer mechanism and a plurality of inspection chambers. The first wafer transfer mechanism is installed at a first transfer area to transfer wafers individually from a housing. The alignment chamber has an alignment mechanism configured to align the wafer at an inspection position for an electrical characteristics inspection. The second wafer transfer mechanism is configured to transfer the wafer through a wafer retaining support in a second transfer area formed along the first transfer area and an alignment area. The plurality of inspection chambers is arranged at an inspection area formed along the second transfer area and is configured to inspect electrical characteristics of the wafer transferred by the second wafer transfer mechanism through the wafer retaining support.

Abstract: A surface charge measuring distribution method includes the steps of irradiating a sample with a charged particle beam and charging a sample surface in a spot-like manner, irradiating the charged sample with the charged particle beam to measure a potential at a potential saddle point formed above the sample, selecting one of preset multiple structure models and a tentative space charge distribution associated with the selected structure model, calculating a space potential at the potential saddle point by electromagnetic field analysis using the selected structure model and tentative space charge distribution, comparing the calculated space potential and measured value to determine the tentative space charge distribution as a space charge distribution of the sample when an error between the space potential and the measured value is within a predetermined range, and calculating a surface charge distribution of the sample by electromagnetic field analysis based on the determined space charge distribution.

Abstract: A mounting device includes a vertically movable mounting table for mounting thereon a target object and a rotational driving mechanism for rotating the mounting table within a predetermined angle. The mounting table is vertically raised and rotated by the rotational driving mechanism. The rotational driving mechanism includes a driving shaft extending in a tangential direction of the mounting table and a moving body moving in the tangential direction via the driving shaft. A first cam follower is attached in perpendicular to the moving body and a second cam follower is extending horizontally from an outer circumferential surface of the mounting table so as to be in contact with the first cam follower. Also, a resilient member connecting the mounting table and the moving body brings the first cam follower and the second cam follower into elastic contact with each other.

Abstract: Disclosed is an apparatus for driving a placing table that contributes to saving a space and reducing the weight of an inspecting apparatus. The apparatus for driving a placing table according to an exemplary embodiment of the present disclosure includes a horizontal driving mechanism that horizontally moves a placing table in an inspecting chamber, a base that supports horizontal driving mechanism, a placing table lifting mechanism (for example, air bearing) that lifts placing table from support, using compressed air in inspecting chamber, a connecting mechanism that connects horizontal driving mechanism with placing table, and a case that accommodates the horizontal driving mechanism and the base.

Abstract: A mounting device provided on a horizontally movable stage mechanism, includes a mounting table for mounting thereon a target object, a cylindrical elevation body, having a diameter smaller than a diameter of the mounting table, for supporting the mounting table, a plurality of elevation guide rails provided on an outer peripheral surface of the elevation body so as to be spaced from each other at substantially regular intervals in a circumferential direction, and a plurality of support members each having a vertical plate to which engaging bodies engaged with the elevation guide rails are fixed. Further, a plurality of reinforcing parts are vertically provided on the outer peripheral surface of the elevation body so as to be spaced from each other at substantially regular intervals in the circumferential direction.

Abstract: A probe apparatus includes a first stage, a second stage, a third stage and an image pickup. A Z position measuring unit measures a Z direction position of the mounting table and has a Z scale extending in the Z direction and a reading unit for reading the Z scale. A computation unit obtains a calculated contact position between the probes and the electrode pads of the substrate to be inspected based on images picked up by the image pickup with respect to a coordinate position on coordinates of a driving system which includes a Z direction position and X and Y direction positions measured by a measuring unit for measuring X and Y direction positions of the mounting table. A correcting unit corrects the Z direction position of the contact position based on the change amount thereof for a next contact operation.

Abstract: An electrical connector for a flat sheet-like cable includes an insulative housing with a plurality of terminals and an actuator. The actuator is moveable between a first insertion position and a second operational position, the first position permitting insertion of the cable into the connector and the second position configured such that the contact pads of the cable engage the contact portions of the terminals. The actuator has an abutting part formed on opposite ends thereof. A pair of generally planar securing members is provided at opposite ends of the housing. Each securing member includes a stop surface to define a depth to which the cable may be inserted, a restraining member that interacts with the abutting parts upon positioning the actuator in the second position to define a restraining surface to prevent removal of the cable, and a recess portion defined between the stop surface and the restraining surface.

Abstract: A cable connector for connecting a flat cable having lead wires to a circuit board including a housing carrying terminals and an actuator moveable between a first position to enable insertion of the flat cable and a second position to connect the lead wires to the terminals. The actuator has a main body and further includes first shafts extending from opposite sides of the main body as well as second shafts carried in positions for engaging at least part of the terminals. The first shafts are supported by first bearing parts on auxiliary connector securing members carried on opposite sides of the housing while the second shafts are supported by second bearing parts of the terminals engaging the second shafts. When the actuator is in the first position, moment forces are generated on the first shafts and second shafts respectively by the first bearing parts and the second bearing parts which oppose movement of the actuator from the first position to the second position.

