Abstract: Disclosed is a plasma processing apparatus 100 including: a chamber 101 in which plasma processing is performed; an electrode part 105 configured to be applied with a high-frequency power for generating a plasma in the chamber 101; a plasma sensor 160 for measuring a measured value MV corresponding to an electric potential of the plasma; a threshold determination section 122 for determining a threshold TH, depending on a plasma processing condition; and a judgment section 123 for judging presence or absence of abnormal discharge in the chamber 101, based on the measured value MV and the threshold TH.

Abstract: Disclosed is a recipe proposal device 10 including: an input section 11 for inputting a target information regarding a target shape of a substrate to be processed in a substrate processing apparatus; a recipe proposal section 12 that proposes a process recipe used in the substrate processing apparatus in order to form the target shape, based on the target information; a calculation section 13 that calculates a prediction information regarding a predicted shape when the substrate is processed in the substrate processing apparatus using the process recipe; and a display section 14 that displays the target information and the prediction information.

Abstract: A mover according to the present disclosure includes: a body to move; a second member; a suction unit; a location detection unit; a first moving part, and a second moving part. The second member moves in a state where the second member is combined with a first member provided for an object, as the body is displaced relative to the object. The suction unit is sucked to the object in the state where the second member is combined with the first member. The location detection unit detects a location of the body with respect to the object by detecting movement of the second member. The first moving part moves the body until the state where the second member is combined with the first member is established. The second moving part displaces the body relative to the object in the state where the second member is combined with the first member.

Abstract: A plasma potential measuring device, including: a detection electrode 162b which is disposed so as to face a plasma P generated in a chamber and at which an electric charge corresponding to an electric potential of the plasma is induced; a potential changing circuit 203 for changing a reference potential of the detection electrode 162b; and a detection circuit 202 for detecting an amount of electric charge or potential induced at the detection electrode 162b.

Abstract: A disclosed plasma processing system 10 includes: a plasma processing apparatus 100 including a processing chamber 100a for plasma processing an object 400 to be processed, and at least one component 122, 131 which is at least partially disposed in the processing chamber 100a; a storage unit 301 for storing a recipe including a set value specifying a plasma processing condition; a tolerance determination unit 302 that determines a tolerance of the set value, based on a degree of deterioration of the at least one component 122, 131; and a recipe modification unit 303 that modifies the recipe such that the set value falls within the tolerance, when the set value is outside the tolerance.

Abstract: A production equipment monitoring system 20 including: an anomaly index determination unit 23 determining an anomaly index a of a production equipment 10, based on a feature quantity obtained from an equipment information on the production equipment 10; a relevance determination unit 24 determining a degree of relevance D between each of anomalous conditions predicable to occur in the production equipment 10 and an observed condition of the production equipment 10; a detection threshold determination unit 25 determining a single detection threshold th for detecting a degree of anomaly A of the production equipment 10, based on anomaly thresholds at which are thresholds of the anomaly index a corresponding respectively to the anomalous conditions, and on the degree of relevance D; and an anomaly degree detection unit 26 detecting the degree of anomaly A of the production equipment 10, based on the anomaly index a and the detection threshold th.

Abstract: Disclosed herein is a mover including a plurality of wheels, a body, and a friction braking mechanism. The body has a bottom surface. The body is supported by the plurality of wheels with the bottom surface facing a traveling surface, and travels on the traveling surface by turning the plurality of wheels. The friction braking mechanism applies a brake on the body with at least a portion of the bottom surface or at least a portion of a movable body brought into contact with the traveling surface by switching, while the body is traveling, a state of the movable body from a first state into a second state. The second state is a state where the movable body protrudes from the bottom surface to a different height from in the first state.

Abstract: A carrier includes a body, a sensor, and an output unit. The body has the ability to travel autonomously and includes a holding mechanism for holding a burden. The sensor is provided for the body and detects a situation surrounding the body. The output unit outputs detected information, collected by the sensor, about the situation to a management device that manages operation of another carrier.

Abstract: Disclosed herein is a mover including an object detecting unit and either a masking processing unit or a transmission restricting unit as an additional processing unit. The object detecting unit detects an object based on a reception signal output from a receiver unit by having a transmitter unit transmit a scanning wave and by having the receiver unit receive a reflected wave, which is a component, reflected from the object, of the scanning wave. The masking processing unit performs masking processing of masking, in accordance with a timing at which, and/or a direction of incidence in which, a disturbance wave, not depending on the scanning wave, is incident on the receiver unit, a portion of the reception signal output from the receiver unit. The transmission restricting unit restricts a transmission range in which the transmitter unit transmits the scanning wave.

Abstract: A mover according to the present disclosure includes: a body to move; a second member; a suction unit; a location detection unit; a first moving part, and a second moving part. The second member moves in a state where the second member is combined with a first member provided for an object, as the body is displaced relative to the object. The suction unit is sucked to the object in the state where the second member is combined with the first member. The location detection unit detects a location of the body with respect to the object by detecting movement of the second member. The first moving part moves the body until the state where the second member is combined with the first member is established. The second moving part displaces the body relative to the object in the state where the second member is combined with the first member.

Abstract: Disclosed herein is a carrier including a body, a sensor, and an output unit. The body has the ability to travel autonomously and includes a holding mechanism for holding a burden. The sensor is provided for the body and detects a situation surrounding the body. The output unit outputs detected information, collected by the sensor, about the situation to a management device that manages operation of another carrier.

