Abstract: A substrate processing system includes a substrate processing apparatus and a measurement apparatus. The substrate processing apparatus includes a gas supply unit. The gas supply unit includes a flow rate controller and a secondary valve. The secondary valve is connected to a secondary side of the flow rate controller. The secondary valve is opened when a voltage is output from a first controller of the substrate processing system through a wiring. The measurement apparatus measures the flow rate of the gas output from the flow rate controller according to the instruction from the first controller. The measurement apparatus includes a second controller. The measurement apparatus includes a relay provided on the wiring. The second controller is configured to control the relay.

Abstract: A substrate processing system according to an exemplary embodiment includes a substrate processing apparatus and a measurement apparatus. The substrate processing apparatus includes a gas supply unit. The gas supply unit includes a flow rate controller and a secondary valve. The secondary valve is connected to a secondary side of the flow rate controller. The secondary valve is opened when a voltage is output from a first controller of the substrate processing system through a wiring. The measurement apparatus measures the flow rate of the gas output from the flow rate controller according to the instruction from the first controller. The measurement apparatus includes a second controller. The measurement apparatus includes a relay provided on the wiring. The second controller is configured to control the relay.

Abstract: When monitoring a logistics line and outputting a video image on a display, a privacy-protected video image processor uses an image of a first specific region corresponding to an area of the logistics line as it is among an original image captured by a capture, and performs mask processing on a person detected in an image of a region other than the first specific region.

Abstract: When monitoring a logistics line and outputting a video image on a display, a privacy-protected video image processor uses an image of a first specific region corresponding to an area of the logistics line as it is among an original image captured by a capture, and performs mask processing on a person detected in an image of a region other than the first specific region.

Abstract: The object of the present invention is to realize monitoring equipment for optical digital communications which can measure the quality of or acquire data in communication networks without reducing the optical power in communication networks.