Abstract: A roller-type depressing device, an imprinting device, and a roller-type depressing method which are capable of suppressing an uneven elastic deformation of a main roller, and which are also capable of depressing an object uniformly. A roller-type depressing device depresses an object, and includes a main roller having at least a surface formed of an elastic material, and depressing the object, a roller moving unit moving the main roller relative to the object, a pressure adjusting unit adjusting pressure applied to the object by the main roller, a pressure receiving stage receiving the pressure from the main roller via the object, an intermediate roller having at least a surface formed of a material with a larger elastic modulus than the elastic material, and supporting the main roller, and, a backup roller formed shorter in an axial direction than the main roller and the intermediate roller, and supporting the intermediate roller.

Abstract: A roller-type depressing device that can depress an object like a die or a molding target by controlling the pressure of a roller, an imprint device, and a method utilizing the same are provided. A roller-type depressing device depresses an object like a die or a molding target by a main roller, and includes a pressure adjusting plate, a roller moving unit that moves the main roller relative to the object, a pressure adjusting unit that holds the pressure adjusting plate so that force produced by a pressure difference in fluid applied to both faces of the pressure adjusting plate acts on the main roller, a pressure receiving stage receiving pressure of the main roller, a pressure adjuster that adjusts the pressure difference in fluid applied to both faces of the pressure adjusting plate, and a pressure equalizer that equalizes pressure applied to the object by the main roller.

Abstract: An imprint device and an imprint method which form mold patterns on both surfaces of a molding target. An imprint device transfers mold patterns on both surfaces of a molding target using flexible first and second dies and includes first and second casings which each apply pressure of first and second pressurizing rooms respectively, to the first and second dies respectively and the molding target, a pressurizer that adjusts the pressures of the pressurizing rooms, first and second moving units that move the first and second dies respectively and the molding target in a direction coming close to or distant from each other, a depressurizer that depressurizes a depressurizing room formed between the first and second casings, and eliminates fluids present between the dies and the molding target, and a pressure adjuster that adjusts pressures to reduce pressure differences between the depressurizing room and the pressurizing rooms.

Abstract: A roller-type depressing device, an imprint device and an imprint method utilizing the same which can depress an object like a die or a molding target by controlling the depressing force of a roller is provided. A roller-type depressing device to depress the object with a roller includes a pressure adjusting plate provided with the roller, a roller moving unit moving the roller relative to the object, a pressure adjusting unit holding the pressure adjusting plate in such a way that force produced by a pressure difference in fluid applied to both faces of the pressure adjusting plate acts on the roller, a pressure receiving stage receiving the pressure of the roller via the object, and a pressure adjuster adjusting the pressure difference in fluid applied to both faces of the pressure adjusting plate.

Abstract: A shaping method and a shaping device are provided which can easily and inexpensively form a curved face in a film including a micropattern. A shaping method is for forming, in a predetermined shaping-target area of a film including a patterned face with a micropattern, and a rear face opposite to the patterned face, a curved face beyond the thickness of the film, and includes a fixing step for fixing an outer edge of the shaping-target area of the film by fixing means, a first heating step for heating the film 20 by heating means 95, and a pressure adjusting step for producing a predetermined pressure difference between both faces of the film by the pressurizing means in such a way that pressure at a side where the film is fixed in the fixing step becomes small to form a pre-curved face.

Abstract: An imprinting device to transfer the mold pattern on a die to a molding target includes a casing forming a pressure-adjusting chamber, a stage supporting the die and the molding target, a frame encircling a circumference of the stage, first moving means moving the casing and the stage in a direction coming close to each other or becoming distant from each other, second moving means moving the casing and the frame in a direction coming close to each other or becoming distant from each other, pressure-adjusting means that adjusts the pressure of a fluid in the pressure-adjusting chamber, and decompression means which decompresses a decompression chamber formed by the stage, a frame, and the die or the molding target, and which eliminates a fluid present between the die and the molding target.

Abstract: A roller-type depressing device, an imprinting device, and a roller-type depressing method which are capable of suppressing an uneven elastic deformation of a main roller, and which are also capable of depressing an object uniformly. A roller-type depressing device depresses an object, and includes a main roller having at least a surface formed of an elastic material, and depressing the object, a roller moving unit moving the main roller relative to the object, a pressure adjusting unit adjusting pressure applied to the object by the main roller, a pressure receiving stage receiving the pressure from the main roller via the object, an intermediate roller having at least a surface formed of a material with a larger elastic modulus than the elastic material, and supporting the main roller, and, a backup roller formed shorter in an axial direction than the main roller and the intermediate roller, and supporting the intermediate roller.

