Patents by Inventor Hirotomo YASHIMA

Hirotomo YASHIMA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • X-ray inspection device, X-ray inspection method, and method of manufacturing structure
    Patent number: 10809208
    Abstract: The X-ray inspection device includes a radiation source that irradiates X-rays toward a specimen that is rotated; a detector that detects transmitted X-rays irradiated by the radiation source, and passed through the specimen, and output a plurality of detection data for each angle of rotation; and a region extracting unit that extracts a region where the specimen is projected onto the detector, using the plurality of detection data.
    Type: Grant
    Filed: October 24, 2017
    Date of Patent: October 20, 2020
    Assignee: Nikon Corporation
    Inventors: Hirotomo Yashima, Takahiro Michimoto, Naoshi Sakaguchi
  • Measurement processing device, x-ray inspection device, measurement processing method, measurement processing program, and structure manufacturing method
    Patent number: 10809209
    Abstract: A measurement processing device used for an X-ray inspection device includes: a region information acquisition unit that acquires first region information based on X-rays passing through a first region that is a part of a first specimen; a storage unit that stores second region information related to a second region of a second specimen, the second region being larger than the first region; and a determination unit that determines whether or not a region corresponding to the first region is included in the second region, based on the first region information and the second region information.
    Type: Grant
    Filed: September 12, 2019
    Date of Patent: October 20, 2020
    Assignee: Nikon Corporation
    Inventors: Hirotomo Yashima, Fuminori Hayano, Akitoshi Kawai
  • MEASUREMENT PROCESSING DEVICE, X-RAY INSPECTION DEVICE, MEASUREMENT PROCESSING METHOD, MEASUREMENT PROCESSING PROGRAM, AND STRUCTURE MANUFACTURING METHOD
    Publication number: 20200003705
    Abstract: A measurement processing device used for an X-ray inspection device includes: a region information acquisition unit that acquires first region information based on X-rays passing through a first region that is a part of a first specimen; a storage unit that stores second region information related to a second region of a second specimen, the second region being larger than the first region; and a determination unit that determines whether or not a region corresponding to the first region is included in the second region, based on the first region information and the second region information.
    Type: Application
    Filed: September 12, 2019
    Publication date: January 2, 2020
    Applicant: NIKON CORPORATION
    Inventors: Hirotomo YASHIMA, Fuminori HAYANO, Akitoshi KAWAI
  • Measurement processing device, X-ray inspection device, measurement processing method, measurement processing program, and structure manufacturing method
    Patent number: 10481106
    Abstract: A measurement processing device used for an X-ray inspection device includes: a region information acquisition unit that acquires first region information based on X-rays passing through a first region that is a part of a first specimen; a storage unit that stores second region information related to a second region of a second specimen, the second region being larger than the first region; and a determination unit that determines whether or not a region corresponding to the first region is included in the second region, based on the first region information and the second region information.
    Type: Grant
    Filed: September 1, 2017
    Date of Patent: November 19, 2019
    Assignee: Nikon Corporation
    Inventors: Hirotomo Yashima, Fuminori Hayano, Akitoshi Kawai
  • Measurement processing device, X-ray inspection device, measurement processing method, measurement processing program, and structure manufacturing method
    Patent number: 10444165
    Abstract: A measurement processing device used for an X-ray inspection device includes: a region information acquisition unit that acquires first region information based on X-rays passing through a first region that is a part of a first specimen; a storage unit that stores second region information related to a second region of a second specimen, the second region being larger than the first region; and a determination unit that determines whether or not a region corresponding to the first region is included in the second region, based on the first region information and the second region information.
    Type: Grant
    Filed: September 1, 2017
    Date of Patent: October 15, 2019
    Assignee: Nikon Corporation
    Inventors: Hirotomo Yashima, Fuminori Hayano, Akitoshi Kawai
  • MEASUREMENT PROCESSING DEVICE, X-RAY INSPECTION DEVICE, MEASUREMENT PROCESSING METHOD, MEASUREMENT PROCESSING PROGRAM, AND STRUCTURE MANUFACTURING METHOD
    Publication number: 20180120243
    Abstract: A measurement processing device used for an X-ray inspection device includes: a region information acquisition unit that acquires first region information based on X-rays passing through a first region that is a part of a first specimen; a storage unit that stores second region information related to a second region of a second specimen, the second region being larger than the first region; and a determination unit that determines whether or not a region corresponding to the first region is included in the second region, based on the first region information and the second region information.
    Type: Application
    Filed: September 1, 2017
    Publication date: May 3, 2018
    Applicant: NIKON CORPORATION
    Inventors: Hirotomo YASHIMA, Fuminori HAYANO, Akitoshi KAWAI
  • X-RAY INSPECTION DEVICE, X-RAY INSPECTION METHOD, AND METHOD OF MANUFACTURING STRUCTURE
    Publication number: 20180045660
    Abstract: The X-ray inspection device includes a radiation source that irradiates X-rays toward a specimen that is rotated; a detector that detects transmitted X-rays irradiated by the radiation source, and passed through the specimen, and output a plurality of detection data for each angle of rotation; and a region extracting unit that extracts a region where the specimen is projected onto the detector, using the plurality of detection data.
    Type: Application
    Filed: October 24, 2017
    Publication date: February 15, 2018
    Applicant: NIKON CORPORATION
    Inventors: Hirotomo YASHIMA, Takahiro MICHIMOTO, Naoshi SAKAGUCHI