Patents by Inventor Hiroyuki Ohde

Hiroyuki Ohde has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9676944
    Abstract: Methods of increasing the solubility of a base in supercritical carbon dioxide include forming a complex of a Lewis acid and the base, and dissolving the complex in supercritical carbon dioxide. The Lewis acid is soluble in supercritical carbon dioxide, and the base is substantially insoluble in supercritical carbon dioxide. Methods for increasing the solubility of water in supercritical carbon dioxide include dissolving an acid or a base in supercritical carbon dioxide to form a solution and dissolving water in the solution. The acid or the base is formulated to interact with water to solubilize the water in the supercritical carbon dioxide. Some compositions include supercritical carbon dioxide, a hydrolysable metallic compound, and at least one of an acid and a base. Some compositions include an alkoxide and at least one of an acid and a base.
    Type: Grant
    Filed: December 16, 2014
    Date of Patent: June 13, 2017
    Assignees: Micron Technology, Inc., Idaho Research Foundation
    Inventors: Chien M. Wai, Hiroyuki Ohde, Stephen J. Kramer
  • Publication number: 20150096468
    Abstract: Methods of increasing the solubility of a base in supercritical carbon dioxide include forming a complex of a Lewis acid and the base, and dissolving the complex in supercritical carbon dioxide. The Lewis acid is soluble in supercritical carbon dioxide, and the base is substantially insoluble in supercritical carbon dioxide. Methods for increasing the solubility of water in supercritical carbon dioxide include dissolving an acid or a base in supercritical carbon dioxide to form a solution and dissolving water in the solution. The acid or the base is formulated to interact with water to solubilize the water in the supercritical carbon dioxide. Some compositions include supercritical carbon dioxide, a hydrolysable metallic compound, and at least one of an acid and a base. Some compositions include an alkoxide and at least one of an acid and a base.
    Type: Application
    Filed: December 16, 2014
    Publication date: April 9, 2015
    Inventors: Chien M. Wai, Hiroyuki Ohde, Stephen J. Kramer
  • Patent number: 8912238
    Abstract: Methods of increasing the solubility of a base in supercritical carbon dioxide include forming a complex of a Lewis acid and the base, and dissolving the complex in supercritical carbon dioxide. The Lewis acid is soluble in supercritical carbon dioxide, and the base is substantially insoluble in supercritical carbon dioxide. Methods for increasing the solubility of water in supercritical carbon dioxide include dissolving an acid or a base in supercritical carbon dioxide to form a solution and dissolving water in the solution. The acid or the base is formulated to interact with water to solubilize the water in the supercritical carbon dioxide. Some compositions include supercritical carbon dioxide, a hydrolysable metallic compound, and at least one of an acid and a base. Some compositions include an alkoxide and at least one of an acid and a base.
    Type: Grant
    Filed: July 9, 2012
    Date of Patent: December 16, 2014
    Assignee: Micron Technology, Inc.
    Inventors: Chien M. Wai, Hiroyuki Ohde, Stephen J. Kramer
  • Publication number: 20120291666
    Abstract: Methods of increasing the solubility of a base in supercritical carbon dioxide include forming a complex of a Lewis acid and the base, and dissolving the complex in supercritical carbon dioxide. The Lewis acid is soluble in supercritical carbon dioxide, and the base is substantially insoluble in supercritical carbon dioxide. Methods for increasing the solubility of water in supercritical carbon dioxide include dissolving an acid or a base in supercritical carbon dioxide to form a solution and dissolving water in the solution. The acid or the base is formulated to interact with water to solubilize the water in the supercritical carbon dioxide. Some compositions include supercritical carbon dioxide, a hydrolysable metallic compound, and at least one of an acid and a base. Some compositions include an alkoxide and at least one of an acid and a base.
    Type: Application
    Filed: July 9, 2012
    Publication date: November 22, 2012
    Applicants: IDAHO RESEARCH FOUNDATION, MICRON TECHNOLOGY, INC.
    Inventors: Chien M. Wai, Hiroyuki Ohde, Stephen J. Kramer
  • Patent number: 8241708
    Abstract: Metal and/or silicon oxides are produced by hydrolysis of alkoxide precursors in the presence of either an acid catalyst or a base catalyst in a supercritical fluid solution. The solubility of the acid catalysts in the supercritical fluid can be increased by complexing the catalyst with a Lewis base that is soluble in the supercritical fluid. The solubility of the base catalysts in the supercritical fluid can be increased by complexing the catalyst with a Lewis acid that is soluble in the supercritical fluid. The solubility of water in the solution is increased by the interaction with the acid or base catalyst.
    Type: Grant
    Filed: March 9, 2005
    Date of Patent: August 14, 2012
    Assignees: Micron Technology, Inc., Idaho Research Foundation
    Inventors: Chien M. Wai, Hiroyuki Ohde, Stephen J. Kramer
  • Patent number: 7897517
    Abstract: A method for depositing one or more materials on a substrate, such as for example, a semiconductor substrate that includes providing the substrate; applying a polymer film to at least a portion of a surface of the substrate; and exposing the semiconductor substrate to a supercritical fluid containing at least one reactant for a time sufficient for the supercritical fluid to swell the polymer and for the at least one reactant to penetrate the polymer film. The reactant is reacted to cause the deposition of the material on at least a portion of the substrate. The substrate is removed from the supercritical fluid, and the polymer film is removed. The process permits the precise deposition of materials without the need for removal of excess material using chemical, physical, or a combination of chemical and physical removal techniques.
