Abstract: A fluorescence observation apparatus includes a fluorescence observation unit, which includes a scanner that scans ultrashort pulsed laser light from a light source, a pupil projection lens that focuses the laser light scanned by the scanner, an image-forming lens that converts the focused laser light to substantially collimated light and causes the laser light to be incident on an objective lens, and a dichroic mirror that splits off fluorescence that is generated by the laser light focused on a sample by the objective lens and is collected by the objective lens. A photodetector detects the fluorescence split off by the dichroic mirror. A multi-mode optical fiber connects the fluorescence observation unit and the photodetector. A swiveling mechanism causes the fluorescence observation unit to swivel about an axis near the focal position of the objective lens. And a light-source optical fiber connects the light source and the fluorescence observation unit.

Abstract: A microscope includes: an objective lens having an optical system; a correction collar provided on the objective lens and configured to move the optical system in a direction of an optical axis of the optical system by rotating around the objective lens to correct aberration; a switching unit to which the objective lens is attachable and which switches a position of the objective lens; a supporting unit for supporting the switching unit; and a focusing unit that holds the supporting unit such that the supporting unit is movable along the optical axis of the objective lens. A correction collar operating device is detachably attached to the supporting unit and includes: an input unit for inputting rotary force to rotate the correction collar; and a correction collar driving unit for rotating the correction collar according to the rotary force while the correction collar driving unit has contact with the correction collar.

Abstract: A fluorescence observation apparatus includes a fluorescence observation unit, which includes a scanner that scans ultrashort pulsed laser light from a light source, a pupil projection lens that focuses the laser light scanned by the scanner, an image-forming lens that converts the focused laser light to substantially collimated light and causes the laser light to be incident on an objective lens, and a dichroic mirror that splits off fluorescence that is generated by the laser light focused on a sample by the objective lens and is collected by the objective lens. A photodetector detects the fluorescence split off by the dichroic mirror. A multi-mode optical fiber connects the fluorescence observation unit and the photodetector. A swiveling mechanism causes the fluorescence observation unit to swivel about an axis near the focal position of the objective lens. And a light-source optical fiber connects the light source and the fluorescence observation unit.

Abstract: A fluorescence observation unit includes a scanner that scans ultrashort pulsed laser light, a pupil projection lens that focuses the scanned ultrashort pulsed laser light, an image-forming lens that converts the focused ultrashort pulsed laser light to substantially collimated light and causes the ultrashort pulsed laser light to be incident on the objective lens, and a dichroic mirror that splits off, from the optic path of the ultrashort pulsed laser light, fluorescence generated in a sample due to irradiation with the ultrashort pulsed laser light and collected by the objective lens. The image-forming lens includes a first optical system having positive refractive power, and a second optical system having negative refractive power and disposed at a position closer to the scanner than the first optical system is. The dichroic mirror is disposed between the first optical system and the second optical system.

Abstract: It is an object of the present invention to provide a microscope that is capable of precisely controlling the amount of an immersion medium held in a gap between an objective lens and a mounting part, and that is capable of observing a specimen without varying the mounting part. The microscope includes a supply port from which an immersion medium is supplied to a gap between a film-like mounting part on which a specimen is loaded and an immersion objective lens, and a suction port that is arranged so as to be able to be brought into contact with an immersion medium supplied from the supply port, and from which the immersion medium can be sucked.

Abstract: Provided is a culture microscope including a culturing space that is provided with a stage on which a specimen is mounted; an adjacent space that is adjacent to the culturing space and in which a driving mechanism of the stage is disposed; a stationary partition that divides the adjacent space and the culturing space and that is also provided with a first through-hole; a tabular movable partition that is disposed at a position where the movable partition closes the first through-hole, that has a second through-hole that is smaller than the first through-hole, that is supported so as to be movable parallel to the stationary partition, and that is larger than the first through-hole; and a lid member that is disposed at a position where the lid member closes the second through-hole of the movable partition and that is supported so as to be movable parallel to the movable partition.

