Abstract: A substrate transporting apparatus includes a wafer transfer arm 10 for carrying a plurality of semiconductor wafers W being processed horizontally, a pitch changer 20 for carrying the wafers W at predetermined intervals vertically and a posture changing device 30 positioned between the wafer transfer arm 10 and the pitch changer 20, for changing the posture of the wafers W to the horizontal and vertical arrangements. The pitch changer 20 includes a first holding part 21A and a second holding part 21B which are adapted so as to elevate relatively to each other. The wafers W are held by either one of the holding parts 21A, 21B at the predetermined intervals. The posture changing device 30 has a pair of holders 31 between which the semiconductor wafers W is interposed. The holders 31 are respectively provided, on their sides opposing each other, with a plurality of holding grooves 32A, 32B for retaining the wafers W independently.

Abstract: A substrate transporting apparatus includes a wafer transfer arm 10 for carrying a plurality of semiconductor wafers W being processed horizontally, a pitch changer 20 for carrying the wafers W at predetermined intervals vertically and a posture changing device 30 positioned between the wafer transfer arm 10 and the pitch changer 20, for changing the posture of the wafers W to the horizontal and vertical arrangements. The pitch changer 20 includes a first holding part 21A and a second holding part 21B which are adapted so as to elevate relatively to each other. The wafers W are held by either one of the holding parts 21A, 21B at the predetermined intervals. The posture changing device 30 has a pair of holders 31 between which the semiconductor wafers W is interposed. The holders 31 are respectively provided, on their sides opposing each other, with a plurality of holding grooves 32A, 32B for retaining the wafers W independently.

Abstract: A substrate transporting apparatus includes a wafer transfer arm 10 for carrying a plurality of semiconductor wafers W being processed horizontally, a pitch changer 20 for carrying the wafers W at predetermined intervals vertically and a posture changing device 30 positioned between the wafer transfer arm 10 and the pitch changer 20, for changing the posture of the wafers W to the horizontal and vertical arrangements. The pitch changer 20 includes a first holding part 21A and a second holding part 21B which are adapted so as to elevate relatively to each other. The wafers W are held by either one of the holding parts 21A, 21B at the predetermined intervals. The posture changing device 30 has a pair of holders 31 between which the semiconductor wafers W is interposed. The holders 31 are respectively provided, on their sides opposing each other, with a plurality of holding grooves 32A, 32B for retaining the wafers W independently.

Abstract: A link mechanism, such as a panhard rod or the like, has a rod section and a collar section at each of its two ends. One collar section is supported on the case side bracket through a bushing. The other collar section is supported on the body side bracket through a bushing. A mass is provided at each collar section for limiting vibrations. Each mass is configured so that its principal inertia axis coincides with the principal elastic axis of its bushing in at least one direction of the bending vibration mode of the rod section so that the nodes of the bending vibration mode of the panhard rod also coincide with the principal inertia axis of the mass and thus the principal elastic axis of the bushing. This significantly dampens the vibrations imparted to the link mechanism.

Abstract: A vibration damping insulator for supporting a structural member on a vehicle chassis. The insulator comprises a first tubular member connected to said structural member, a second tubular member disposed coaxially within the first tubular member and connected to the vehicle chassis, a first elastomeric body interconnecting the first and second tubular members and arranged to undergo shear when the tubular members are displace in one direction and compression when the tubular members are displaced in a second direction relative to each other, a stiffening plate disposed in the first elastomeric body between the first and second tubular members, a vibratable mass, and a second elastomeric body separate from the first elastomeric body and interconnecting the vibratable mass and one of the tubular members. The second elastomeric body and the vibratable mass define a dynamic damper having a resonance characteristic which suppresses transmission of vibration from the structural member to the chassis.

Abstract: The present invention features an insulator unit for supporting a suspension arrangement on a chassis or the like. The main elastomeric body of the insulator is arranged to have sufficient rigidity as to limit the displacement of the suspension with respect to the chassis. The device further includes a vibratory mass or masses which upon being excited cancel vibrations which would otherwise be transmitted through the main elastomeric member.