Patents by Inventor Hiroya Ohta
Hiroya Ohta has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240144560Abstract: A training method that performs learning using appropriate low-quality image and high-quality image is provided. The invention is directed to a training method including executing learning by inputting a first image generated under a first image generation condition and a second image generated under a second image generation condition different from the first image generation condition to a learning apparatus that adjusts parameters so as to suppress an error between an input image and a converted image, in which the second image is selected such that an index value extracted from the second image is the same as or has a predetermined relationship with an index value extracted from the first image, or the second image is output from a second image generation tool different from a first image generation tool for generating the first image.Type: ApplicationFiled: March 3, 2022Publication date: May 2, 2024Inventors: Zhaohui CHENG, Yasutaka TOYODA, Hideto DOHI, Hiroya OHTA, Hideyuki KAZUMI
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Patent number: 11869745Abstract: An object of the invention is to provide a charged particle beam device capable of increasing the contrast of an observation image of a sample as much as possible in accordance with light absorption characteristics that change for each optical parameter. The charged particle beam device according to the invention changes an optical parameter such as a polarization plane of light emitted to the sample, and generates the observation image having a contrast corresponding to the changed optical parameter. An optical parameter that maximizes a light absorption coefficient of the sample is specified according to a feature amount of a shape pattern of the sample (refer to FIG. 5).Type: GrantFiled: March 27, 2019Date of Patent: January 9, 2024Assignee: HITACHI HIGH-TECH CORPORATIONInventors: Minami Shouji, Natsuki Tsuno, Hiroya Ohta, Daisuke Bizen
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Publication number: 20230274909Abstract: An object of the invention is to obtain an observation image in which a plurality of pieces of feature data of a sample are emphasized in a charged particle beam device that acquires an observation image of the sample by irradiating the sample with a charged particle beam and light. The charged particle beam device according to the invention calculates a sequence for modulating a light irradiation condition according to an irradiation condition of a charged particle beam, and controls the light irradiation condition according to the sequence (see FIG. 2).Type: ApplicationFiled: September 28, 2020Publication date: August 31, 2023Inventors: Minami SHOUJI, Yasuhiro SHIRASAKI, Natsuki TSUNO, Hirohiko KITSUKI, Hiroya OHTA
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Publication number: 20230170182Abstract: Proposed is a charged particle beam apparatus for the purpose of detecting a charged particle emitted from a sample in a specific direction by discriminating between the charged particle and a charged particle emitted in another direction. As one aspect of achieving the above purpose, proposed is a charged particle beam apparatus including an objective lens configured to focus a beam emitted from a charged particle source, a detector (8) configured to detect at least one of a first charged particle (23) emitted from a sample by irradiating the sample with the beam and a second charged particle emitted from a charged particle collided member by causing the first charged particle to collide with the charged particle collision member disposed on a trajectory of the first charged particle, and an electrostatic lens (12) including a plurality of electrodes disposed between the objective lens and the detector, in which the electrostatic lens is a Butler type.Type: ApplicationFiled: April 28, 2020Publication date: June 1, 2023Inventors: Kazufumi YACHI, Muneyuki FUKUDA, Ichiro TACHIBANA, Hiroya OHTA
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Publication number: 20220359150Abstract: The invention provides a charged particle beam device capable of reducing a positional shift between secondary beams generated in a beam separator. The charged particle beam device includes a charged particle beam source configured to irradiate a sample with a plurality of primary beams, a plurality of detectors configured to detect secondary beams emitted from the sample in correspondence to the primary beams, and a beam separator configured to deflect the secondary beams in a direction different from that of the primary beams. The charged particle beam device further includes a deflector provided between the beam separator and the detector to correct a positional shift between the secondary beams generated in the beam separator.Type: ApplicationFiled: July 8, 2019Publication date: November 10, 2022Inventors: Momoyo Enyama, Makoto Sakakibara, Hajime Kawano, Hiroya Ohta
