Abstract: A substrate processing apparatus is provided. A substrate processing apparatus comprises a reaction chamber provided with a chamber wall comprising a first sidewall, a second sidewall disposed opposite to the first sidewall, a bottom wall connected to the first sidewall and the second sidewall; a gate valve tunnel disposed in the first sidewall configured to be closed by a gate valve; a substrate support provided with a top plate and a shaft, the substrate support being disposed within the reaction chamber and configured to support a substrate on the top plate, wherein the substrate support is configured to be vertically movable between a process position and a transfer position; and a liner disposed around perimeter of the substrate support and configured to move with the substrate support, wherein an outer wall of the liner is configured to cover the gate valve tunnel when the substrate support is in the process position.

Abstract: An optical device (10) includes a first substrate (11) and a second substrate (12) facing each other, a liquid crystal component (13) between the first substrate (11) and the second substrate (12), a first electrode (18) and a second electrode (19) located on the first substrate (11) on the second substrate (12) side, and a first alignment layer (14) that is located on the first substrate (11) on the second substrate (12) side and controls the alignment state of liquid crystal molecules in the liquid crystal component (13), wherein an interface between the liquid crystal component (13) and the first alignment layer (14) forms a non-glide weak anchoring interface (17).

Abstract: An optical device (10) includes a first substrate (11) and a second substrate (12) facing each other, a liquid crystal component (13) between the first substrate (11) and the second substrate (12), a first electrode (18) and a second electrode (19) located on the first substrate (11) on the second substrate (12) side, and a first alignment layer (14) that is located on the first substrate (11) on the second substrate (12) side and controls the alignment state of liquid crystal molecules in the liquid crystal component (13), wherein an interface between the liquid crystal component (13) and the first alignment layer (14) forms a non-glide weak anchoring interface (17).

Abstract: A complex (10) includes a liquid crystal component (13) and a support (11, 12) of the liquid crystal component (13), in which a lubricating interface derivation region (16) is formed between the liquid crystal component (13) and the support (11, 12). An optical element includes a pair of substrates (11, 12) having electrodes (18, 19) on at least one substrate (11), and a liquid crystal component (13) with which a space between the pair of substrates (11, 12) is filled, in which a lubricating interface derivation region (16) is formed between the pair of substrates (11, 12) and the liquid crystal component (13). It is preferable that the lubricating interface deriving agent (14) is present in the lubricating interface derivation region.

Abstract: A complex (10) includes a liquid crystal component (13) and a support (11, 12) of the liquid crystal component (13), in which a lubricating interface derivation region (16) is formed between the liquid crystal component (13) and the support (11, 12). An optical element includes a pair of substrates (11, 12) having electrodes (18, 19) on at least one substrate (11), and a liquid crystal component (13) with which a space between the pair of substrates (11, 12) is filled, in which a lubricating interface derivation region (16) is formed between the pair of substrates (11, 12) and the liquid crystal component (13). It is preferable that the lubricating interface deriving agent (14) is present in the lubricating interface derivation region.

Abstract: One aspect is contemplated for providing a device having a liquid crystal material exhibiting a dielectric constant of 1000 or more at a temperature at which a specific liquid crystal phase is developed, and a unit configured to apply voltage to the liquid crystal material at the temperature at which the specific liquid crystal phase is developed.

Abstract: Provided is a novel electroosmotic pump capable of being driven by AC voltage. An electroosmotic pump (2) includes a porous dielectric membrane (21), a first water-permeable electrode (22), and a second water-permeable electrode (23). The first water-permeable electrode (22) is disposed on one side of the porous dielectric membrane (21). The second water-permeable electrode (23) is disposed on the other side of the porous dielectric membrane (21). A principal surface of the porous dielectric membrane (21) close to the first water-permeable electrode (22) and a principal surface thereof close to the second water-permeable electrode (23) have mutually different hydrophilicities.

Abstract: One aspect is contemplated for providing a device having a liquid crystal material exhibiting a dielectric constant of 1000 or more at a temperature at which a specific liquid crystal phase is developed, and a unit configured to apply voltage to the liquid crystal material at the temperature at which the specific liquid crystal phase is developed.

Abstract: Provided is a novel electroosmotic pump capable of being driven by AC voltage. An electroosmotic pump (2) includes a porous dielectric membrane (21), a first water-permeable electrode (22), a second water-permeable electrode (23), and a hydrophilic layer (22a). The first water-permeable electrode (22) is disposed on one side of the porous dielectric membrane (21). The second water-permeable electrode (23) is disposed on the other side of the porous dielectric membrane (21). The hydrophilic layer (22a) is disposed to one side with respect to the center of the porous dielectric membrane (21) in a thickness direction.

Abstract: Provided is a novel electroosmotic pump capable of being driven by AC voltage. An electroosmotic pump (2) includes a porous dielectric membrane (21), a first water-permeable electrode (22), and a second water-permeable electrode (23). The first water-permeable electrode (22) is disposed on one side of the porous dielectric membrane (21). The second water-permeable electrode (23) is disposed on the other side of the porous dielectric membrane (21). A principal surface of the porous dielectric membrane (21) close to the first water-permeable electrode (22) and a principal surface thereof close to the second water-permeable electrode (23) have mutually different hydrophilicities.

