Patents by Inventor Hiroshi Toshiyoshi

Hiroshi Toshiyoshi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20210119555
    Abstract: The present invention enables frequency response in a wide band without lowering the Q value. This vibrational energy harvester device is provided with: a movable part capable of vibration in a vibration direction as a result of mechanical vibrational energy applied from the exterior, said movable part being provided with a first surface along the vibration direction; and a fixed part provided with a second surface facing the first surface of the movable part with an interval therebetween, said fixed part being configured so as to be positionally fixed even against vibrational energy. A plurality of projections protruding in a direction orthogonal to the vibration direction are formed so as to be arranged like comb teeth in the vibration direction on each of the first surface of the movable part and the second surface of the fixed part. An electret film is formed on at least the first surface of the fixed part or on at least the second surface of the movable part.
    Type: Application
    Filed: November 16, 2017
    Publication date: April 22, 2021
    Inventors: Hiroshi TOSHIYOSHI, Gen HASHIGUCHI, Hiroyuki MITSUYA, Hiroshi IMAMOTO
  • Publication number: 20210119556
    Abstract: A vibrational energy harvester element includes: a first electrode; a second electrode that moves in a predetermined direction with respect to the first electrode; a third electrode; a fourth electrode that moves in the predetermined direction with respect to the third electrode; and a support portion that supports the second electrode and the fourth electrode so that they are movable along the predetermined direction; and wherein: the first electrode and the third electrode are disposed along the predetermined direction; at least one of facing surfaces of the first electrode and the second electrode, and at least one of facing surfaces of the third electrode and the fourth electrode, are electrically charged; and the support portion supports the second electrode and the fourth electrode in a state in which electrostatic force between the first electrode and the second electrode, and electrostatic force between the third electrode and the fourth electrode are balanced along the predetermined direction.
    Type: Application
    Filed: November 13, 2017
    Publication date: April 22, 2021
    Inventors: Hiroshi TOSHIYOSHI, Hiroyuki FUJITA, Hisayuki ASHIZAWA, Hiroyuki MITSUYA, Kazunori ISHIBASHI
  • Publication number: 20210099104
    Abstract: Provided is an electrostatic-type vibrational energy harvester device that makes it possible to efficiently rectify and charge power from low acceleration to high acceleration of vibrational energy applied from the exterior. The vibrational energy harvester device is provided with: a movable part capable of vibrating in a vibration direction as a result of mechanical vibrational energy, said movable part being provided with a first surface along the vibration direction; and a fixed part provided with a second surface facing the first surface of the movable part with a gap therebetween so that it is possible for the movable part to vibrate in the vibration direction. A plurality of recessed portions and protruding sections are formed in an alternating manner in the vibration direction on the surfaces of each of the first surface of the movable part and the second surface of the fixed part. An electret film is formed on at least one of the fixed part and the movable part.
    Type: Application
    Filed: November 16, 2017
    Publication date: April 1, 2021
    Inventors: Hiroshi TOSHIYOSHI, Gen HASHIGUCHI, Hiroyuki MITSUYA, Hiroshi IMAMOTO
  • Patent number: 10840827
    Abstract: A vibration energy harvester includes: a first electrode; and a second electrode that can be displaced relative to the first electrode along a predetermined vibrating direction. At least either of a surface of the first electrode and a surface of the second electrode facing opposite each other is electrically charged. Power is generated as the second electrode becomes displaced causing a change in electrostatic capacitance between the first electrode and the second electrode. A range having included therein at least a vibrational center of the second electrode, over which the electrostatic capacitance remains unchanged even as the second electrode is displaced, is set.
    Type: Grant
    Filed: September 27, 2016
    Date of Patent: November 17, 2020
    Assignees: The University of Tokyo, Saginomiya Seisakusho, Inc.
    Inventors: Hiroshi Toshiyoshi, Hiroyuki Fujita, Hisayuki Ashizawa, Hiroyuki Mitsuya, Kazunori Ishibashi
  • Publication number: 20190058420
    Abstract: A vibration energy harvester includes: a first electrode; and a second electrode that can be displaced relative to the first electrode along a predetermined vibrating direction. At least either of a surface of the first electrode and a surface of the second electrode facing opposite each other is electrically charged. Power is generated as the second electrode becomes displaced causing a change in electrostatic capacitance between the first electrode and the second electrode. A range having included therein at least a vibrational center of the second electrode, over which the electrostatic capacitance remains unchanged even as the second electrode is displaced, is set.
