Abstract: In an embodiment of the present invention, the following operations are performed while a substrate holder is being rotated at a fixed rotation speed with plasma being generated. Specifically, a first state where a substrate holding surface of the substrate holder is exposed to a target holder is formed to start a first deposition of divisional depositions, and a second state where the surface is shut off from the target holder is formed in T/X seconds after the start of the first divisional deposition. Moreover, the first state is formed to start an n-th deposition of the divisional depositions when a reference point set on the substrate holder arrived at a position rotated by (n?1)×360/X degrees from a position of the reference point located at the start of the targeted deposition, and the second state is formed in T/X seconds after the start of the n-th divisional deposition.

Abstract: An apparatus for controlling an operation of a turbine plant on a reduction of the load on a turbine operates to compute a saturation pressure corresponding to the temperature in the downcomer pipe by using the detected values representing the conditions of the plant, and to control the reduction of the turbine to maintain the pressure in the downcomer pipe higher than the computed saturation pressure so as to prevent an occurrence of flashing.

Abstract: A side stream type condenser which has a first hot well for condensing steam exhausted from a turbine and storing the condensed water and a second hot well for storing the purified condensed water to prepare for water feed to a main system includes a partition plate for defining the two hot wells. The partition plate is formed with a weir portion so that part of the condensed water in the second hot well may overflow to keep a fixed water level. The weir portion is constructed in the shape of a labyrinth and is formed with a passage normally filled up with the condensed water, and a space in the upper part of the second hot well communicates with the upper space of the first hot well through this passage only. The condensed water in the first hot well is fed to a purifying system disposed outside, and is purified therein.

Abstract: In starting a steam turbine plant of a combined plant including a gas turbine plant in addition to the steam turbine plant, a condensation system is controlled in such a manner that water retained in a deaerated water tank used in the steam turbine plant is fed to a gas turbine waste heat recovery boiler at steam turbine plant start-up, and the condensate recovered from the boiler is stored in a condenser and a condensate tank. Feeding of water from the condenser to a deaerator is initiated when the deaerator functions satisfactorily by using as a heat source the water at the outlet of a fuel economizer of the boiler.