Patents by Inventor Hiroyuki Nishiuchi

Hiroyuki Nishiuchi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for supplying and discharging gas to and from semiconductor manufacturing equipment and system for executing the same
    Patent number: 5277215
    Abstract: A plurality of airtight chambers are connected through blocking means, which can communicate or shut off the chambers, and at least one of the airtight chambers is used as a processing chamber. One of the adjacent airtight chambers is replaced by a replacement gas, and the replacement gas is supplied to the other of the adjacent airtight chambers. When pressure difference or pressure in the two adjacent airtight chambers is below a predetermined value, the adjacent two airtight chambers are communicated, and pressure in the two airtight chambers is equalized.
    Type: Grant
    Filed: January 21, 1993
    Date of Patent: January 11, 1994
    Assignee: Kokusai Electric Co., Ltd.
    Inventors: Hidehiro Yanagawa, Hiroyuki Nishiuchi, Masakazu Shimada, Mitsuhiro Hirano, Tomoshi Taniyama, Kazumi Nikaido, Yoshikazu Hisajima, Michio Sato