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Patent number: 11435178Abstract: To implement a calibration sample by which an incident angle can be measured with high accuracy, an electron beam adjustment method, and an electron beam apparatus using the calibration sample.Type: GrantFiled: August 25, 2017Date of Patent: September 6, 2022Assignee: HITACHI HIGH-TECH CORPORATIONInventors: Yasunari Sohda, Yoshinori Nakayama, Kaori Bizen, Hiroya Ohta, Yusuke Abe
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Publication number: 20220260930Abstract: A computation device is provided for measuring the dimensions of patterns formed on a sample based on a signal obtained from a charged particle beam device. The computation device includes a positional deviation amount calculation unit for calculating the amount of positional deviation in a direction parallel to a wafer surface between two patterns having different heights based on an image acquired at a given beam tilt angle; a pattern inclination amount calculation unit for calculating an amount of pattern inclination from the amount of positional deviation using a predetermined relational expression for the amount of positional deviation and the amount of pattern inclination; and a beam tilt control amount calculation unit for controlling the beam tilt angle so as to match the amount of pattern inclination. The pattern measurement device sets the beam tilt angle to a calculated beam tilt angle, reacquires an image and measures the patterns.Type: ApplicationFiled: April 29, 2022Publication date: August 18, 2022Inventors: Takuma Yamamoto, Hiroya Ohta, Kenji Tanimoto, Yusuke Abe, Tomohiro Tamori, Masaaki Nojiri
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Publication number: 20220216032Abstract: An object of the invention is to provide a charged particle beam apparatus capable of acquiring an observation image having a high contrast in a sample whose light absorption characteristic depends on a light wavelength. The charged particle beam apparatus according to the invention irradiates the sample with light, generates an observation image of the sample, changes an irradiation intensity per unit time of the light, and then generates a plurality of the observation images having different contrasts (see FIG. 4).Type: ApplicationFiled: May 21, 2019Publication date: July 7, 2022Applicant: HITACHI HIGH-TECH CORPORATIONInventors: Minami SHOUJI, Natsuki TSUNO, Hiroya OHTA, Daisuke BIZEN, Hajime KAWANO
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Patent number: 11353798Abstract: The present invention has a computation device for measuring the dimensions of patterns formed on a sample on the basis of a signal obtained from a charged particle beam device. The computation device has a positional deviation amount calculation unit for calculating the amount of positional deviation in a direction parallel to a wafer surface between two patterns having different heights on the basis of an image acquired at a given beam tilt angle; a pattern inclination amount calculation unit for calculating an amount of pattern inclination from the amount of positional deviation using a predetermined relational expression for the amount of positional deviation and the amount of pattern inclination; and a beam tilt control amount calculation unit for controlling the beam tilt angle so as to match the amount of pattern inclination. The pattern measurement device sets the beam tilt angle to a calculated beam tilt angle, reacquires an image and measures the patterns.Type: GrantFiled: October 13, 2017Date of Patent: June 7, 2022Assignee: Hitachi High-Technologies CorporationInventors: Takuma Yamamoto, Hiroya Ohta, Kenji Tanimoto, Yusuke Abe, Tomohiro Tamori, Masaaki Nojiri
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Publication number: 20220139667Abstract: An object of the invention is to provide a charged particle beam device capable of increasing the contrast of an observation image of a sample as much as possible in accordance with light absorption characteristics that change for each optical parameter. The charged particle beam device according to the invention changes an optical parameter such as a polarization plane of light emitted to the sample, and generates the observation image having a contrast corresponding to the changed optical parameter. An optical parameter that maximizes a light absorption coefficient of the sample is specified according to a feature amount of a shape pattern of the sample (refer to FIG. 5).Type: ApplicationFiled: March 27, 2019Publication date: May 5, 2022Inventors: Minami Shouji, Natsuki Tsuno, Hiroya Ohta, Daisuke Bizen
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Publication number: 20210131801Abstract: To implement a calibration sample by which an incident angle can be measured with high accuracy, an electron beam adjustment method, and an electron beam apparatus using the calibration sample.Type: ApplicationFiled: August 25, 2017Publication date: May 6, 2021Inventors: Yasunari SOHDA, Yoshinori NAKAYAMA, Kaori BIZEN, Hiroya OHTA, Yusuke ABE
