Abstract: An IC socket comprises a plurality of conductive connecting sections each having a holding section for holding one of a plurality of lead terminals of an IC; and a plurality of conductive coil springs, which are protruded from the IC socket and respectively fixed to the conductive connecting sections, the conductive springs being closer to a circuit board than the conductive connecting sections.

Abstract: A semiconductor testing device of the invention has a measuring substrate that is provided with holes therethrough for exposing a pad of each of the dies of a semiconductor wafer mounted on the measuring substrate, the semiconductor wafer being supported by a wafer holder on one side of the measuring substrate, and the other side of the measuring substrate being provided with a wiring pattern for transmitting an evaluation test signal to the semiconductor wafer supported on the measuring substrate. The measuring substrate, with the pad of each of the dies being wire bonded with a pad of the wiring pattern through the holes, are set for an evaluation test so that a mount part of the semiconductor is placed inside a high temperature chamber, and that a terminal part for applying the evaluation test signal is placed outside of the high temperature chamber. As a result, there is provided a semiconductor testing device, inexpensively, that can suitably evaluate a semiconductor under a temperature of about 400° C.

Abstract: An IC socket comprises a plurality of conductive connecting sections each having a holding section for holding one of a plurality of lead terminals of an IC; and a plurality of conductive coil springs, which are protruded from the IC socket and respectively fixed to the conductive connecting sections, the conductive springs being closer to a circuit board than the conductive connecting sections.

Abstract: A semiconductor testing device of the invention has a measuring substrate that is provided with holes therethrough for exposing a pad of each of the dies of a semiconductor wafer mounted on the measuring substrate, the semiconductor wafer being supported by a wafer holder on one side of the measuring substrate, and the other side of the measuring substrate being provided with a wiring pattern for transmitting an evaluation test signal to the semiconductor wafer supported on the measuring substrate. The measuring substrate, with the pad of each of the dies being wire bonded with a pad of the wiring pattern through the holes, are set for an evaluation test so that a mount part of the semiconductor is placed inside a high temperature chamber, and that a terminal part for applying the evaluation test signal is placed outside of the high temperature chamber. As a result, there is provided a semiconductor testing device, inexpensively, that can suitably evaluate a semiconductor under a temperature of about 400° C.

Abstract: A substrate of the present invention includes an electrically-insulating glass layer formed on both sides of a stainless-plate measuring substrate. The substrate also has a wiring pattern on the electrically-insulating glass layer, and an overcoat glass layer covering the wiring pattern. Thus, the present invention provides a substrate that is inexpensive, can withstand a high temperature of about 400° C. in EM evaluations and the like, and can easily be provided in a large size.

Abstract: In order to carry out the electric property evaluation of internal wiring of an IC, the IC is attached to an IC socket, and terminals of the IC socket are connected with the external wiring via leads and coaxial connectors. The IC is directly in touch with a heating plate, for making the IC have a high temperature. The IC socket is provided with protrusions thereon, for forming a gap between the IC socket and the IC. On this account, it is possible to acquire an IC socket module in which the temperature of the IC is kept consistent when the evaluation of the internal wiring and wiring members of the IC is carried out at a high temperature.

Abstract: In order to carry out the electric property evaluation of internal wiring of an IC, the IC is attached to an IC socket, and terminals of the IC socket are connected with the external wiring via leads and coaxial connectors. The IC is directly in touch with a heating plate, for making the IC have a high temperature. The IC socket is provided with protrusions thereon, for forming a gap between the IC socket and the IC. On this account, it is possible to acquire an IC socket module in which the temperature of the IC is kept consistent when the evaluation of the internal wiring and wiring members of the IC is carried out at a high temperature.