Abstract: A plasma processing apparatus includes a stage disposed in a processing chamber for mounting a wafer, a plasma generation chamber disposed above the processing chamber for plasma generation using process gas, a plate member having multiple introduction holes, made of a dielectric material, disposed above the stage and between the processing chamber and the plasma generation chamber, and a lamp disposed around the plate member for heating the wafer. The plasma processing apparatus further includes an external IR light source, an emission fiber arranged in the stage, that outputs IR light from the external IR light source toward a wafer bottom, and a light collection fiber for collecting IR light from the wafer. Data obtained using only IR light from the lamp is subtracted from data obtained also using IR light from the external IR light source during heating of the wafer. Thus, a wafer temperature is determined.

Abstract: A lid opening and closing device for a vehicle which includes a restriction member that can operate between a restriction position at which movement of a rod at the lid closed position is restricted and a restriction release position at which the restriction is released, an electric motor that operates for a predetermined time in response to a door switching between a locked state and an unlocked state for driving the restriction member, and a case that houses the restriction member and the electric motor, wherein at least the restriction release position of the restriction member is resiliently held by a holding mechanism. Thus, even when the restriction member stops at position halfway between the restriction release position and the restriction position, convenience is enhanced by carrying out an operation of locking the door by moving the rod to the lid closed position without requiring an unlocking operation.

Abstract: A lid opening and closing device for a vehicle which includes a restriction member that can operate between a restriction position at which movement of a rod at the lid closed position is restricted and a restriction release position at which the restriction is released, an electric motor that operates for a predetermined time in response to a door switching between a locked state and an unlocked state for driving the restriction member, and a case that houses the restriction member and the electric motor, wherein at least the restriction release position of the restriction member is resiliently held by a holding mechanism. Thus, even when the restriction member stops at position halfway between the restriction release position and the restriction position, convenience is enhanced by carrying out an operation of locking the door by moving the rod to the lid closed position without requiring an unlocking operation.

Abstract: This power transmission device includes a motor, a worm connected to a rotating shaft of the motor, and a worm wheel engaged with the worm and disposed at an operation pedal side with respect to the worm, wherein a biasing member which biases the motor in a direction in which the worm and the worm wheel come in contact with each other when the motor is driven is disposed between the motor and a housing.

Abstract: A reaction force output device includes a driving part configured to transmit a driving force of a motor to a driving member through a gear mechanism to drive the driving member, thereby outputting a force in a direction opposite to an operating direction of an operation element to the operation element operated by a driver; and a controller configured to determine a control amount applied to the driving part based on an input value supplied from an outside, wherein the controller gradually increases the control amount, maintains the control amount at a constant value and then increases the control amount stepwise when increasing the control amount according to the input value.

Abstract: A reaction force output device is provided with: a drive unit that drives a drive member to output a force in a direction opposite to an operating direction to an operated element operated by an operator; and a control unit that determines whether or not a space is formed between the operated element and the drive member, and if it is determined that the space is formed, controls the drive unit to output a greater driving force than when it is determined that the space is not formed.

Abstract: A reaction force output device that outputs a reaction force to an operation unit includes: a motor as a drive source configured to create the reaction force; a reaction force transmission unit configured to transmit the reaction force to the operation unit; and a clutch mechanism disposed between the motor and the reaction force transmission unit and configured to set the motor and the reaction force transmission unit to a disengaged state or an engaged state depending on a driving state of the motor.

Abstract: A vehicle door latch control device is provided in which power from an electric actuator controlled by a control unit is transmitted via transmission means to a ratchet that can engage with a latch that engages with a striker on a vehicle body side and pivots, wherein a first switch detects whether the ratchet is in a ratchet engagement position, a second switch detects that the transmission means has operated until the ratchet attains the ratchet engagement position based on an operating position of an operating member forming part of the transmission means, and the control unit that controls actuation of the electric actuator determines that there is an abnormal state when the switching mode of the first switch is unchanged at the time the second switch changes switching mode. This enables an abnormal state in which engagement of a ratchet with a latch becomes insufficient.

Abstract: A latch release device for a vehicle door is provided which enables the release of the latched state of a latch mechanism that accompanies actuation of an electric actuator in response to the normal operation of an operating member for latch release, and the release of the latched state by a mechanical latch release operating force in response to emergency operation of the operating member for latch release, and includes a child lock mechanism attached to the latch mechanism, wherein the child lock mechanism is arranged so as to switch between linking and unlinking the actuating member for latch release and a mechanical operating force input member to which a mechanical latch release operating force is transmitted from the operating member for latch release, and latch release intention detection means is disposed on the latch mechanism so as to detect actuation of the actuating member for latch release.

Abstract: A reaction force output device includes: a motor that is a drive source that creates a reaction force; a reaction force output shaft that interlocks with an output shaft of the motor to rotate; and an interlocking arm that transmits output torque of the motor which is input to the reaction force output shaft to an operation pedal. A torque limiting mechanism, which limits the transmission of torque that is equal to or greater than a specified value between the reaction force output shaft and the interlocking arm, is interposed between the reaction force output shaft and the interlocking arm.