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Patent number: 10816332Abstract: The purpose of the present invention is to provide a pattern measurement device that is capable of highly accurately measuring a groove bottom, hole bottom, or the like, regardless of the accuracy of the formation of a deep groove or deep hole. To that end, the present invention proposes a pattern measurement device provided with a computation device for measuring the dimensions of a pattern formed on a sample on the basis of a signal obtained by a charged particle beam device, wherein the computation device determines the deviation between a first part of the pattern and a second part of the pattern at a different height than the first part and pattern dimension values on the basis of a detection signal obtained on the basis of the scanning of the sample by a charged particle beam and corrects the pattern dimension values using the deviation determined from the detection signal and relationship information indicating the relationship between the pattern dimensions and the deviation.Type: GrantFiled: April 13, 2016Date of Patent: October 27, 2020Assignee: Hitachi High-Tech CorporationInventors: Hiroya Ohta, Kenji Tanimoto, Tomohiro Tamori, Takuma Yamamoto
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Publication number: 20200292308Abstract: The purpose of the present invention is to provide a pattern measurement device that is capable of highly accurately measuring a groove bottom, hole bottom, or the like, regardless of the accuracy of the formation of a deep groove or deep hole. To that end, the present invention proposes a pattern measurement device provided with a computation device for measuring the dimensions of a pattern formed on a sample on the basis of a signal obtained by a charged particle beam device, wherein the computation device determines the deviation between a first part of the pattern and a second part of the pattern at a different height than the first part and pattern dimension values on the basis of a detection signal obtained on the basis of the scanning of the sample by a charged particle beam and corrects the pattern dimension values using the deviation determined from the detection signal and relationship information indicating the relationship between the pattern dimensions and the deviation.Type: ApplicationFiled: April 13, 2016Publication date: September 17, 2020Applicant: Hitachi High-Technologies CorporationInventors: Hiroya OHTA, Kenji TANIMOTO, Tomohiro TAMORI, Takuma YAMAMOTO
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Publication number: 20200278615Abstract: The present invention comprises a computation device for measuring the dimensions of patterns formed on a sample on the basis of a signal obtained from a charged particle beam device. The computation device comprises a positional deviation amount calculation unit for calculating the amount of positional deviation in a direction parallel to a wafer surface between two patterns having different heights on the basis of an image acquired at a given beam tilt angle; a pattern inclination amount calculation unit for calculating an amount of pattern inclination from the amount of positional deviation using a predetermined relational expression for the amount of positional deviation and the amount of pattern inclination; and a beam tilt control amount calculation unit for controlling the beam tilt angle so as to match the amount of pattern inclination. The pattern measurement device sets the beam tilt angle to a calculated beam tilt angle, reacquires an image and measures the patterns.Type: ApplicationFiled: October 13, 2017Publication date: September 3, 2020Inventors: Takuma YAMAMOTO, Hiroya OHTA, Kenji TANIMOTO, Yusuke ABE, Tomohiro TAMORI, Masaaki NOJIRI
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Patent number: 10636618Abstract: There is provided a charged particle beam apparatus including: a charged particle source; a condenser lens and an object lens for converging a charged particle beam from the charged particle source and irradiating the converged charged particle beam to a specimen; and plural image shift deflectors for deflecting the charged particle beam. In the charged particle beam apparatus, the deflection of the charged particle beam is controlled using first control parameters that set the optical axis of a charged particle beam to a first optical axis that passes through the center of the object lens and enters a predefined position of the specimen, and second control parameters that transform the first control parameters so that the first control parameters set the optical axis of the charged particle beam to a second optical axis having a predefined incident angle different from the incident angle of the first optical axis.Type: GrantFiled: August 28, 2018Date of Patent: April 28, 2020Assignee: HITACHI HIGH-TECHNOLOGIES CORPORATIONInventors: Kaori Bizen, Yasunari Sohda, Makoto Sakakibara, Hiroya Ohta, Kenji Tanimoto, Yusuke Abe