Abstract: A roller-type depressing device that can depress an object like a die or a molding target by controlling the pressure of a roller, an imprint device, and a method utilizing the same are provided. A roller-type depressing device depresses an object like a die or a molding target by a main roller, and includes a pressure adjusting plate, a roller moving unit that moves the main roller relative to the object, a pressure adjusting unit that holds the pressure adjusting plate so that force produced by a pressure difference in fluid applied to both faces of the pressure adjusting plate acts on the main roller, a pressure receiving stage receiving pressure of the main roller, a pressure adjuster that adjusts the pressure difference in fluid applied to both faces of the pressure adjusting plate, and a pressure equalizer that equalizes pressure applied to the object by the main roller.

Abstract: A roller-type depressing device, an imprint device and an imprint method utilizing the same which can depress an object like a die or a molding target by controlling the depressing force of a roller is provided. A roller-type depressing device to depress the object with a roller includes a pressure adjusting plate provided with the roller, a roller moving unit moving the roller relative to the object, a pressure adjusting unit holding the pressure adjusting plate in such a way that force produced by a pressure difference in fluid applied to both faces of the pressure adjusting plate acts on the roller, a pressure receiving stage receiving the pressure of the roller via the object, and a pressure adjuster adjusting the pressure difference in fluid applied to both faces of the pressure adjusting plate.

Abstract: An imprint device and an imprint method which form mold patterns on both surfaces of a molding target. An imprint device transfers mold patterns on both surfaces of a molding target using flexible first and second dies and includes first and second casings which each apply pressure of first and second pressurizing rooms respectively, to the first and second dies respectively and the molding target, a pressurizer that adjusts the pressures of the pressurizing rooms, first and second moving units that move the first and second dies respectively and the molding target in a direction coming close to or distant from each other, a depressurizer that depressurizes a depressurizing room formed between the first and second casings, and eliminates fluids present between the dies and the molding target, and a pressure adjuster that adjusts pressures to reduce pressure differences between the depressurizing room and the pressurizing rooms.

Abstract: A shaping method and a shaping device are provided which can easily and inexpensively form a curved face in a film including a micropattern. A shaping method is for forming, in a predetermined shaping-target area of a film including a patterned face with a micropattern, and a rear face opposite to the patterned face, a curved face beyond the thickness of the film, and includes a fixing step for fixing an outer edge of the shaping-target area of the film by fixing means, a first heating step for heating the film 20 by heating means 95, and a pressure adjusting step for producing a predetermined pressure difference between both faces of the film by the pressurizing means in such a way that pressure at a side where the film is fixed in the fixing step becomes small to form a pre-curved face.

Abstract: An imprinting device having a stage and a cover that depress the die and the molding target, a frame formed with a hole into which the stage is fitted and surrounding an outer circumference thereof, a first moving means for relatively moving the stage and the cover in a direction coming close to or becoming apart from each other, a second moving means for relatively moving the cover and the frame in a direction coming close to or becoming apart from each other, a first depressurizing means for depressurizing a depressurizing room formed any one of the cover, the die or the molding target, and the stage, and further the frame, and eliminating a fluid between the die and the molding target, and a second depressurizing means for eliminating a fluid in a space between the cover and the die or the molding target. The imprinting device can be thus downsized and costs can be reduced.

Abstract: An imprinting device to transfer the mold pattern on a die to a molding target includes a casing forming a pressure-adjusting chamber, a stage supporting the die and the molding target, a frame encircling a circumference of the stage, first moving means moving the casing and the stage in a direction coming close to each other or becoming distant from each other, second moving means moving the casing and the frame in a direction coming close to each other or becoming distant from each other, pressure-adjusting means that adjusts the pressure of a fluid in the pressure-adjusting chamber, and decompression means which decompresses a decompression chamber formed by the stage, a frame, and the die or the molding target, and which eliminates a fluid present between the die and the molding target.

