Patents by Inventor Hiroshi Someya

Hiroshi Someya has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11428892
    Abstract: An optical apparatus may include a housing having an opened front face, an optical unit freely movable into and out of an internal space of the housing through the front face, and a positioning portion disposed on a back side of the optical unit in the internal space. A base plate of the optical unit may include first and second convex portions disposed on a base end face of the base plate. The second convex portion may be disposed at a position different from the first convex portion in a width direction of the base plate. The positioning portion may include a V block having a V groove shape at a part contacting the first convex portion, and a flat block having a flat surface shape at a part contacting the second convex portion. The optical unit may be positioned in the internal space through the contact.
    Type: Grant
    Filed: August 26, 2020
    Date of Patent: August 30, 2022
    Assignee: Gigaphoton Inc.
    Inventors: Hiroshi Someya, Yukio Watanabe
  • Patent number: 11320740
    Abstract: A target supply device may include a first container configured to contain a target substance, a second container configured to contain the target substance supplied from the first container, a first valve disposed between the first container and the second container, a first pipe connected to the second container and configured to supply pressurized gas to the second container, a third container configured to contain the target substance supplied from the second container, a second valve disposed between the second container and the third container, a second pipe connected to the third container and configured to supply pressurized gas to the third container, and a nozzle configured to output the target substance supplied from the third container.
    Type: Grant
    Filed: April 12, 2021
    Date of Patent: May 3, 2022
    Assignee: Gigaphoton Inc.
    Inventors: Tsukasa Hori, Yutaka Shiraishi, Toshihiro Nishisaka, Hiroshi Someya, Yukio Watanabe
  • Publication number: 20210364927
    Abstract: A target supply device may include a first container configured to contain a target substance, a second container configured to contain the target substance supplied from the first container, a first valve disposed between the first container and the second container, a first pipe connected to the second container and configured to supply pressurized gas to the second container, a third container configured to contain the target substance supplied from the second container, a second valve disposed between the second container and the third container, a second pipe connected to the third container and configured to supply pressurized gas to the third container, and a nozzle configured to output the target substance supplied from the third container.
    Type: Application
    Filed: April 12, 2021
    Publication date: November 25, 2021
    Applicant: Gigaphoton Inc.
    Inventors: Tsukasa HORI, Yutaka SHIRAISHI, Toshihiro NISHISAKA, Hiroshi SOMEYA, Yukio WATANABE
  • Publication number: 20210103118
    Abstract: An optical apparatus may include a housing having an opened front face, an optical unit freely movable into and out of an internal space of the housing through the front face, and a positioning portion disposed on a back side of the optical unit in the internal space. A base plate of the optical unit may include first and second convex portions disposed on a base end face of the base plate. The second convex portion may be disposed at a position different from the first convex portion in a width direction of the base plate. The positioning portion may include a V block having a V groove shape at a part contacting the first convex portion, and a flat block having a flat surface shape at a part contacting the second convex portion. The optical unit may be positioned in the internal space through the contact.
    Type: Application
    Filed: August 26, 2020
    Publication date: April 8, 2021
    Applicant: Gigaphoton Inc.
    Inventors: Hiroshi SOMEYA, Yukio WATANABE
  • Patent number: 10485085
    Abstract: An extreme ultraviolet light sensor unit according to one aspect of the present disclosure includes a mirror configured to reflect extreme ultraviolet light, a filter configured to transmit the extreme ultraviolet light reflected by the mirror, an optical sensor configured to detect the extreme ultraviolet light having passed through the filter, a purge gas supply unit disposed to supply purge gas to a space between the mirror and the filter, and a pipe part configured to allow plasma light including the extreme ultraviolet light entering from an opening to pass therethrough toward the mirror and allow the purge gas flowing to the space between the mirror and the filter to flow out of the opening.
    Type: Grant
    Filed: September 4, 2018
    Date of Patent: November 19, 2019
    Assignee: Gigaphoton Inc.