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Patent number: 10629408Abstract: The purpose of the present invention is to provide a charged particle beam device for detecting, with highly precise angular discrimination, charged particles emitted from a specimen. To achieve this purpose, proposed is a charged particle beam device provided with a scanning deflector for scanning on a specimen a charged particle beam emitted from a charged particle source, the charged particle beam device being provided with: a first detector for detecting charged particles obtained by scanning of the charged particle beam on a specimen, and a second detector placed between the first detector and the specimen, and supported so as to be able to move in the charged particle beam light axis direction.Type: GrantFiled: July 28, 2016Date of Patent: April 21, 2020Assignee: Hitachi High-Technologies CorporationInventors: Toshimasa Kameda, Hiroya Ohta, Kenji Tanimoto
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Publication number: 20190221400Abstract: The purpose of the present invention is to provide a charged particle beam device for detecting, with highly precise angular discrimination, charged particles emitted from a specimen. To achieve this purpose, proposed is a charged particle beam device provided with a scanning deflector for scanning on a specimen a charged particle beam emitted from a charged particle source, the charged particle beam device being provided with: a first detector for detecting charged particles obtained by scanning of the charged particle beam on a specimen, and a second detector placed between the first detector and the specimen, and supported so as to be able to move in the charged particle beam light axis direction.Type: ApplicationFiled: July 28, 2016Publication date: July 18, 2019Inventors: Toshimasa KAMEDA, Hiroya OHTA, Kenji TANIMOTO
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Patent number: 10262830Abstract: To provide a scanning electron microscope having an electron spectroscopy system to attain high spatial resolution and a high secondary electron detection rate under the condition that energy of primary electrons is low, the scanning electron microscope includes: an objective lens 105; primary electron acceleration means 104 that accelerates primary electrons 102; primary electron deceleration means 109 that decelerates the primary electrons and irradiates them to a sample 106; a secondary electron deflector 103 that deflects secondary electrons 110 from the sample to the outside of an optical axis of the primary electrons; a spectroscope 111 that disperses secondary electrons; and a controller that controls application voltage to the objective lens, the primary electron acceleration means and the primary electron deceleration means so as to converge the secondary electrons to an entrance of the spectroscope.Type: GrantFiled: November 26, 2014Date of Patent: April 16, 2019Assignee: HITACHI, LTD.Inventors: Daisuke Bizen, Hideo Morishita, Michio Hatano, Hiroya Ohta
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Publication number: 20190066969Abstract: There is provided a charged particle beam apparatus including: a charged particle source; a condenser lens and an object lens for converging a charged particle beam from the charged particle source and irradiating the converged charged particle beam to a specimen; and plural image shift deflectors for deflecting the charged particle beam. In the charged particle beam apparatus, the deflection of the charged particle beam is controlled using first control parameters that set the optical axis of a charged particle beam to a first optical axis that passes through the center of the object lens and enters a predefined position of the specimen, and second control parameters that transform the first control parameters so that the first control parameters set the optical axis of the charged particle beam to a second optical axis having a predefined incident angle different from the incident angle of the first optical axis.Type: ApplicationFiled: August 28, 2018Publication date: February 28, 2019Inventors: Kaori BIZEN, Yasunari SOHDA, Makoto SAKAKIBARA, Hiroya OHTA, Kenji TANIMOTO, Yusuke ABE
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Patent number: 9991088Abstract: An aberration corrector includes a mirror that corrects an aberration of a charged particle beam, a beam separator, and a bypass optical system in the beam separator. The beam separator includes an entrance of the charged particle beam and an exit from which the charged particle beam is emitted to an objective lens, and separates an incident trajectory from the entrance to the mirror and a reflection trajectory from the mirror to the exit from each other by deflecting the charged particle beam in an ON state. The bypass optical system is disposed at a position at which the trajectory of the charged particle beam bypasses when the beam separator is in the ON state, and the trajectory of the charged particle beam passes when the beam separator is in an OFF state, and controls the charged particle beam so that objective lens optical conditions in a trajectory via the mirror and a trajectory passing through the bypass optical system coincide with each other.Type: GrantFiled: February 18, 2015Date of Patent: June 5, 2018Assignee: Hitachi, Ltd.Inventors: Yasuhiro Shirasaki, Momoyo Enyama, Hiroya Ohta