Patents by Inventor Hiroyuki Hunatsu

Hiroyuki Hunatsu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6473520
    Abstract: A pellicle in which a portion for identifying the pellicle, which comprises a conductive film and predetermined patterns composed of conductors formed on the conductive film, is attached to a pellicle frame labeled with a pellicle membrane, is fixed onto a mask and electrically connected to signal lines formed on the mask and predetermined patterns composed of conductors. A reader supplies a source potential to the conductive film and reads electric signals sent from the predetermined patterns each comprised of the conductor through signal lines. The pellicle is identified according to each read signal.
    Type: Grant
    Filed: February 8, 1999
    Date of Patent: October 29, 2002
    Assignee: Oki Electric Industry Co., Ltd.
    Inventor: Hiroyuki Hunatsu
  • Publication number: 20020102015
    Abstract: A pellicle in which a portion for identifying the pellicle, which comprises a conductive film and predetermined patterns composed of conductors formed on the conductive film, is attached to a pellicle frame labeled with a pellicle membrane, is fixed onto a mask and electrically connected to signal lines formed on the mask and predetermined patterns composed of conductors. A reader supplies a source potential to the conductive film and reads electric signals sent from the predetermined patterns each comprised of the conductor through signal lines. The pellicle is identified according to each read signal.
    Type: Application
    Filed: February 8, 1999
    Publication date: August 1, 2002
    Inventor: HIROYUKI HUNATSU