Abstract: A substrate used for a liquid crystal display element having two or more substrates arranged oppositely to each other and a liquid crystal material exhibiting a blue phase between the substrates, where a polar component of surface free energy on a substrate surface in contact with the liquid crystal material is less than 5 mJm?2; and a substrate used for a liquid crystal display element having two or more substrates arranged oppositely to each other and a liquid crystal material exhibiting a blue phase between the substrates, where a polar component of surface free energy on a substrate surface in contact with the liquid crystal material is in the range of 5 to 20 mJm?2, and a contact angle with an isotropic phase of the liquid crystal material on the substrate surface is 50 degrees or less.

Abstract: A substrate used for a liquid crystal display element having two or more substrates arranged oppositely to each other and a liquid crystal material exhibiting a blue phase between the substrates, where a polar component of surface free energy on a substrate surface in contact with the liquid crystal material is less than 5 mJm?2; and a substrate used for a liquid crystal display element having two or more substrates arranged oppositely to each other and a liquid crystal material exhibiting a blue phase between the substrates, where a polar component of surface free energy on a substrate surface in contact with the liquid crystal material is in the range of 5 to 20 mJm?2, and a contact angle with an isotropic phase of the liquid crystal material on the substrate surface is 50 degrees or less.

Abstract: The invention provides a liquid crystal composition having an optically isotropic liquid crystal phase used in an element driven in a state of an optically isotropic liquid crystal phase, which comprises a compound 1 having the clearing point T1 and a compound 2 having the clearing point T2, and which has the clearing point Tx, wherein the liquid crystal composition comprises 10 to 80 wt % of compound 1 and 20 to 90 wt % of compound 2, and wherein the clearing point T1, the clearing point T2 and the clearing point Tx of the liquid crystal composition satisfy the following conditions: T1>T2 T1?Tx?100° C.

Abstract: The invention is generally related to a polymer/liquid crystal composite, which includes a liquid crystal material which exhibits an optically isotropic liquid crystal phase in the temperature range of approximately 5° C. or more in the elevated temperature process but does not exhibit a nematic phase; and a polymer, and which is used for an element driven in a state of the optically isotropic liquid crystal phase.

Abstract: The invention provides a liquid crystal composition having an optically isotropic liquid crystal phase used in an element driven in a state of an optically isotropic liquid crystal phase, which comprises a compound I having the clearing point T1 and a compound 2 having the clearing point T2, and which has the clearing point Tx, wherein the liquid crystal composition comprises 10 to 80 wt % of compound 1 and 20 to 90 wt % of compound 2, and wherein the clearing point T1, the clearing point T2 and the clearing point Tx of the liquid crystal composition satisfy the following conditions: T1>T2 T1?Tx?100° C.

Abstract: Presents a liquid crystal display device that does not require a surface orientation treatment, dramatically improves the response rate of dynamic image displays and does not experience light leaks when the display is black, which means to yield a dark field of vision. The liquid crystal display device comprises polymer-stabilized blue phase liquid crystals sandwiched between a pair of clear substrates. The liquid crystal display device obtained using polymer-stabilized blue phase liquid crystals exhibits large double refraction changes when an electrical field is applied in an in-plane direction to the cell substrates. The polymer-stabilized blue phases liquid crystals comprises a low molecular weight liquid crystal that allows a blue phase to appear between cholesteric and isotropic phases and polymer network formed in the low molecular weight liquid crystals.

Abstract: The invention is generally related to a polymer/liquid crystal composite, which includes a liquid crystal material which exhibits an optically isotropic liquid crystal phase in the temperature range of approximately 5° C. or more in the elevated temperature process but does not exhibit a nematic phase; and a polymer, and which is used for an element driven in a state of the optically isotropic liquid crystal phase.

Abstract: [PROBLEMS] To provide a liquid crystal display device that does not need any surface aligning treatment, realizes striking increase of a response speed of movie display and is free from any light leakage (produce dark field) at black display. [MEANS FOR SOLVING PROBLEMS] There is provided a liquid crystal display device comprising a pair of transparent substrates and, interposed therebetween, a polymer stabilized blue-phase liquid crystal. The liquid crystal display device utilizing the polymer stabilized blue-phase liquid crystal exhibits a large birefringence change upon application of an electric field to cell substrate in an in-plane direction. The polymer stabilized blue-phase liquid crystal is composed of a low-molecular liquid crystal capable of developing a blue phase between cholesteric phase and isotropic phase and a polymer network created in the low-molecular liquid crystal.

Abstract: An optical element which comprises a liquid crystal dispersion film layer which is composed of a spongy matrix polymer and a liquid crystal such that they become separated at use temperatures and mixed at high temperatures. The mixture remains mixed upon quenching but gets phase separated upon slow cooling. The optical element produces an electro-optic effect and permits heat-mode recording.