Patents by Inventor Hirotomo Nishimori

Hirotomo Nishimori has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wet etching apparatus and wet etching method using ultraviolet light
    Publication number: 20040211756
    Abstract: A substrate having a film to be etched is held on a rotating stage. While rotating the substrate, a chemical solution containing an etchant is supplied onto the substrate from a nozzle. A lamp house with a drive unit is positioned so that the distance between the substrate and a glass window of the lamp house becomes 2 to 5 mm, the lamp house accommodating a lamp generating ultraviolet light. The ultraviolet light irradiates the film through the chemical solution. The ultraviolet light has a higher energy than the binding energy of constituent molecules of the film.
    Type: Application
    Filed: January 28, 2004
    Publication date: October 28, 2004
    Applicants: Semiconductor Leading Edge Technologies, Inc., Ushio Denki Kabushiki Kaisha
    Inventors: Satoshi Kume, Hirotomo Nishimori