Abstract: An imprinting device is provided which is capable of using small an opening/closing device even when a transfer area increases. The imprinting device that transfers a molding pattern of a die to a molding target includes a pressurization unit that includes a pressurization chamber to pressurize the die and the molding target by a fluid, a stage that supports the die and the molding target pressurized by the pressurization unit, a pressurization device for adjusting the pressure of the fluid inside the pressurization chamber, an opening/closing device for relatively moving the pressurization unit and the stage, and a securing tool that secures the pressurization unit and the stage so as to prevent or suppress an application of force generated by the pressurization unit to the opening/closing device.

Abstract: A temperature adjusting device that can heat and cool an object like a mold or a molding target uniformly and quickly, and an imprinting device using the same are provided. The temperature adjusting device is for adjusting a temperature of the object like a mold 100 or a molding target 200, and includes fluid supplying means 1 for supplying a fluid at a predetermined temperature from a plurality of supply openings 11, holding means 2 including a holding face 21 that holds the object, and a fluid receiving face 22 that receives the fluid supplied from the supply openings 11, a temperature adjusting housing 3 that constructs, together with the holding means 2, a temperature adjusting chamber 31 which retains thereinside the supply openings 11, and a discharging channel 4 that discharges the fluid in the temperature adjusting chamber 31.

Abstract: The present invention provides an imprinting device and an imprinting method which can uniformly apply pressure between a mold and a molding object and which can increase and decrease a temperature at a fast speed. An imprinting device is for transferring a pattern on a mold to a film molding object, and comprises a stage for holding the mold, a pressurizing-chamber casing which configures a pressurizing-chamber together with the molding object, sealing means which airtightly seals a space between the pressurizing-chamber casing and the molding object, opening and closing means which opens and closes the space between the pressurizing-chamber casing and the molding object, pressurizing means which adjusts atmospheric pressure in the pressurizing-chamber, heating means which heats either one of or both of the mold and the molding object, and degassing means which eliminates any gas present between the mold and the molding object.

Abstract: The present invention provides an imprinting device and an imprinting method which can uniformly apply pressure between a mold and a molding object and which can increase and decrease a temperature at a fast speed. An imprinting device is for transferring a pattern on a mold to a film molding object and comprises a stage for holding the mold, a pressurizing-chamber casing which configures a pressurizing-chamber together with the molding object, sealing means which airtightly seals a space between the pressurizing-chamber casing and the molding object, opening and closing means which opens and closes the space between the pressurizing-chamber casing and the molding object, pressurizing means which adjusts atmospheric pressure in the pressurizing-chamber, heating means which heats either one of or both of the mold and the molding object, and degassing means which eliminates any gas present between the mold and the molding object.

Abstract: The present invention provides an imprinting device and an imprinting method which can uniformly apply pressure between a mold and a molding object and which can increase and decrease a temperature at a fast speed. An imprinting device is for transferring a pattern on a mold to a film molding object, and comprises a stage for holding the mold, a pressurizing-chamber casing which configures a pressurizing-chamber together with the molding object, sealing means which airtightly seals a space between the pressurizing-chamber casing and the molding object, opening and closing means which opens and closes the space between the pressurizing-chamber casing and the molding object, pressurizing means which adjusts atmospheric pressure in the pressurizing-chamber, heating means which heats either one of or both of the mold and the molding object, and degassing means which eliminates any gas present between the mold and the molding object.

Abstract: In order to maintain the dust collection efficiency, it comprises: a filtration chamber 20 which has an carbon fiber outlet 10 from which carbon fibers are discharged and to which a gas including the carbon fibers is introduced; a flexible cylindrical filter cloth 22 one end of which is suspended in the filtration chamber and which collects the carbon fibers in the gas in order to clean up the gas; and a pathway 30 for cleaned-up gas which is connected to the filtration chamber 20 through the cylindrical filter cloth 22 and which allows the cleaned-up gas to pass through it.

Abstract: Disclosed is a method for manufacturing carbon fibrous structures each of which comprises a three dimensional network of carbon fibers, which is characterized in that, in the procedure of carbon fiber vapor phase deposition utilizing decomposition of organic carbon compound, at least two kinds of organic carbon compounds as carbon sources are in existence at least at predetermined thermal decomposition reaction temperature range in a reaction furnace and partial pressures of gases of these compounds are regulated so that these compounds are decomposed at mutually different decomposition temperatures, and/or a raw material gas supplied into the reaction furnace is forced to form a turbulent flow. It is possible to obtain efficiently the carbon fibrous structures each of which comprises a three dimensional network of carbon fibers and which are suitable as additives to be added to solid materials, such as resin, ceramics, metal, etc.