Abstract: An apparatus includes a first substrate including a first adhesive layer, a second substrate including a second adhesive layer, a first drum that is rotatable, and a third adhesive layer located on the first drum. The first drum moves to a first location to separate device chips from the first adhesive layer of the first substrate and adheres the device chips to the third adhesive layer by rotating the first drum, and moves to a second location to separate the device chips from the third adhesive layer by rotating the first drum. The adhesive force of the first adhesive layer is less than the adhesive force of the third adhesive layer, and the adhesive force of the third adhesive layer is less than the adhesive force of the second adhesive layer.

Abstract: An apparatus includes a first substrate including a first adhesive layer, a second substrate including a second adhesive layer, a first drum that is rotatable, and a third adhesive layer located on the first drum. The first drum moves to a first location to separate device chips from the first adhesive layer of the first substrate and adheres the device chips to the third adhesive layer by rotating the first drum, and moves to a second location to separate the device chips from the third adhesive layer by rotating the first drum. The adhesive force of the first adhesive layer is less than the adhesive force of the third adhesive layer, and the adhesive force of the third adhesive layer is less than the adhesive force of the second adhesive layer.

Abstract: A calibration plate is arranged on a support surface of a table. The calibration plate has first and second alignment marks arranged in one direction, and third and fourth alignment marks arranged in another direction that is orthogonal to the one direction. The first and second alignment marks that move in a front-and-rear direction are imaged by a first camera. The one direction of the calibration plate is made parallel to a front-and-rear direction based on the image. The positions of second and third cameras are adjusted based on the third and fourth alignment marks. The second and third cameras, positions of which have been adjusted, are moved to positions below the transfer roller, and a reference line formed at the transfer roller is imaged by the second and third cameras. An orientation of a rotation shaft of the transfer roller is adjusted in a plane parallel to the support surface based on these images.

Abstract: [Object] To provide a method and an apparatus for manufacturing electronic devices by transferring the device chips from one substrate for producing device chips to the other substrate for a product having a large display. [Means of Realizing the Object] A substrate having a plurality of device chips is brought into contact with a first drum including a selective adhesive region, the device chips are transferred by making the device chips be adhered to the selective adhesive layer of the first drum and separating at least part of the device chips from the substrate by rotating the first drum, then, the device chips on the first drum are made to be come into contact with the other substrate for the product, and the device chips are transferred to the substrate for the product by rotating the first drum.

Abstract: [Object] To provide a method and an apparatus for manufacturing electronic devices by transferring the device chips from one substrate for producing device chips to the other substrate for a product having a large display. [Means of Realizing the Object] A substrate having a plurality of device chips is brought into contact with a first drum including a selective adhesive region, the device chips are transferred by making the device chips be adhered to the selective adhesive layer of the first drum and separating at least part of the device chips from the substrate by rotating the first drum, then, the device chips on the first drum are made to be come into contact with the other substrate for the product, and the device chips are transferred to the substrate for the product by rotating the first drum.

Abstract: [Object] To provide a method and an apparatus for manufacturing electronic devices by transferring the device chips from one substrate for producing device chips to the other substrate for a product having a large display. [Means of Realizing the Object] A substrate having a plurality of device chips is brought into contact with a first drum including a selective adhesive region, the device chips are transferred by making the device chips be adhered to the selective adhesive layer of the first drum and separating at least part of the device chips from the substrate by rotating the first drum, then, the device chips on the first drum are made to be come into contact with the other substrate for the product, and the device chips are transferred to the substrate for the product by rotating the first drum.

Abstract: A slit nozzle includes a solution feeding mechanism having an elastic element and a plurality of piezoelectric devices and embedded in a side surface of a flow passage near a slit in the slit nozzle. Control is effected so that the piezoelectric devices are vibrated to cause the elastic element to produce traveling waves toward the slit. A resist solution serving as a processing solution is pumped by the traveling waves, thereby to be discharged through the slit toward a substrate. This provides a substrate processing apparatus capable of smoothly discharging the processing solution to accomplish high discharge accuracy.

Abstract: A slit nozzle includes a solution feeding mechanism having an elastic element and a plurality of piezoelectric devices and embedded in a side surface of a flow passage near a slit in the slit nozzle. Control is effected so that the piezoelectric devices are vibrated to cause the elastic element to produce traveling waves toward the slit. A resist solution serving as a processing solution is pumped by the traveling waves, thereby to be discharged through the slit toward a substrate. This provides a substrate processing apparatus capable of smoothly discharging the processing solution to accomplish high discharge accuracy.