Abstract: This invention provides a wafer processing method comprising a process of irradiating a wafer to be processed placed on the upper surface of a sample table arranged in a processing chamber with light or electromagnetic waves to heat and remove a compound layer of a film layer that is preliminarily formed on the upper surface of the film layer of the upper surface of the wafer, wherein in the process, by receiving the light or electromagnetic waves reflected by the upper surface of the wafer, a signal indicating a temporal change in intensity using the wavelength of the light or electromagnetic waves as a parameter is corrected using information of the intensity of the light or electromagnetic waves detected by receiving the light or electromagnetic waves at a position on the circumferential side of the upper surface of the sample table.

Abstract: A solid electrolyte fuel cell having a long service life includes a power generating cell having a fuel electrode laminated on one surface of a solid electrolyte and an air electrode laminated on the other surface, an air electrode current collector laminated in contact with the air electrode of the power generating cell and formed of a porous silver material or a silver-coated porous metal material, a fuel electrode current collector laminated in contact with the fuel electrode of the power generating cell, an air electrode-side separator having a silver-plated layer formed on its surface on the side contacting the fuel electrode current collector, a fuel electrode-side separator laminated in contact with the fuel electrode current collector, and air supply passage provided by being connected with the air electrode-side separator and a fuel supply passage provided by being connected with the fuel electrode-side separator, wherein a silver vapor supply unit is provided in the air supply passage to thereby sup

Abstract: A solid electrolyte fuel cell having a long service life, comprising a power generating cell (4) having a fuel electrode (3) laminated on one surface of a solid electrolyte (1) and an air electrode (2) laminated on the other surface, an air electrode current collector (5) laminated in contact with the air electrode (2) of the power generating cell (4) and formed of a porous silver material or a silver-coated porous metal material, a fuel electrode current collector (6) laminated in contact with the fuel electrode (3) of the power generating cell (4), an air electrode-side separator (7) having a silver-plated layer (9) formed on its surface on the side contacting the fuel electrode current collector (5), a fuel electrode-side separator (8) laminated in contact with the fuel electrode current collector, and air supply passage (11) provided by being connected with the air electrode-side separator (7) and a fuel supply passage (10) provided by being connected with the fuel electrode-side separator (8), wherein a

Abstract: An inner spring, for use in furniture and bedding, comprises coil springs which are encased in cylindrical casings having a predetermined number of spring casing portions, and which are continuously arranged in parallel. The axes of the coil springs are arranged in parallel, and at least a part of the coil springs encased in the spring casing portions are given different repulsions by varying their pitches and are set in place in the cylindrical spring casings to form a row of inner springs.

Abstract: A cased coil spring producing apparatus comprises a coil spring producing mechanism for forming coil springs, a conveying mechanism including a conveyer for conveying the coil springs fed from the coil spring producing mechanism, a hardening-and-cooling mechanism for hardening the coil springs and cooling them, a sheet feeding mechanism for double folding a sheet and feeding it, a compression-and-insertion mechanism for compressing the coil springs and inserting them in the double folded sheet, a bonding mechanism for bonding the double folded sheet inserting therein the coil springs together, and a coil spring arraying mechanism for changing position of the coil springs inserted in the sheet. The conveyer of the conveying mechanism includes coil spring supporting members aligned in two or more rows rising upwardly therefrom. A sorting mechanism is provided for sortably distributing the coil springs fed from the coil spring producing mechanism to the coil spring supporting members.

Abstract: A pocket coil spring structure assembling apparatus includes a feeder mechanism for supplying a group of pocket coil springs to a positioning transfer conveyor. A positioning transfer conveyor mechanism conveys the group of the pocket coil springs supplied from the feeder mechanism to a predetermined location. A cutter mechanism mounted between the feeder mechanism and the positioning transfer conveyor mechanism separates a group of the pocket coil springs from succeeding pocket coil springs by cutting to a given length. A press holding mechanism holds and lifts the group of the pocket coil springs on the positioning transfer conveyor by pressing the radial center of each pocket coil spring from opposite ends thereof. A press holding mechanism carrier mechanism moves the press holding mechanism in four, i.e. forward, backward, leftward, and rightward, directions. A spray mechanism including a spray nozzle applies a spray of an adhesive material to the group of the pocket coil springs.

