Patents by Inventor Hirosi Arakawa

Hirosi Arakawa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Cleaning method
    Patent number: 6416586
    Abstract: The present invention has as an object thereof to provide a cleaning method which realizes, in the cleaning process, (1) a reduction in the number of processes, (2) a simplification of the cleaning apparatus, and (3) a reduction in the amount of chemicals and pure water employed, and which has highly superior cleaning effects and does not damage the substrate body, as well as to provide a rinsing method which aids in the hydrogen termination of silicon atoms.
    Type: Grant
    Filed: November 29, 1999
    Date of Patent: July 9, 2002
    Assignees: Kabushiki Kaisha Ultraclean Technology Reserach Institute
    Inventors: Tadahiro Ohmi, Toshihiro Il, Kenji Mori, Toshikazu Abe, Hirosi Arakawa, Takahisa Nitta