Abstract: An electron gun includes: an electron source; an accelerating electrode; an extraction electrode for extracting electrons from an electron emission surface of the electron source; a suppressor electrode for suppressing emission of electrons from a side surface of the electron source; and an electron beam converging unit for converging an electron beam of thermal field emission electrons emitted from the electron emission surface by applying an electric field to the electron emission surface. The electron beam converging unit is an electrostatic lens electrode which is placed between the extraction electrode and the accelerating electrode and having an opening portion in its center. A voltage is applied to the electrostatic lens electrode to converge the electron beam.

Abstract: An electrical connector for a flat sheet-like cable includes an insulative housing with a plurality of terminals and an actuator. The actuator is moveable between a first insertion position and a second operational position with the first position permitting insertion of the cable into the connector and the second position being configured such that the contact pads of the cable engage the contact portions of the terminals. The actuator has an abutting part formed on opposite ends thereof. A pair of generally planar securing members is provided at opposite ends of the housing. Each securing member includes a stop surface to define a depth to which the cable may be inserted, a restraining member that interacts with said abutting part of said actuator upon positioning said actuator in the second position to define a restraining surface to prevent removal of said cable and a recess portion defined between the stop surface and said restraining surface.

Abstract: A probe apparatus includes a first stage, a second stage, a third stage and an image pickup. A Z position measuring unit measures a Z direction position of the mounting table and has a Z scale extending in the Z direction and a reading unit for reading the Z scale. A computation unit obtains a calculated contact position between the probes and the electrode pads of the substrate to be inspected based on images picked up by the image pickup with respect to a coordinate position on coordinates of a driving system which includes a Z direction position and X and Y direction positions measured by a measuring unit for measuring X and Y direction positions of the mounting table. A correcting unit corrects the Z direction position of the contact position based on the change amount thereof for a next contact operation.

Abstract: A mounting device provided on a horizontally movable stage mechanism, includes a mounting table for mounting thereon a target object, a cylindrical elevation body, having a diameter smaller than a diameter of the mounting table, for supporting the mounting table, a plurality of elevation guide rails provided on an outer peripheral surface of the elevation body so as to be spaced from each other at substantially regular intervals in a circumferential direction, and a plurality of support members each having a vertical plate to which engaging bodies engaged with the elevation guide rails are fixed. Further, a plurality of reinforcing parts are vertically provided on the outer peripheral surface of the elevation body so as to be spaced from each other at substantially regular intervals in the circumferential direction.

Abstract: A mounting device includes a vertically movable mounting table for mounting thereon a target object and a rotational driving mechanism for rotating the mounting table within a predetermined angle. The mounting table is vertically raised and rotated by the rotational driving mechanism. The rotational driving mechanism includes a driving shaft extending in a tangential direction of the mounting table and a moving body moving in the tangential direction via the driving shaft. A first cam follower is attached in perpendicular to the moving body and a second cam follower is extending horizontally from an outer circumferential surface of the mounting table so as to be in contact with the first cam follower. Also, a resilient member connecting the mounting table and the moving body brings the first cam follower and the second cam follower into elastic contact with each other.

Abstract: An electrical connector is provided for terminating a flat electrical circuit. The connector includes a dielectric housing having an opening for receiving an end of the flat circuit. A plurality of signal terminals are mounted on the housing along the opening and include contact portions for engaging signal conductors on the flat circuit. At least one ground terminal is mounted on the housing and includes a contact portion for engaging a ground conductor on the flat circuit. An actuator is movably mounted on the housing for movement between an open position allowing the end of the flat circuit to be inserted into the opening and a closed position relatively biasing the flat circuit against the contact portions of the signal terminals.

Abstract: An electrical connector is provided for terminating a flat electrical circuit. The connector includes a dielectric housing having an opening for receiving an end of the flat circuit. A plurality of signal terminals are mounted on the housing along the opening and include contact portions for engaging signal conductors on the flat circuit. At least one ground terminal is mounted on the housing and includes a contact portion for engaging a ground conductor on the flat circuit. An actuator is movably mounted on the housing for movement between an open position allowing the end of the flat circuit to be inserted into the opening and a closed position relatively biasing the flat circuit against the contact portions of the signal terminals.

Abstract: A toner for electrophotography is so prepared that a wax in a binder resin has an average diameter in the range from 0.1 to 3.0 &mgr;m so as to alleviate hot offsetting and filming, and that the toner contains 1.0 to 2.5% by volume of a fine particle toner with particle diameters of 5.04 &mgr;m or smaller so as to grind, at an early stage, the toner components that have attached to a photoconductor and thereby prevent filming.