Abstract: An apparatus for removing a film coated on a substrate includes a film removing body including a liquid supply device which discharges removing liquid through a discharge opening to a removal portion of a film coated on a substrate, and a collection device which collects a discharged removing liquid through a collection opening, and an adjustment device that adjusts a distance between a surface of the substrate to a bottom surface of the film removing body at a position between the discharge opening and the collection opening.

Abstract: A driving force transmission apparatus includes: a housing having an inner peripheral spline portion; an inner shaft having an outer peripheral spline portion; a main clutch including first outer and inner clutch plates respectively engaged with the inner and outer peripheral spline portions; a cam mechanism generating pressing force for pressing the main clutch by relatively rotating a pair of cam members; and an electromagnetic clutch mechanism including an armature engaged with the inner peripheral spline portion and applying rotation force to the cam mechanism for relatively rotating the cam members through energization of an electromagnetic coil. An end face facing the armature is formed in the inner peripheral spline portion between a first region engaged with the first outer clutch plate and a second region engaged with the armature. Movement of the armature toward the first region is regulated by contact of the armature with the end face.

Abstract: A driving force transmission apparatus includes: a housing having an inner peripheral spline portion; an inner shaft having an outer peripheral spline portion; a main clutch including first outer and inner clutch plates respectively engaged with the inner and outer peripheral spline portions; a cam mechanism generating pressing force for pressing the main clutch by relatively rotating a pair of cam members; and an electromagnetic clutch mechanism including an armature engaged with the inner peripheral spline portion and applying rotation force to the cam mechanism for relatively rotating the cam members through energization of an electromagnetic coil. An end face facing the armature is formed in the inner peripheral spline portion between a first region engaged with the first outer clutch plate and a second region engaged with the armature. Movement of the armature toward the first region is regulated by contact of the armature with the end face.