Abstract: Disclosed herein is a mover including a plurality of wheels, a body, and a friction braking mechanism. The body has a bottom surface. The body is supported by the plurality of wheels with the bottom surface facing a traveling surface, and travels on the traveling surface by turning the plurality of wheels. The friction braking mechanism applies a brake on the body with at least a portion of the bottom surface or at least a portion of a movable body brought into contact with the traveling surface by switching, while the body is traveling, a state of the movable body from a first state into a second state. The second state is a state where the movable body protrudes from the bottom surface to a different height from in the first state.

Abstract: Disclosed herein is a mover including an object detecting unit and either a masking processing unit or a transmission restricting unit as an additional processing unit. The object detecting unit detects an object based on a reception signal output from a receiver unit by having a transmitter unit transmit a scanning wave and by having the receiver unit receive a reflected wave, which is a component, reflected from the object, of the scanning wave. The masking processing unit performs masking processing of masking, in accordance with a timing at which, and/or a direction of incidence in which, a disturbance wave, not depending on the scanning wave, is incident on the receiver unit, a portion of the reception signal output from the receiver unit. The transmission restricting unit restricts a transmission range in which the transmitter unit transmits the scanning wave.

Abstract: A display device includes: an organic electroluminescent element; a capacitor; a drive transistor; a data line; a test transistor which switches between conduction and non-conduction between the data line and an anode electrode of the organic electroluminescent element; a voltage generation unit which supplies the data line with a test voltage for measuring an anode voltage of the organic electroluminescent element; a current detection unit which detects a current through the test transistor when a test transistor is in a conducting state, while the voltage generation unit is applying the test voltage to the data line; a control unit which updates the voltage value of the test voltage, based on a direction of the current detected by the current detection unit, and causes the voltage generation unit to output the updated test voltage.

Abstract: A display device includes: an organic electroluminescent element; a capacitor; a drive transistor; a data line; a test transistor which switches between conduction and non-conduction between the data line and an anode electrode of the organic electroluminescent element; a voltage generation unit which supplies the data line with a test voltage for measuring an anode voltage of the organic electroluminescent element; a current detection unit which detects a current through the test transistor when a test transistor is in a conducting state, while the voltage generation unit is applying the test voltage to the data line; a control unit which updates the voltage value of the test voltage, based on a direction of the current detected by the current detection unit, and causes the voltage generation unit to output the updated test voltage.

Abstract: An active-matrix substrate includes: a substrate; gate lines disposed on the substrate; source lines disposed on the substrate in a direction that crosses the gate lines; a first terminal provided for each of data line blocks obtained by grouping every m-lines (m being an integer greater than or equal to 2) of the source lines into a block; a first selection circuit provided for each of the data line blocks, for causing conduction between the first terminal and at least one source line selected from among the m source lines; a second terminal provided for every n-blocks (n being an integer greater than or equal to 2) of the data line blocks; and a second selection terminal provided for every n-blocks of the data line blocks, for causing conduction between the second terminal and at least one source line selected from among the m×n source lines.

Abstract: An active matrix substrate including: gate lines; source lines arranged in a direction orthogonal to each of the gate lines; a gate short-circuit line to short-circuit the gate lines; a source short-circuit line to short-circuit the source lines; gate line thin film transistors each having a drain electrode being connected to the corresponding one of the gate lines, and a source electrode being connected to the gate short-circuit line; and source line thin film transistors each having a drain electrode being connected to the corresponding one of the source lines, and a source electrode being connected to the source short-circuit line, in which the gate line thin film transistors and the source line thin film transistors are of depletion-mode, and the gate electrode of each of the source line thin film transistors is connected to the gate short-circuit line.

Abstract: A display device includes an organic EL element and a capacitor. A driving transistor is connected to an anode of the organic EL element and passes a current to the organic EL element. The current corresponds to a voltage held in the capacitor. A first switch is between the capacitor and a data line, and the data line supplies the voltage to the capacitor. A voltage detector is connected to the data line for detecting an anode voltage applied to the organic EL element. A second switch is between the anode and the data line. A controller turns on the first switch, causes the organic EL element to emit light, and causes the voltage detector to detect the anode voltage by turning off the first switch and turning on the second switch while the organic EL element is emitting light.

Abstract: An image display device includes a luminescent panel in which luminescent pixels are two-dimensionally arranged. Each luminescent pixel has a stacked luminescent layer and driving layer. The driving layer includes a capacitive element that includes two electrode layers stacked in parallel. A memory stores coordinate information of a repaired luminescent pixel in which the capacitive element is repaired through disconnection of a part of one of the two electrode layers. A controller converts video signals received by the image display device into luminescent pixel signals that determine luminescence of the luminescent pixels. The controller outputs the luminescent pixel signals to a driver in a scanning order.

Abstract: The present invention provides an organic light emitting display device in which light emitted by an OLED whose luminance is adjusted for detection of deterioration does not stand out as compared to light emitted by other OLEDs, thereby not producing an unpleasant sensation for users. A calculation unit in a display control unit 104 sets, for a target pixel 302, a driving signal Out(C)=V. For a peripheral pixel 301 horizontally located immediately before the target pixel 302, the calculation unit calculates a driving signal Out(C?1)=In(C?1)?V(In(C))/2. For a peripheral pixel 303 horizontally located immediately after the target pixel 302, the calculation unit calculates a driving signal Out(C+1)=In(C+1)?V(In(C))/2.