Abstract: A ceramic member is provided including a base including an alumina sintered body, an yttria sintered body formed on the alumina sintered body, an intermediate layer including yttrium and aluminum formed between the alumina sintered body and the yttria sintered body, and a metallic member buried in the intermediate layer of the base. A difference between the thermal expansion coefficient of the alumina sintered body and that of the yttria sintered body is equal to or less than about 0.50×10?6/K, and the thermal expansion coefficient of the alumina sintered body is greater than the thermal expansion coefficient of the yttria sintered body. The alumina sintered body, the intermediate layer, the yttria sintered body, and the metallic member are formed into an integrated sintered body, and the content of yttria in the yttria sintered body is 99 wt % or more.

Abstract: An electrostatic chuck includes a base of a sintered body containing alumina, an electrode as a power-supplied member embedded in the base and supplied with electric power, a bonding member embedded in the base and bonded to the electrode, in which a difference in coefficient of thermal expansion from the sintered body is 2×10?6/K or less, and a melting point is higher than baking temperature of the sintered body, and a terminal bonded to the electrode through the bonding member.

Abstract: A manufacturing method for a sintered body having a metallic member buried therein is provided, and includes forming an alumina sintered body, forming a metallic member by printing a printing paste including a refractory metal on the alumina sintered body, forming a green alumina compact on the metallic member, and sintering the alumina compact, the metallic member, and the alumina sintered body or the alumina presintered body.

Abstract: A yttria sintered body contains an amount of silicon carbide within a range of 5 to 40% by volume, has a volume resistivity at room temperature within a range of 1×101 to 1×1017 ?·cm, and is adapted for application to an electrostatic chuck.

Abstract: An outer casing for a gas sensor includes a cap, a mount base, and a heat shielding board. The cap, the mount base, and the heat shielding board are made of gas permeable ceramics. A target gas flows inside the gas sensor with the above outer casing from all directions, and makes the gas sensor highly responsive to the target gas. The outer casing also contributes to make temperature and humidity inside the gas sensor uniform in a short time, thereby stabilizing an output voltage of the gas sensor.

Abstract: An electrostatic chuck comprises a dielectric ceramic layer made of an alumina sintered body having a volume resistivity equal to or greater than about 1×1017?·cm at room temperature and a volume resistivity equal to or greater than about 1×1014?·cm at 300° C., and an electrode formed on one surface of the dielectric ceramic layer.

Abstract: A binder is mixed to alumina powder with a purity of 99.5% or more (step S11), the mixture is granulated (step S12), resultant granule powder is formed with a die (step S13), and a formed compact is sintered in a hot-pressing manner (step S14).

Abstract: A yttria sintered body is provided which includes yttria as a principal ingredient and 5 to 40 vol. % silicon nitride, and which exhibits enhanced corrosion resistance and mechanical strength.

Abstract: A method of manufacturing an electrical-resistance heating element includes forming sintered ceramics or calcined ceramics, forming an electrode on the sintered ceramics or the calcined ceramics, and forming a ceramic base material having mainly a high melting point metal on the electrode embedded therein, thereby forming a heating element with built-in electrode.

Abstract: A yttria sintered body contains an amount of silicon carbide within a range of 5 to 40% by volume, has a volume resistivity at room temperature within a range of 1×101 to 1×1017?·cm, and is adapted for application to an electrostatic chuck.

Abstract: An electrostatic chuck includes, a base plate made of ceramic, an electrode for generating an electrostatic clamping force, and a dielectric material layer formed on the electrode and made of ceramic having a volume resistivity of not less than 1×1015 ?·cm at 100° C. and the same main constituent as the base plate. The base plate has a higher thermal conductivity than the dielectric material layer.

Abstract: A binder is mixed to alumina powder with a purity of 99.5% or more (step S11), the mixture is granulated (step S12), resultant granule powder is formed with a die (step S13), and a formed compact is sintered in a hot-pressing manner (step S14).

Abstract: A yttria sintered body includes yttria as a principal ingredient, and 5 to 40% by volume of silicone nitride, allowing for an enhanced corrosion resistance and mechanical strength.

Abstract: An electrostatic chuck includes a base of a sintered body containing alumina, an electrode as a power-supplied member embedded in the base and supplied with electric power, a bonding member embedded in the base and bonded to the electrode, in which a difference in coefficient of thermal expansion from the sintered body is 2×10?6/K or less, and a melting point is higher than baking temperature of the sintered body, and a terminal bonded to the electrode through the bonding member.

Abstract: A ceramic member comprises a base including an alumina sintered body, and an yttria sintered body formed on the alumina sintered body and exposed to a corrosive gas; and a metallic member buried in the base.

Abstract: A manufacturing method for a sintered body with a buried metallic member comprises forming an alumina sintered body or an alumina presintered body, forming a metallic member by printing a printing paste including a refractory metal on the alumina sintered body or the alumina presintered body, forming an alumina compact on the metallic member, and sintering the alumina compact, the metallic member, and the alumina sintered body or the alumina presintered body.

Abstract: An outer casing for a gas sensor includes a cap, a mount base, and a heat shielding board. The cap, the mount base, and the heat shielding board are made of gas permeable ceramics. A target gas flows inside the gas sensor with the above outer casing from all directions, and makes the gas sensor highly responsive to the target gas. The outer casing also contributes to make temperature and humidity inside the gas sensor uniform in a short time, thereby stabilizing an output voltage of the gas sensor.

Abstract: An electrostatic chuck comprises a dielectric ceramic layer made of an alumina sintered body having a volume resistivity equal to or greater than about 1×1017?·cm at room temperature and a volume resistivity equal to or greater than about 1×1014?·cm at 300° C., and an electrode formed on one surface of the dielectric ceramic layer.

Abstract: A method of manufacturing an electrical-resistance heating element includes forming sintered ceramics or calcined ceramics, forming an electrode on the sintered ceramics or the calcined ceramics, and forming a ceramic base material having mainly a high melting point metal on the electrode embedded therein, thereby forming a heating element with built-in electrode.

Abstract: A substrate having plural recording elements and electrical leads for supplying electric signals to the recording elements includes electrical contacts for external electrical connection for reception of image signals used for driving the recording elements; and a processing circuit for converting signals which are serially supplied to the connecting contact to parallel signals to be applied to the recording elements.