    Type: Application
    Filed: September 27, 2016
    Publication date: February 21, 2019
    Inventors: Hiroshi TOSHIYOSHI, Hiroyuki FUJITA, Hisayuki ASHIZAWA, Hiroyuki MITSUYA, Kazunori ISHIBASHI
  • Publication number: 20180201920
    Abstract: A phoresis device for moving a target object by dielectrophoresis is realized with use of a thin film transistor substrate. A phoresis device (1) includes a TFT substrate (10) which supports a muscle cell (T1) and a nerve cell (T2) and which is configured to form an electric field that causes dielectrophoresis. In the phoresis device (1), the muscle cell (T1) and the nerve cell (T2) are moved through application of a voltage to part of a plurality of transistors of the TFT substrate (10).
    Type: Application
    Filed: July 13, 2016
    Publication date: July 19, 2018
    Inventors: Satoshi IHIDA, Agnes TIXIER MITA, Hiroshi TOSHIYOSHI
  • Patent number: 9726563
    Abstract: A device member including a cavity, includes a base member, an interlayer, an upper layer, an opening portion, and a gas-permeable sealing layer. The base member includes a first semiconductor. The interlayer is formed on the base member and is non-conductive. The upper layer is formed on the interlayer and includes a second semiconductor. The opening portion is formed at the upper layer. The gas-permeable sealing layer is formed to seal the opening portion formed at the upper layer. The cavity is formed by removing the interlayer with an etching gas that penetrates through the sealing layer.
    Type: Grant
    Filed: June 18, 2013
    Date of Patent: August 8, 2017
    Assignees: THE UNIVERSITY OF TOKYO, KABUSHIKI KAISHA SAGINOMIYA SEISAKUSHO
    Inventors: Hiroyuki Fujita, Hiroshi Toshiyoshi, Hiroyuki Mitsuya
  • Patent number: 9182592
    Abstract: An optical filtering device and an optical inspection apparatus for detecting a defect in a high sensitivity using an optical filtering device which includes a shutter array formed in a two-dimensionally on an optically opaque thin film produced on a SOI wafer and the SOI wafer is removed at portions thereof on the lower side of the shutter patterns to form perforation portions while working electrodes are formed at the remaining portion of the SOI wafer, a glass substrate having electrode patterns formed on the surface thereof and having the shutter array mounted thereon, and a power supply section for supplying electric power to the electrode patterns formed on the glass substrate and the working electrodes of the SOI wafer. And the working electrodes is controlled to cause the shutter patterns to carry out opening and closing movements with respect to the perforation portions to carry out optical filtering.
    Type: Grant
    Filed: February 3, 2012
    Date of Patent: November 10, 2015
    Assignees: HITACHI, LTD., THE UNIVERSITY OF TOKYO
    Inventors: Taketo Ueno, Toshihiko Nakata, Yukihiro Shibata, Shun'ichi Matsumoto, Atsushi Taniguchi, Hiroshi Toshiyoshi, Takuya Takahashi, Kentaro Motohara
  • Publication number: 20150211949
    Abstract: [Problem] The enclosing layer is not invaded in the gap, and the gap might not be buried, and the cavity which has the predetermined shape to be aimed can be formed by an easy step. [Resolution Approach] In the invention, comprising; the base member including the semiconductor 12, the interlayer 14, which is formed on the base member 12 and has the nonconductivity, the upper layer 16, which is formed on the interlayer 14 and includes the semiconductor, the opening portion 18 formed to the upper layer 16, the gas-permeable sealing layer 20, which is formed to seal the opening portion 18, wherein the cavity 22 is a cavity which is formed by removing the interlayer 14 with an etching gas that is penetrated through the sealing layer 20.
    Type: Application
    Filed: June 18, 2013
    Publication date: July 30, 2015
    Applicants: The University of Tokyo, Kabushiki Kaisha Saginomiya Seisakusho
    Inventors: Hiroyuki Fujita, Hiroshi Toshiyoshi, Hiroyuki Mitsuya
  • Publication number: 20140160471
    Abstract: An optical filtering device and an optical inspection apparatus for detecting a defect in a high sensitivity using an optical filtering device which includes a shutter array formed in a two-dimensionally on an optically opaque thin film produced on a SOI wafer and the SOI wafer is removed at portions thereof on the lower side of the shutter patterns to form perforation portions while working electrodes are formed at the remaining portion of the SOI wafer, a glass substrate having electrode patterns formed on the surface thereof and having the shutter array mounted thereon, and a power supply section for supplying electric power to the electrode patterns formed on the glass substrate and the working electrodes of the SOI wafer. And the working electrodes is controlled to cause the shutter patterns to carry out opening and closing movements with respect to the perforation portions to carry out optical filtering.