    Inventors: Hisashi Nara, Hiroshi Someya, Takuya Ishii
  • Patent number: 10481354
    Abstract: An optical unit and an optical path tube are easily connected. A structure of connection between a side surface (1a) of the optical unit and the optical path tube includes: an extensible tube (72) constituting at least a part of the optical path tube, the extensible tube being extensible in a tube axis direction; a flange (26) attached to one end of the optical path tube; a flange receiving part (20) provided on the optical unit, the flange receiving part (20) receiving a front surface (26a) of the flange (26), the front surface (26a) of the flange (26) being an end surface on an open side; and a biasing part (23, 72) configured to bias at least a part of the optical path tube in a direction in which the extensible tube (72) extends.
    Type: Grant
    Filed: August 6, 2018
    Date of Patent: November 19, 2019
    Assignee: Gigaphoton Inc.
    Inventors: Yukio Watanabe, Hiroshi Someya, Yuki Kawashima, Yuto Tanaka
  • Publication number: 20190021159
    Abstract: An extreme ultraviolet light sensor unit according to one aspect of the present disclosure includes a mirror configured to reflect extreme ultraviolet light, a filter configured to transmit the extreme ultraviolet light reflected by the mirror, an optical sensor configured to detect the extreme ultraviolet light having passed through the filter, a purge gas supply unit disposed to supply purge gas to a space between the mirror and the filter, and a pipe part configured to allow plasma light including the extreme ultraviolet light entering from an opening to pass therethrough toward the mirror and allow the purge gas flowing to the space between the mirror and the filter to flow out of the opening.
    Type: Application
    Filed: September 4, 2018
    Publication date: January 17, 2019
    Applicant: GIGAPHOTON INC.
    Inventors: Hisashi NARA, Hiroshi SOMEYA, Takuya ISHII
  • Publication number: 20180341077
    Abstract: An optical unit and an optical path tube are easily connected. A structure of connection between a side surface (1a) of the optical unit and the optical path tube includes: an extensible tube (72) constituting at least a part of the optical path tube, the extensible tube being extensible in a tube axis direction; a flange (26) attached to one end of the optical path tube; a flange receiving part (20) provided on the optical unit, the flange receiving part (20) receiving a front surface (26a) of the flange (26), the front surface (26a) of the flange (26) being an end surface on an open side; and a biasing part (23, 72) configured to bias at least a part of the optical path tube in a direction in which the extensible tube (72) extends.
    Type: Application
    Filed: August 6, 2018
    Publication date: November 29, 2018
    Applicant: Gigaphoton Inc.
    Inventors: Yukio WATANABE, Hiroshi SOMEYA, Yuki KAWASHIMA, Yuto TANAKA
  • Patent number: 9253866
    Abstract: A gas lock device may include a chamber having a passage section and a connection hole that connects a surface to the passage section, an optical element that is attached to the chamber and seals the passage section, a gas supply apparatus, and a pipe that is attached at one end to the gas supply apparatus and attached at the other end to the chamber, and may define a flow channel communicating with the connection hole.
    Type: Grant
    Filed: February 4, 2014
    Date of Patent: February 2, 2016
    Assignee: Gigaphoton Inc.
    Inventors: Hiroshi Someya, Hideto Saito
  • Patent number: 9233782
    Abstract: A target supply device may include a tank formed cylindrically with a first material, a cylindrical portion for covering the tank, the cylindrical portion being formed of a second material having higher tensile strength than the first material, a first lid formed of the second material and having a through-hole, the first lid being provided at one end in an axial direction of the cylindrical portion, a second lid formed of the second material and provided at another end opposite the one end in the axial direction of the cylindrical portion, and a nozzle provided to be in fluid communication with the interior of the tank and to pass through the through-hole, the nozzle being formed of the first material.
    Type: Grant
    Filed: December 14, 2012
    Date of Patent: January 12, 2016
    Assignee: GIGAPHOTON INC.
