Abstract: An X-ray analyzer includes an X-ray source, a straight tube type multi-capillary, a flat plate spectroscopic crystal, a parallel/point focus type multi-capillary X-ray lens, and a Fresnel zone plate. A qualitative analysis is performed over an area on the sample, the flat plate spectroscopic crystal and the Fresnel zone plate are removed from the X-ray optical path, and X-rays are collected by the multi-capillary lens and the sample is irradiated. When analyzing the chemical morphology of an element, the multi-capillary lens retracts from the optical path, the source rotates, and the flat plate spectroscopic crystal and the Fresnel zone plate are inserted on the optical path. A narrow sample area is irradiated by the Fresnel zone plate with X-rays having energy extracted from the flat plate spectroscopic crystal. This makes it possible to carry out accurate qualitative analysis on the sample and perform detailed analysis of more minute parts.

Abstract: An X-ray analyzer includes an X-ray source, a straight tube type multi-capillary, a flat plate spectroscopic crystal, a parallel/point focus type multi-capillary X-ray lens, and a Fresnel zone plate. A qualitative analysis is performed over an area on the sample, the flat plate spectroscopic crystal and the Fresnel zone plate are removed from the X-ray optical path, and X-rays are collected by the multi-capillary lens and the sample is irradiated. When analyzing the chemical morphology of an element, the multi-capillary lens retracts from the optical path, the source rotates, and the flat plate spectroscopic crystal and the Fresnel zone plate are inserted on the optical path. A narrow sample area is irradiated by the Fresnel zone plate with X-rays having energy extracted from the flat plate spectroscopic crystal. This makes it possible to carry out accurate qualitative analysis on the sample and perform detailed analysis of more minute parts.

Abstract: The X-ray focusing device includes a point/parallel type multi-capillary X-ray lens (MCX) and a point/parallel type single capillary X-ray lens (SCX). MCX and SCX are positioned so that the end face of the parallel end of SCX is positioned closed to the focal point position on the converging end of MCX so that the optical axes of the two coincide. X-rays that are efficiently collected by MCX are emitted from the converging end and become incident to the end face of parallel end of SCX so that the X-rays are efficiently incorporated into SCX. The X-rays are then irradiated from the converging end of SCX onto focal point having a small diameter. This allows taking advantages of MCX and SCX while compensating for their disadvantages.

Abstract: An X-ray spectrometric detection device includes a dispersive crystal and a two-dimensional X-ray detector, spectrally resolves characteristic X-rays emitted from a micro analysis spot having a diameter of 100 ?m or less on a surface of a sample irradiated with X-rays or an electron beam, and detects the resolved X-rays by wavelength. The dispersive crystal has a flat diffractive reflection surface for receiving the characteristic X-rays emitted from the micro analysis spot and diffracts and reflects a wavelength component corresponding to an incident angle to the diffractive reflection surface in wavelength components included in the characteristic X-rays, so as to spectrally resolve the characteristic X-rays by wavelength. The detector has a light-receiving surface for receiving the characteristic X-rays diffracted and reflected by the dispersive crystal, and generates data concerning an incident position and intensity of the characteristic X-rays incident on the light-receiving surface.

Abstract: The X-ray focusing device includes a point/parallel type multi-capillary X-ray lens (MCX) and a point/parallel type single capillary X-ray lens (SCX). MCX and SCX are positioned so that the end face of the parallel end of SCX is positioned closed to the focal point position on the converging end of MCX so that the optical axes of the two coincide. X-rays that are efficiently collected by MCX are emitted from the converging end and become incident to the end face of parallel end of SCX so that the X-rays are efficiently incorporated into SCX. The X-rays are then irradiated from the converging end of SCX onto focal point having a small diameter. This allows taking advantages of MCX and SCX while compensating for their disadvantages.