    Type: Application
    Filed: February 3, 2012
    Publication date: June 12, 2014
    Inventors: Taketo Ueno, Toshihiko Nakata, Yukihiro Shibata, Shun'ichi Matsumoto, Atsushi Taniguchi, Hiroshi Toshiyoshi, Takuya Takahashi, Kentaro Motohara
  • Patent number: 8288188
    Abstract: To provide a compact and high performance gyroscope. A gyroscope (10) comprises an outer frame (11); an inner frame (12) positioned inside the outer frame and supported to be movable in one reciprocating direction; a plurality of proof masses (15) positioned inside the inner frame and supported to be movable in the direction orthogonal to the one reciprocating direction; a plurality of outer support suspensions (13) which connect the outer frame and the inner frame; a plurality of inner support suspensions (14) which connect the inner frame and each of the proof masses; actuators (16) for accelerating each of the proof masses; and detectors (17) for detecting displacement of the inner frame against the outer frame. The actuators oscillate the plurality of proof masses in-phase, and wherein Coriolis forces induced on each of the proof masses are summed up in the inner frame.
    Type: Grant
    Filed: October 13, 2010
    Date of Patent: October 16, 2012
    Assignee: Japan Aerospace Exploration Agency
    Inventors: Makoko Mita, Hirobumi Saito, Hiroshi Toshiyoshi
  • Publication number: 20110086455
    Abstract: To provide a compact and high performance gyroscope. A gyroscope (10) comprises an outer frame (11); an inner frame (12) positioned inside the outer frame and supported to be movable in one reciprocating direction; a plurality of proof masses (15) positioned inside the inner frame and supported to be movable in the direction orthogonal to the one reciprocating direction; a plurality of outer support suspensions (13) which connect the outer frame and the inner frame; a plurality of inner support suspensions (14) which connect the inner frame and each of the proof masses; actuators (16) for accelerating each of the proof masses; and detectors (17) for detecting displacement of the inner frame against the outer frame. The actuators oscillate the plurality of proof masses in-phase, and wherein Coriolis forces induced on each of the proof masses are summed up in the inner frame.
    Type: Application
    Filed: October 13, 2010
    Publication date: April 14, 2011
    Applicant: Japan Aerospace Exploration Agency
    Inventors: Makoto Mita, Hirobumi Saito, Hiroshi Toshiyoshi
  • Patent number: 7832271
    Abstract: To provide a compact and high performance gyroscope. A gyroscope (10) comprises an outer frame (11); an inner frame (12) positioned inside the outer frame and supported to be movable in one reciprocating direction; a plurality of proof masses (15) positioned inside the inner frame and supported to be movable in the direction orthogonal to the one reciprocating direction; a plurality of outer support suspensions (13) which connect the outer frame and the inner frame; a plurality of inner support suspensions (14) which connect the inner frame and each of the proof masses; actuators (16) for accelerating each of the proof masses; and detectors (17) for detecting displacement of the inner frame against the outer frame. The actuators oscillate the plurality of proof masses in-phase, and wherein Coriolis forces induced on each of the proof masses are summed up in the inner frame.
    Type: Grant
    Filed: May 24, 2005
    Date of Patent: November 16, 2010
    Assignee: Japan Aerospace Exploration Agency
    Inventors: Makoko Mita, Hirobumi Saito, Hiroshi Toshiyoshi
  • Patent number: 7825755
    Abstract: A semiconductor substrate; a cantilever which is formed on the semiconductor substrate so as to face the semiconductor substrate with an air layer therebetween, the cantilever being made from an electrically conductive material or a semiconductor material, and the cantilever being mechanically movable; a photodiode which is formed so as to be connected in parallel to a capacitance that is constituted from the cantilever and the semiconductor substrate, and the photodiode being formed between an anchor portion which is a portion of the cantilever and the semiconductor substrate; and a power source which supplies voltage via a resistance on a side of the cantilever which is a connection point of a parallel circuit including both the capacitance and the photodiode so as to be backward bias to the photodiode, are included.
    Type: Grant
    Filed: April 7, 2005
    Date of Patent: November 2, 2010
    Assignee: The Foundation for the Promotion of Industrial Science
    Inventors: Hiroshi Toshiyoshi, Hiroyuki Fujita, Yuko Yamauchi, Akio Higo, Kuniyuki Kakushima
  • Patent number: 7808150
    Abstract: An actuator that can be driven at a reduced voltage and manufactured with ease, and a method for manufacturing the same are provided. The actuator includes second supporting portions 31 and 32 secured to a supporting substrate 4 through a spacer, fixed portions 33 and 34 secured to the supporting substrate 4 with no intervention of the spacer, fixed comb electrodes 331 and 341 integrally formed the fixed portions 33 and 34 and meshing with movable comb electrodes 211 and 212 in a spaced-apart relationship, and bridge portions 35 and 36 for connecting the fixed portions 33 and 34 to the second supporting portions 31 and 32.
