Abstract: A measuring optical system for emitting and receiving light is fixedly installed in a ceiling portion of a measuring device, and a wafer holding part for supporting a semiconductor wafer is provided in a bottom portion of the measuring device. A support table is horizontally laid between support pins of the wafer holding part, and a calibration standard member for calibration is placed on an upper surface of the support table. When a semiconductor wafer is supported by the support pins, light emerging from the measuring optical system impinges upon the semiconductor wafer, and the reflection intensity of the light is measured. When no semiconductor wafer is supported by the support pins, light emerging from the measuring optical system impinges upon the calibration standard member, whereby the calibration can be done at any time.

Abstract: A measuring optical system for emitting and receiving light is fixedly installed in a ceiling portion of a measuring device, and a wafer holding part for supporting a semiconductor wafer is provided in a bottom portion of the measuring device. A support table is horizontally laid between support pins of the wafer holding part, and a calibration standard member for calibration is placed on an upper surface of the support table. When a semiconductor wafer is supported by the support pins, light emerging from the measuring optical system impinges upon the semiconductor wafer, and the reflection intensity of the light is measured. When no semiconductor wafer is supported by the support pins, light emerging from the measuring optical system impinges upon the calibration standard member, whereby the calibration can be done at any time.

Abstract: The invention is a robot teaching pendant containing a display device with graphic display capabilities. Display data is displayed on the graphic display and includes the movement of a robot and taught points. This display data is generated by a display data generation unit based on robot programs stored in data storage unit by buffering the data from a robot controller. This display data may also include representative images of the robot tool along with its coordinates in a tool coordinate system and the taught points in a user or world coordinate system. Thus, the action of the robot can be visually recognized with ease, and the robot can be taught easily and accurately.

Abstract: When an operator selects one of many jog modes, including a tool feed mode, robot coordinate system feed mode, user coordinate system feed mode, joint feed mode, etc., a display controller displays a jog feed direction adapted for the selected mode for superposition on a robot image on a monitor screen. If the operator depresses any of jog feed direction selector keys, the jog feed direction corresponding to the depressed key is displayed for discrimination.

Abstract: A method, such that, using known data, a relationship between a target welding current and a welding current command to be instructed to a welding machine to achieve the target welding current is estimated by a linear formula. Then, a welding current command corresponding to a welding current to be achieved is obtained according to the linear formula, and is actually supplied to the welding machine to carry out a welding operation. An actual welding current is fed back from the welding machine, and this actual welding current and the welding current command associated therewith are stored as one set of data. This process is repeated using different welding current command values, and the resulting sets of data each including the combination of a corresponding welding current command and actual welding current are stored.

Abstract: A method of manually feeding robots to ensure an efficient and safe teaching operation for each robot, even when the multiplicity of robots are arranged close to each other. As long as a controller B receives a manual feed command, coordinates representing current positions of feature points Pi and Qj defined on the robots A1 and A2 are sequentially simulated for being updated and stored in the RAM. The distances R between the feature points Pi (i=1 to final value) and feature points Qj (j=1 to final value) are determined sequentially. Each time a smaller distance between the feature points is calculated, the value is updated and stored into the register R min to calculate a shortest distance between the robots A1 and A2. The actual manual feed rate V is increased or decreased in response to the value of the shortest distance R min.

Abstract: One cycle of a weaving pattern suitable for the shape and material of the base metal to be welded is taught and stored, and a welding torch is made to weave in accordance with the suitable weaving pattern. Consequently, arc welding can be carried out by using a weaving pattern suitable for a shape and a material of each base metal.