Abstract: A pocket coil spring structure assembling apparatus for producing a pocket coil spring structure which includes a feeder mechanism to supply a group of pocket coil springs to a positioning transfer conveyor mechanism; a cutting mechanism between the feeding mechanism and the positioning transfer conveyor mechanism to cut the group of pocket coil springs to a predetermined length; a press holding mechanism to hold and lift the cut group of pocket coils springs on the positioning transfer conveyor mechanism by pressing the centers of opposite ends of each pocket coil springs; a pressing holding mechanism carrier mechanism to move the press holding mechanism in forward, backward, leftward, and rightward directions; a spray mechanism with a spray nozzle to apply adhesive to the cut group of pocket coil springs; a nozzle carrier to move the spray nozzle; and a controller mechanism for controlling each of the mechanisms.

Abstract: A pocket coil spring producing apparatus includes a coil spring forming mechanism for forming coil springs, a hardening mechanism for hardening coil springs fed from the coil spring forming mechanism, a conveyor mechanism for cooling and conveying the hardened coil springs, and a compress inserting mechanism for compressing and inserting the coil springs conveyed by the conveyor mechanism into a two-fold sheet form of a sheet material. A sheet supplying mechanism folds the sheet material in two and feeds the same. A joining mechanism joins the two-fold form of the sheet material to have a row of substantially rectangular pouches into which are supplied respective of the compressed coil springs. A spring alignment mechanism aligns each compressed coil spring in a respective pouch in a lengthwise direction to return to a free, released state. A control mechanism controls the foregoing mechanisms.

Abstract: An apparatus is provided for processing peripheral selvedges of fabric. The apparatus includes a sewing machine unit for sewing up fabrics; an air table mechanism incorporating a number of jet apertures through which air is jetted onto an upper surface of the table in an obliquely upward direction towards a product guide member; a supplementary roller unit which vertically ascends and descends to shift a processable fabric synchronously with feeding of the sewing machine unit; a rotating unit having a fabric holding unit which descends only when sewing of a fabric corner is executed in order to hold and rotate the objective fabric by a predetermined angle and then ascends after rotating the fabric by a predetermined angle; a flange strip supply unit for supplying a flange strip to the sewing machine unit; and a controller unit for integrally controlling operation of the above component units.

Abstract: A transistor having a high carrier mobility and suited for a high-speed operation can be formed by utilizing a fact that the carrier mobility in a strained germanium layer is large. A strain control layer is provided beneath the germanium layer to impose a compressive strain on the germanium layer, and the composition of the strain control layer in a predetermined range is used to generate the compressive strain surely.

Abstract: A tool member includes a tungsten carbide based cemented carbide substrate and a diamond coating deposited on the substrate. The substrate has two diffraction peaks K.alpha..sub.1 and K.alpha..sub.2 indexed by index of pane (211) for tungsten carbide in X-ray diffraction. The peaks satisfy the relationship of 1.sub.1 /1.sub.2 .ltoreq.35, where 1.sub.1 and 1.sub.2 are heights of the peaks K.alpha..sub.1 and K.alpha..sub.2 measured from a base of a trough between the two diffraction peaks. For manufacturing the tool member, a green compact is first sintered to provide a tungsten carbide based cemented carbide substrate. Subsequently the substrate is ground and subsequently heat-treated at a temperature between 1000.degree. C. and 1600.degree. C. in a vacuum or in a non-oxidizing atmosphere. Thereafter, a diamond coating is formed on the substrate by vapor-deposition method.