    Inventors: Takanobu Ishihara, Toshihiro Nishisaka, Hiroshi Someya, Osamu Wakabayashi
  • Patent number: 9229192
    Abstract: A mirror device may include: a mirror including a base plate, a reflective film on a first surface of the base plate, and a plurality of first protrusions on a second surface of the base plate; a plurality of support parts for respectively supporting the plurality of the first protrusions, each support part having a groove formed therein for guiding the first protrusion; and a plurality of clamps for respectively pressing the plurality of the first protrusions against the respective grooves in the plurality of the support parts.
    Type: Grant
    Filed: April 27, 2015
    Date of Patent: January 5, 2016
    Assignee: Gigaphoton Inc.
    Inventors: Hiroshi Someya, Yukio Watanabe, Katsuhiko Wakana, Osamu Wakabayashi
  • Publication number: 20150226935
    Abstract: A mirror device may include: a mirror including a base plate, a reflective film on a first surface of the base plate, and a plurality of first protrusions on a second surface of the base plate; a plurality of support parts for respectively supporting the plurality of the first protrusions, each support part having a groove formed therein for guiding the first protrusion; and a plurality of clamps for respectively pressing the plurality of the first protrusions against the respective grooves in the plurality of the support parts.
    Type: Application
    Filed: April 27, 2015
    Publication date: August 13, 2015
    Inventors: Hiroshi SOMEYA, Yukio WATANABE, Katsuhiko WAKANA, Osamu WAKABAYASHI
  • Patent number: 9046651
    Abstract: A mirror device may include: a mirror including a base plate, a reflective film on a first surface of the base plate, and a plurality of first protrusions on a second surface of the base plate; a plurality of support parts for respectively supporting the plurality of the first protrusions, each support part having a groove formed therein for guiding the first protrusion; and a plurality of clamps for respectively pressing the plurality of the first protrusions against the respective grooves in the plurality of the support parts.
    Type: Grant
    Filed: December 29, 2011
    Date of Patent: June 2, 2015
    Assignee: GIGAPHOTON INC.
    Inventors: Hiroshi Someya, Yukio Watanabe, Katsuhiko Wakana, Osamu Wakabayashi
  • Patent number: 8804902
    Abstract: A collector mirror exchanging apparatus capable of safely and easily exchanging a collector mirror for collecting extreme ultra violet light emitted from plasma generated within a chamber of an extreme ultra violet light source apparatus. The collector mirror exchanging apparatus includes: a supporting base for supporting a collector mirror or a collector mirror structure; and a guiding rail disposed on the supporting base and regulating a moving direction of the collector mirror or the collector mirror structure; wherein at least the collector mirror is taken out of the chamber by moving the collector mirror or the collector mirror structure along the guiding rail on the supporting base.
    Type: Grant
    Filed: March 18, 2013
    Date of Patent: August 12, 2014
    Assignee: Gigaphoton Inc.
    Inventors: Hiroshi Someya, Tamotsu Abe, Takashi Suganuma, Hideo Hoshino, Akira Sumitani
  • Publication number: 20140216576
    Abstract: A gas lock device may include a chamber having a passage section and a connection hole that connects a surface to the passage section, an optical element that is attached to the chamber and seals the passage section, a gas supply apparatus, and a pipe that is attached at one end to the gas supply apparatus and attached at the other end to the chamber, and may define a flow channel communicating with the connection hole.
    Type: Application
    Filed: February 4, 2014
    Publication date: August 7, 2014
    Applicant: GIGAPHOTON INC.
    Inventors: Hiroshi SOMEYA, Hideto SAITO
  • Patent number: 8779402
    Abstract: A target supply device includes a target supply device body including a nozzle having a through-hole through which a target material is discharged, a piezoelectric member having first and second surfaces and connected to the target supply device body at the first surface, the piezoelectric member being configured such that a distance between the first and second surfaces changes in according with an externally supplied electric signal, an elastic member having first and second ends and connected to the second surface of the piezoelectric member at the first end, the elastic member being configured such that a distance between the first and second ends extends or contract in accordance with an externally applied force, and a regulating member configured to regulate a distance between the second end of the elastic member and the target supply device body.
