Abstract: The fundus photographing apparatus of the present invention includes an illumination light source that generates illumination light flux for illuminating a fundus (of a subject eye), a scanning optical system that converts the illumination light flux from the illumination light source unit into spot light to scan the fundus in two-dimensional directions of a horizontal direction and a vertical direction by the spot light, a light receiver that receives reflected light from each portion of the fundus illuminated by the spot light, and a fundus image acquiring unit that acquires a fundus image based on a signal from the light receiver, wherein the scanning optical system is provided with a scanner including a reflection mirror plate that rotates about orthogonal two axes to simultaneously deflect the spot light in the vertical direction and the horizontal direction for scanning.

Abstract: The fundus photographing apparatus of the present invention includes an illumination light source that generates illumination light flux for illuminating a fundus (of a subject eye), a scanning optical system that converts the illumination light flux from the illumination light source unit into spot light to scan the fundus in two-dimensional directions of a horizontal direction and a vertical direction by the spot light, a light receiver that receives reflected light from each portion of the fundus illuminated by the spot light, and a fundus image acquiring unit that acquires a fundus image based on a signal from the light receiver, wherein the scanning optical system is provided with a scanner including a reflection mirror plate that rotates about orthogonal two axes to simultaneously deflect the spot light in the vertical direction and the horizontal direction for scanning.

Abstract: An MEMS-scanning mirror device includes an electrostatic comb actuator, in which a mirror surface is formed below a top surface (TOPS) of the mirror device. In a method for manufacturing the MEMS-scanning mirror device having the electrostatic comb actuator, a mirror surface (10BS) of a mirror plate (10B) is formed by removing an insulating layer (I) thereon.

Abstract: An MEMS-scanning mirror device includes an electrostatic comb actuator, in which a mirror surface is formed below a top surface (TOPS) of the mirror device. In a method for manufacturing the MEMS-scanning mirror device having the electrostatic comb actuator, a mirror surface (10BS) of a mirror plate (10B) is formed by removing an insulating layer (I) thereon.

Abstract: An MEMS-scanning mirror device includes an electrostatic comb actuator, in which a mirror surface is formed below a top surface (TOPS) of the mirror device. In a method for manufacturing the MEMS-scanning mirror device having the electrostatic comb actuator, a mirror surface (10BS) of a mirror plate (10B) is formed by removing an insulating layer (I) thereon.

Abstract: It is made possible to improve the variations in the “generated force (load)—deflection characteristics”. A deformable mirror device includes: a substrate; a plurality of electrodes provided on the substrate; a spacer disposed on the substrate; a support member disposed above the spacer and having an opening passing through from a first face of the support member facing to the substrate to a second face of the support member facing opposite from the first face; a first insulation film provided on the first face of the support member; a second insulation film provided on the second face of the support member; and a deformable electrode film disposed so as to be opposed to the electrodes at a spacing, formed so as to cover the opening, and supported by the support member with sandwiching the first insulation film.

Abstract: A method of driving a MEMS mirror scanner having an electrostatic actuator, comprising a step of driving the electrostatic actuator according to an input signal in accordance with a driving waveform obtained by the following equation, when C + ? ? ( ? ) ? 0 V V ? ( t ) = 1 C + ? ? ( ? ) I [ - C - ? ? ( ? ) I ? V B + - ( 1 I ? ? C L ? ( ? ) ? ? ) ? ( 1 I ? ? C R ? ( ? ) ? ? ) ? V B 2 + C + ? ? ( ? ) I ? ( ? ¨ + 2 ? B I ? ? . + ? I ? ? ) ] when C + ? ? ( ? ) = 0 V V ? ( t ) = ? ¨ + 2 ? B I ? ? .

Abstract: For the purpose of mixing laser light (P0) from a laser light source (18), the laser light (P0) is made incident on a first end surface of an optical fiber (24), and is emitted from a second end surface of the optical fiber (24). Subsequently, laser light (P1) emitted from the second end surface of the optical fiber (24) is made incident on a first end surface of an optical fiber (28), and is emitted from a second end surface of the optical fiber (28). A swinging micro-electromechanical system (27) having a mirror plate (27a) is interposed between the second end surface of the optical fiber (24) and the first end surface of the optical fiber (28). Thus, the mirror plate (27a) is swung, and a laser beam (P4) is thereby shifted and mixed.

Abstract: It is made possible to improve the variations in the “generated force (load)—deflection characteristics”. A deformable mirror device includes: a substrate; a plurality of electrodes provided on the substrate; a spacer disposed on the substrate; a support member disposed above the spacer and having an opening passing through from a first face of the support member facing to the substrate to a second face of the support member facing opposite from the first face; a first insulation film provided around the opening on the first face of the support member; and a deformable electrode film disposed so as to be opposed to the electrodes at a spacing, formed so as to cover the opening, and supported by the support member with sandwiching the first insulation film. The electrode film includes a reflection portion on a face opposite to the electrodes.

Abstract: It is made possible to improve the variations in the “generated force (load)—deflection characteristics”. A deformable mirror device includes: a substrate; a plurality of electrodes provided on the substrate; a spacer disposed on the substrate; a support member disposed above the spacer and having an opening passing through from a first face of the support member facing to the substrate to a second face of the support member facing opposite from the first face; a first insulation film provided on the first face of the support member; a second insulation film provided on the second face of the support member; and a deformable electrode film disposed so as to be opposed to the electrodes at a spacing, formed so as to cover the opening, and supported by the support member with sandwiching the first insulation film.