Abstract: A fluorescence observation unit includes a scanner that scans ultrashort pulsed laser light, a pupil projection lens that focuses the scanned ultrashort pulsed laser light, an image-forming lens that converts the focused ultrashort pulsed laser light to substantially collimated light and causes the ultrashort pulsed laser light to be incident on the objective lens, and a dichroic mirror that splits off, from the optic path of the ultrashort pulsed laser light, fluorescence generated in a sample due to irradiation with the ultrashort pulsed laser light and collected by the objective lens. The image-forming lens includes a first optical system having positive refractive power, and a second optical system having negative refractive power and disposed at a position closer to the scanner than the first optical system is. The dichroic mirror is disposed between the first optical system and the second optical system.

Abstract: A microscope includes: an objective lens having an optical system; a correction collar provided on the objective lens and configured to move the optical system in a direction of an optical axis of the optical system by rotating around the objective lens to correct aberration; a switching unit to which the objective lens is attachable and which switches a position of the objective lens; a supporting unit for supporting the switching unit; and a focusing unit that holds the supporting unit such that the supporting unit is movable along the optical axis of the objective lens. A correction collar operating device is detachably attached to the supporting unit and includes: an input unit for inputting rotary force to rotate the correction collar; and a correction collar driving unit for rotating the correction collar according to the rotary force while the correction collar driving unit has contact with the correction collar.

Abstract: Provided is a culture microscope including a culturing space that is provided with a stage on which a specimen is mounted; an adjacent space that is adjacent to the culturing space and in which a driving mechanism of the stage is disposed; a stationary partition that divides the adjacent space and the culturing space and that is also provided with a first through-hole; a tabular movable partition that is disposed at a position where the movable partition closes the first through-hole, that has a second through-hole that is smaller than the first through-hole, that is supported so as to be movable parallel to the stationary partition, and that is larger than the first through-hole; and a lid member that is disposed at a position where the lid member closes the second through-hole of the movable partition and that is supported so as to be movable parallel to the movable partition.

Abstract: It is an object of the present invention to provide a microscope that is capable of precisely controlling the amount of an immersion medium held in a gap between an objective lens and a mounting part, and that is capable of observing a specimen without varying the mounting part. The microscope includes a supply port from which an immersion medium is supplied to a gap between a film-like mounting part on which a specimen is loaded and an immersion objective lens, and a suction port that is arranged so as to be able to be brought into contact with an immersion medium supplied from the supply port, and from which the immersion medium can be sucked.

Abstract: A substrate transport apparatus includes: a pair of arm units having a substrate-carrying surface on which a substrate is placed; a support member freely rotatably supporting the arm unit; and an inclination device inclining the arm unit with each of the substrate-carrying surface facing one another.

Abstract: A substrate transport apparatus includes: a pair of arm units having a substrate-carrying surface on which a substrate is placed; a support member freely rotatably supporting the arm unit; and an inclination device inclining the arm unit with each of the substrate-carrying surface facing one another.

Abstract: This visual inspection apparatus has a macro-inspection section and a micro-inspection section. In the micro-inspection section, a inspection stage and a microscope are loaded into a loading plate. The inspection stage can be moved in any directions of the X, Y, and Z directions, and can also be rotated in the ? direction. Moreover, a peripheral edge inspection section that acquires an enlarged image of a peripheral edge of wafer W is fixed to the loading plate. The peripheral edge inspection section is arranged so as to image the peripheral edge of wafer W held by the inspection stage.

Abstract: This visual inspection apparatus has a macro-inspection section and a micro-inspection section. In the micro-inspection section, a inspection stage and a microscope are loaded into a loading plate. The inspection stage can be moved in any directions of the X, Y, and Z directions, and can also be rotated in the ? direction. Moreover, a peripheral edge inspection section that acquires an enlarged image of a peripheral edge of wafer W is fixed to the loading plate. The peripheral edge inspection section is arranged so as to image the peripheral edge of wafer W held by the inspection stage.

Abstract: This visual inspection apparatus has a macro-inspection section and a micro-inspection section. In the micro-inspection section, a inspection stage and a microscope are loaded into a loading plate. The inspection stage can be moved in any directions of the X, Y, and Z directions, and can also be rotated in the ? direction. Moreover, a peripheral edge inspection section that acquires an enlarged image of a peripheral edge of wafer W is fixed to the loading plate. The peripheral edge inspection section is arranged so as to image the peripheral edge of wafer W held by the inspection stage.