    Type: Grant
    Filed: October 28, 2009
    Date of Patent: October 5, 2010
    Assignees: Seiko Epson Corporation, The University of Tokyo, Santec Corporation
    Inventors: Mitsuhiro Yoda, Keiji Isamoto, Hiroshi Toshiyoshi
  • Patent number: 7719163
    Abstract: An actuator that can be driven at a reduced voltage and manufactured with ease, and a method for manufacturing the same are provided. The actuator includes second supporting portions 31 and 32 secured to a supporting substrate 4 through a spacer, fixed portions 33 and 34 secured to the supporting substrate 4 with no intervention of the spacer, fixed comb electrodes 331 and 341 integrally formed the fixed portions 33 and 34 and meshing with movable comb electrodes 211 and 212 in a spaced-apart relationship, and bridge portions 35 and 36 for connecting the fixed portions 33 and 34 to the second supporting portions 31 and 32.
    Type: Grant
    Filed: May 30, 2006
    Date of Patent: May 18, 2010
    Assignees: Seiko Epson Corporation, The University of Tokyo, Santec Corporation
    Inventors: Mitsuhiro Yoda, Keiji Isamoto, Hiroshi Toshiyoshi
  • Publication number: 20100045137
    Abstract: An actuator that can be driven at a reduced voltage and manufactured with ease, and a method for manufacturing the same are provided. The actuator includes second supporting portions 31 and 32 secured to a supporting substrate 4 through a spacer, fixed portions 33 and 34 secured to the supporting substrate 4 with no intervention of the spacer, fixed comb electrodes 331 and 341 integrally formed the fixed portions 33 and 34 and meshing with movable comb electrodes 211 and 212 in a spaced-apart relationship, and bridge portions 35 and 36 for connecting the fixed portions 33 and 34 to the second supporting portions 31 and 32.
    Type: Application
    Filed: October 28, 2009
    Publication date: February 25, 2010
    Applicants: SEIKO EPSON CORPORATION, THE UNIVERSITY OF TOKYO
    Inventors: Mitsuhiro YODA, Keiji ISAMOTO, Hiroshi TOSHIYOSHI
  • Publication number: 20090320167
    Abstract: A mechanical oscillator which defines a starting point of a cantilever at a front edge of a base and can determine the length of the cantilever without depending on an alignment accuracy and an etching amount, and a fabrication method of the mechanical oscillator. The mechanical oscillator, produced by processing a wafer, comprises a base (101) formed from a substrate supporting an SOI wafer and a structure to be a cantilever (102) which is formed from a silicon thin film of the SOI wafer and is horizontally protruding from the base (101), wherein a part of a buried oxide film (103) between the base (101) and the structure to be a cantilever (102) is removed, and a cantilever (104) starting from the front edge (105) of the base (101) is formed by directly jointing the structure to be a cantilever (102) to a part including at least the front edge (105) of the base (101) where the buried oxide film was removed.
    Type: Application
    Filed: December 5, 2005
    Publication date: December 24, 2009
    Applicant: Japan Science and Technology Agency
    Inventors: Dai Kobayashi, Hideki Kawakatsu, Hiroshi Toshiyoshi
  • Publication number: 20090256823
    Abstract: A display device is provided with an optical waveguide, a transparent fixed electrode disposed in surface contact with the optical waveguide, and a transparent movable electrode disposed facing the transparent fixed electrode on a side opposite to the optical waveguide. When a driving voltage is applied, the transparent movable electrode is movable by an external force, between a first stable state in which it is kept apart from the transparent fixed electrode by elasticity, and a second stable state in which it makes insulated contact with the transparent fixed electrode by electrostatic force. There is no concern about contaminating the air or dirtying hands, and it is possible to write easily using a finger or a simple writing tool, and repeatedly erase.
    Type: Application
    Filed: November 28, 2006
    Publication date: October 15, 2009
    Applicant: TOKYO, THE UNIVERSITY OF
    Inventors: Hiroyuki Fujita, Hiroshi Toshiyoshi, Akio Higo, Roi Shigematsu
  • Publication number: 20090102006
    Abstract: A semiconductor substrate; a cantilever which is formed on the semiconductor substrate so as to face the semiconductor substrate with an air layer therebetween, the cantilever being made from an electrically conductive material or a semiconductor material, and the cantilever being mechanically movable; a photodiode which is formed so as to be connected in parallel to a capacitance that is constituted from the cantilever and the semiconductor substrate, and the photodiode being formed between an anchor portion which is a portion of the cantilever and the semiconductor substrate; and a power source which supplies voltage via a resistance on a side of the cantilever which is a connection point of a parallel circuit including both the capacitance and the photodiode so as to be backward bias to the photodiode, are included.
    Type: Application
    Filed: April 7, 2005
    Publication date: April 23, 2009
    Inventors: Hiroshi Toshiyoshi, Hiroyuki Fujita, Yuko Yamauchi, Akio Higo, Kuniyuki Kakushima