Abstract: An X-ray generating apparatus provided with at least one deflecting means disposed between a freely selected pair of adjacent deflecting electromagnets and adapted to undulate electrons around a design orbit. When the deflecting means if formed of variable horizontally or vertically deflecting electromagnets capable of forming a variable magnetic field for electron on the orbit, the electrons are undulated around the design orbit and synchrotron radiation or powerful wiggler radiation from a wiggler is generated to irradiate a large area of a given substrate. Thus, in the transfer of patterns for the production of LSI devices for example, the X-ray generating apparatus enables highly intensive X-rays abundantly containing soft X-rays to be emitted uniformly to irradiate a wide area.

Abstract: A process for preparing alkoxyphosphonitrile compounds.

Abstract: A process for the preparation of phosphonitrile chloride oligomer, particularly, phosphonitrile chloride trimer at a high yield while suppressing the by-production of phosphonitrile chloride tetramer by reacting phosphorus pentachloride and ammonium chloride in an inert organic solvent under the presence of a polyvalent metal compound catalyst, wherein a catalytic amount of a compound selected from the group consisting of pyridine and alkyl-substituted pyridine derivatives capable of forming chloropyridinium salts in reaction with phosphorus pentachloride is present in the reaction system.

Abstract: A process for completely separating tri(phosphonitrile chloride) from tetra(phosphonitrile chloride) and/or phosphonitrile chloride oligomer which includes vacuum distillation of the phosphonitrile chloride mixture together with an inert mixture of hydrocarbons as solvent.