Abstract: The present invention provides: a surface layer and the like, which achieve a good balance between antifouling characteristics and fixation stability during processing; and a material for forming a surface layer, and the present invention provides a surface layer which contains at least a component A and a component B, wherein: the component A has an organic moiety that contains fluorine; the component B contains an organic moiety that has at least one bond selected from the group consisting of an unsaturated hydrocarbon bond, a carbon-oxygen double bond and a carbon-nitrogen double bond; and the constitutional ratio of the component B to the component A in the surface layer is from 0.15 to 0.80. The present invention also provides a material for forming a surface layer.

Abstract: Disclosed is a method of manufacturing a piezoelectric substrate, the method including: forming an intermediate layer of Ti and a lower electrode of Pt oriented in a (111) axis direction on a substrate without heating the substrate; applying a coating liquid for forming an orientation control layer made of lead titanate onto the lower electrode; drying the coating liquid at a predetermined temperature to form an orientation control layer precursor made of lead titanate; applying a coating liquid for forming a piezoelectric thin film made of lead zirconate titanate; drying the coating liquid at a predetermined temperature to form a piezoelectric precursor made of a lead zirconate titanate precursor; and collectively firing the orientation control layer precursor and the piezoelectric precursor to crystallize both the precursors, to thereby form a piezoelectric thin film made of lead zirconate titanate preferentially oriented in a (110) plane.

Abstract: A piezoelectric actuator has a ground substrate layer, an intermediate layer containing at least one of Ti and TiO2 on the ground substrate layer, an electrode layer containing Pt on the intermediate layer, and a piezoelectric layer containing lead zirconate titanate on the electrode layer, in which the lead zirconate titanate contained in the piezoelectric layer is preferentially oriented in the (100), (001), or (110) direction, the Pt contained in the electrode layer is preferentially oriented in the (111) direction, and the half width of the rocking curve in the (111) plane of the Pt contained in the electrode layer in X-ray diffraction is 1° or more.

Abstract: A piezoelectric element has a first piezoelectric layer, a second piezoelectric layer on the first piezoelectric layer, and an electrode layer on the second piezoelectric layer, in which the first piezoelectric layer and the second piezoelectric layer have pores, and the porosity of the second piezoelectric layer is lower than the porosity near the interface on the second piezoelectric layer side of the first piezoelectric layer.

Abstract: A piezoelectric actuator has a ground substrate layer, an intermediate layer containing at least one of Ti and TiO2 on the ground substrate layer, an electrode layer containing Pt on the intermediate layer, and a piezoelectric layer containing lead zirconate titanate on the electrode layer, in which the lead zirconate titanate contained in the piezoelectric layer is preferentially oriented in the (100), (001), or (110) direction, the Pt contained in the electrode layer is preferentially oriented in the (111) direction, and the half width of the rocking curve in the (111) plane of the Pt contained in the electrode layer in X-ray diffraction is 1° or more.

Abstract: Disclosed is a method of manufacturing a piezoelectric substrate, the method including: forming an intermediate layer of Ti and a lower electrode of Pt oriented in a (111) axis direction on a substrate without heating the substrate; applying a coating liquid for forming an orientation control layer made of lead titanate onto the lower electrode; drying the coating liquid at a predetermined temperature to form an orientation control layer precursor made of lead titanate; applying a coating liquid for forming a piezoelectric thin film made of lead zirconate titanate; drying the coating liquid at a predetermined temperature to form a piezoelectric precursor made of a lead zirconate titanate precursor; and collectively firing the orientation control layer precursor and the piezoelectric precursor to crystallize both the precursors, to thereby form a piezoelectric thin film made of lead zirconate titanate preferentially oriented in a (110) plane.

Abstract: A substrate for piezoelectric body formation has a base substrate layer containing at least SiO2 or SiN in the surface, an intermediate layer containing at least one of Ti and TiO2 on the base substrate layer, and an electrode layer containing Pt on the intermediate layer, in which the film thickness of the electrode layer is 40 nm or more and 1000 nm or less and Ti is not detected in the surface of the electrode layer by an elemental quantitative analysis method.