Patents by Inventor Hiroyuki Matsuyoshi

Hiroyuki Matsuyoshi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate processing apparatus and substrate processing method
    Patent number: 10529608
    Abstract: Disclosed is a substrate processing apparatus including: a substrate holding unit configured to hold a substrate; a processing container configured to accommodate the substrate holding unit; a cover unit configured to load the substrate holding unit therein and to open or close an opening provided in one end of the processing container; a seal member configured to seal a gap between the end of the processing container and the cover unit; a driving mechanism configured to move the cover unit; and a controller configured to control an operation of the driving mechanism. The controller controls the operation of the driving mechanism such that the cover unit performs an intermittent operation of alternately repeating moving and stopping when opening the opening in the processing container.
    Type: Grant
    Filed: February 23, 2017
    Date of Patent: January 7, 2020
    Assignee: Tokyo Electron Limited
    Inventors: Moriyoshi Kinoshita, Hiroshi Kumada, Hiroyuki Matsuyoshi
  • SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
    Publication number: 20170256430
    Abstract: Disclosed is a substrate processing apparatus including: a substrate holding unit configured to hold a substrate; a processing container configured to accommodate the substrate holding unit; a cover unit configured to load the substrate holding unit therein and to open or close an opening provided in one end of the processing container; a seal member configured to seal a gap between the end of the processing container and the cover unit; a driving mechanism configured to move the cover unit; and a controller configured to control an operation of the driving mechanism. The controller controls the operation of the driving mechanism such that the cover unit performs an intermittent operation of alternately repeating moving and stopping when opening the opening in the processing container.
    Type: Application
    Filed: February 23, 2017
    Publication date: September 7, 2017
    Inventors: Moriyoshi Kinoshita, Hiroshi Kumada, Hiroyuki Matsuyoshi