Abstract: A low dielectric resin composition comprising the following components (a) and (b), and the dielectric constant of a coating film formed by this composition being at most 3:(a) a resin having functional groups in its molecule and being soluble in a solvent; and(b) a partially hydrolyzed condensate of alkoxysilanes of the formula R.sup.1.sub.m R.sup.2.sub.n Si(OR.sup.3).sub.4-m-n, wherein each of R.sup.1 and R.sup.2 which may be the same or different, is a non-hydrolyzable group, R.sup.3 is an alkyl group, and m and n are integers of from 0 to 3 satisfying 0.ltoreq.m+n.ltoreq.3.

Abstract: A coating fluid for forming an oxide coating, having a good thermal stability and superior coating-forming properties is provided, which fluid comprises a reaction product obtained by subjecting (A) an alkoxysilane or aryloxysilane expressed by the formula RmSi(OR).sub.4-m wherein R is 1-4C alkyl or aryl and m is 0 to 2 and (B) a metal alkoxide or aryloxide compound expressed by the formula M(OR').sub.n wherein M is Mg, B, P, Zr, Y, Ti or Ba, R' is 1-4C alkyl or aryl and n is a valence of the metal atom to hydrolysis and condensation using a catalyst in the presence of a solvent.