    Type: Grant
    Filed: November 13, 2012
    Date of Patent: July 15, 2014
    Assignee: Gigaphoton Inc.
    Inventors: Takayuki Yabu, Yukio Watanabe, Toshihiro Nishisaka, Hiroshi Someya, Osamu Wakabayashi
  • Publication number: 20140166046
    Abstract: A method for cleaning collector mirrors in an EUV light generator in which a target is made into a plasma state and EUV light generated is collected by a collector mirror, the method being adopted to the EUV light generator for cleaning contaminants adhering thereto, the method comprising: preparing at least two collector mirrors; locating one of the mirrors at an EUV light condensing position while locating the other mirror at a cleaning position; determining whether the mirror at the cleaning position is cleaned while determining whether the mirror at the light condensing position requires cleaning; and once determined that the mirror at the cleaning position is cleaned and the mirror at the light condensing position requires cleaning, conveying the mirror at the light condensing position and requiring cleaning to the cleaning position while conveying the mirror at the cleaning position and having been cleaned to the light condensing position.
    Type: Application
    Filed: August 12, 2013
    Publication date: June 19, 2014
    Applicant: GIGAPHOTON INC.
    Inventors: Takeshi Asayama, Hiroshi Someya, Masato Moriya, Hideo Hoshino, Tamotsu Abe
  • Publication number: 20130240645
    Abstract: A target supply device may include a tank formed cylindrically with a first material, a cylindrical portion for covering the tank, the cylindrical portion being formed of a second material having higher tensile strength than the first material, a first lid formed of the second material and having a through-hole, the first lid being provided at one end in an axial direction of the cylindrical portion, a second lid formed of the second material and provided at another end opposite the one end in the axial direction of the cylindrical portion, and a nozzle provided to be in fluid communication with the interior of the tank and to pass through the through-hole, the nozzle being formed of the first material.
    Type: Application
    Filed: December 14, 2012
    Publication date: September 19, 2013
    Applicant: GIGAPHOTON INC
    Inventors: Takanobu Ishihara, Toshihiro Nishisaka, Hiroshi Someya, Osamu Wakabayashi
  • Patent number: 8536550
    Abstract: A method for cleaning collector mirrors in an EUV light generator in which a target is made into a plasma state and EUV light generated is collected by a collector mirror, the method being adopted to the EUV light generator for cleaning contaminants adhering thereto, the method comprising: preparing at least two collector mirrors; locating one of the mirrors at an EUV light condensing position while locating the other mirror at a cleaning position; determining whether the mirror at the cleaning position is cleaned while determining whether the mirror at the light condensing position requires cleaning; and once determined that the mirror at the cleaning position is cleaned and the mirror at the light condensing position requires cleaning, conveying the mirror at the light condensing position and requiring cleaning to the cleaning position while conveying the mirror at the cleaning position and having been cleaned to the light condensing position.
    Type: Grant
    Filed: June 4, 2009
    Date of Patent: September 17, 2013
    Assignee: Gigaphoton Inc.
    Inventors: Takeshi Asayama, Hiroshi Someya, Masato Moriya, Hideo Hoshino, Tamotsu Abe
  • Patent number: 8477412
    Abstract: A collector mirror exchanging apparatus is capable of safely and easily exchanging a collector mirror for collecting extreme ultra violet light emitted from plasma generated within a chamber of an extreme ultra violet light source apparatus. The collector mirror exchanging apparatus includes: a supporting base for supporting a collector mirror or a collector mirror structure; and a guiding rail disposed on the supporting base and regulating a moving direction of the collector mirror or the collector mirror structure; wherein at least the collector mirror is taken out of the chamber by moving the collector mirror or the collector mirror structure along the guiding rail on the supporting base.
    Type: Grant
    Filed: November 5, 2007
    Date of Patent: July 2, 2013
    Assignee: Gigaphoton Inc.
    Inventors: Hiroshi Someya, Tamotsu Abe, Takashi Suganuma, Hideo Hoshino, Akira Sumitani