Abstract: A latch release device for a vehicle door is provided which includes an electric actuator that can exert power for latch release for releasing a latched state of a door, a latch mechanism that releases the latched state of the door in response to actuation of the electric actuator or input of a mechanical latch release operating force, and an operating member for latch release that enables normal operation by a vehicle user so as to actuate the electric actuator and emergency operation by a vehicle user so as to input a mechanical latch release operating force into the latch mechanism, wherein the emergency operation of an operating member for latch release is restricted and emergency operation restriction means restricts emergency operation of the operating member for latch release when an operating member for restriction release that a vehicle user can operate is in a non-operated state.

Abstract: This power transmission device includes a motor, a worm connected to a rotating shaft of the motor, and a worm wheel engaged with the worm and disposed at an operation pedal side with respect to the worm, wherein a biasing member which biases the motor in a direction in which the worm and the worm wheel come in contact with each other when the motor is driven is disposed between the motor and a housing.

Abstract: The reaction force output device includes a drive source configured to output power to an operation portion in a direction opposite to an operating direction thereof; and a clutch mechanism interposed between the operation portion and the drive source and configured to connect and disconnect transmission of the power to the operation portion, wherein the clutch mechanism includes a first rotating body connected to the drive source side and to which the power of the drive source is transmitted, a second rotating body connected to the operation portion side, disposed coaxially with the first rotating body and configured to be relatively rotatable with respect to the first rotating body, a clutch lever rotatably supported by the first rotating body, and a plurality of engagement portions disposed at the second rotating body in a circumferential direction thereof and engaged with the clutch lever.

Abstract: A reaction force output device includes a driving part configured to transmit a driving force of a motor to a driving member through a gear mechanism to drive the driving member, thereby outputting a force in a direction opposite to an operating direction of an operation element to the operation element operated by a driver; and a controller configured to determine a control amount applied to the driving part based on an input value supplied from an outside, wherein the controller gradually increases the control amount, maintains the control amount at a constant value and then increases the control amount stepwise when increasing the control amount according to the input value.

Abstract: A door lock device for a vehicle is provided in which a lock release member that is operable between an operating position at which the ratchet is operated toward the side on which the ratchet engages with the latch and a standby position at which free pivoting of the ratchet is allowed and that is urged toward the standby position is driven to the operating position by a drive member which engages with the lock release member when an actuator is operated, the door lock device being capable of releasing a locked state of a door by operation of the actuator and also being capable of releasing the locked state of the door by a manual operation, wherein an engagement release mechanism (96) releases engagement of a drive member (67) and a lock release member (66) in response to a manual operation for releasing the locked state of the door being carried out while the drive member (67) is engaged with the lock release member (66).

Abstract: A vehicle door latch release device is provided in which a latch device enabling latch release in response to operation of an electric actuator and mechanical input of a latch release operating force is provided on a door, and input of a mechanical latch release operating force into the latch device is enabled in an emergency in which latch release by the electric actuator is disabled, wherein a human power acting on the emergency operating member, which can be operated by a vehicle user, can be transmitted as a mechanical latch release operating force to the latch device via operating force transmission means, and restriction/permission switching means can switch between an operation restricted state in which operation of the emergency operating member is restricted and an operation permitted state in which operation of the emergency operating member is enabled in response to a predetermined operation by a vehicle user.

Abstract: A vehicle door open/close operation apparatus is provided in which a design cover can be opened by a manual operation and can close at least part of an opening provided in a door, and a latch release is operated by a latch device due to the operation of an operating member in a state in which the design cover is open, wherein displacement of the design cover from a closed position toward an open position is detected by a detection switch, and a control unit carries out the user authentication in response to detection of displacement of the design cover by the detection switch. This enables the necessity for carrying out an operation of the operating member again to be avoided even if the operating member is operated quickly, thus enabling the door to be opened smoothly.

Abstract: A reaction force output device that outputs a reaction force to an operation unit includes: a motor as a drive source configured to create the reaction force; a reaction force transmission unit configured to transmit the reaction force to the operation unit; and a clutch mechanism disposed between the motor and the reaction force transmission unit and configured to set the motor and the reaction force transmission unit to a disengaged state or an engaged state depending on a driving state of the motor.

Abstract: A reaction force output device is provided with: a drive unit that drives a drive member to output a force in a direction opposite to an operating direction to an operated element operated by an operator; and a control unit that determines whether or not a space is formed between the operated element and the drive member, and if it is determined that the space is formed, controls the drive unit to output a greater driving force than when it is determined that the space is not formed.

Abstract: A reaction force output device includes: a motor that is a drive source that creates a reaction force; a reaction force output shaft that interlocks with an output shaft of the motor to rotate; and an interlocking arm that transmits output torque of the motor which is input to the reaction force output shaft to an operation pedal. A torque limiting mechanism, which limits the transmission of torque that is equal to or greater than a specified value between the reaction force output shaft and the interlocking arm, is interposed between the reaction force output shaft and the interlocking arm.