    Type: Grant
    Filed: July 31, 2009
    Date of Patent: March 1, 2011
    Assignee: Micron Technology, Inc.
    Inventors: Chien M. Wai, Hiroyuki Ohde, Steve Kramer
  • Publication number: 20090291556
    Abstract: A method for depositing one or more materials on a substrate, such as for example, a semiconductor substrate that includes providing the substrate; applying a polymer film to at least a portion of a surface of the substrate; and exposing the semiconductor substrate to a supercritical fluid containing at least one reactant for a time sufficient for the supercritical fluid to swell the polymer and for the at least one reactant to penetrate the polymer film. The reactant is reacted to cause the deposition of the material on at least a portion of the substrate. The substrate is removed from the supercritical fluid, and the polymer film is removed. The process permits the precise deposition of materials without the need for removal of excess material using chemical, physical, or a combination of chemical and physical removal techniques.
    Type: Application
    Filed: July 31, 2009
    Publication date: November 26, 2009
    Applicant: MICRON TECHNOLOGY, INC.
    Inventors: Chien M. Wai, Hiroyuki Ohde, Steve Kramer
  • Patent number: 7582561
    Abstract: A method for depositing one or more materials on a substrate, such as for example, a semiconductor substrate that includes providing the substrate; applying a polymer film to at least a portion of a surface of the substrate; and exposing the semiconductor substrate to a supercritical fluid containing at least one reactant for a time sufficient for the supercritical fluid to swell the polymer and for the at least one reactant to penetrate the polymer film. The reactant is reacted to cause the deposition of the material on at least a portion of the substrate. The substrate is removed from the supercritical fluid, and the polymer film is removed. The process permits the precise deposition of materials without the need for removal of excess material using chemical, physical, or a combination of chemical and physical removal techniques.
    Type: Grant
    Filed: September 1, 2005
    Date of Patent: September 1, 2009
    Assignees: Micron Technology, Inc., Idaho Research Foundation, Inc.
    Inventors: Chien M. Wai, Hiroyuki Ohde, Steve Kramer
  • Patent number: 7423345
    Abstract: The invention includes a method of forming a metal-containing film over a surface of a semiconductor substrate. The surface is exposed to a supercritical fluid. The supercritical fluid has H2, at least one H2-activating catalyst, and at least one metal-containing precursor dispersed therein. A metal-containing film is formed across the surface of the semiconductor substrate from metal of the at least one metal-containing precursor. The invention also includes semiconductor constructions having metal-containing layers which include one or more of copper, cobalt, gold and nickel in combination with one or more of palladium, platinum, iridium, rhodium and ruthenium.
    Type: Grant
    Filed: October 25, 2002
    Date of Patent: September 9, 2008
    Assignee: Micron Technology, Inc.
    Inventors: Chien M. Wai, Hiroyuki Ohde, Steve Kramer
  • Patent number: 7400043
    Abstract: The invention includes a method of forming a metal-containing film over a surface of a semiconductor substrate. The surface is exposed to a supercritical fluid. The supercritical fluid has H2, at least one H2-activating catalyst, and at least one metal-containing precursor dispersed therein. A metal-containing film is formed across the surface of the semiconductor substrate from metal of the at least one metal-containing precursor. The invention also includes semiconductor constructions having metal-containing layers which include one or more of copper, cobalt, gold and nickel in combination with one or more of palladium, platinum, iridium, rhodium and ruthenium.
    Type: Grant
    Filed: March 16, 2006
    Date of Patent: July 15, 2008
    Assignee: Micron Technology, Inc.
    Inventors: Chien M. Wai, Hiroyuki Ohde, Steve Kramer
  • Publication number: 20080136028
    Abstract: The invention includes a method of forming a metal-containing film over a surface of a semiconductor substrate. The surface is exposed to a supercritical fluid. The supercritical fluid has H2, at least one H2-activating catalyst, and at least one metal-containing precursor dispersed therein. A metal-containing film is formed across the surface of the semiconductor substrate from metal of the at least one metal-containing precursor. The invention also includes semiconductor constructions having metal-containing layers which include one or more of copper, cobalt, gold and nickel in combination with one or more of palladium, platinum, iridium, rhodium and ruthenium.
    Type: Application
    Filed: October 25, 2002
    Publication date: June 12, 2008
    Inventors: Chien M. Wai, Hiroyuki Ohde, Steve Kramer
  • Patent number: 7341947
    Abstract: The invention includes a method of forming a metal-containing film over a surface of a semiconductor substrate. The surface is exposed to a supercritical fluid. The supercritical fluid has H2, at least one H2-activating catalyst, and at least one metal-containing precursor dispersed therein. A metal-containing film is formed across the surface of the semiconductor substrate from metal of the at least one metal-containing precursor. The invention also includes semiconductor constructions having metal-containing layers which include one or more of copper, cobalt, gold and nickel in combination with one or more of palladium, platinum, iridium, rhodium and ruthenium.
    Type: Grant
    Filed: May 25, 2004
    Date of Patent: March 11, 2008
    Assignee: Micron Technology, Inc.
    Inventors: Chien M. Wai, Hiroyuki Ohde, Steve Kramer
  • Publication number: 20070190781
    Abstract: The invention includes a method of forming a metal-containing film over a surface of a semiconductor substrate. The surface is exposed to a supercritical fluid. The supercritical fluid has H2, at least one H2-activating catalyst, and at least one metal-containing precursor dispersed therein. A metal-containing film is formed across the surface of the semiconductor substrate from metal of the at least one metal-containing precursor. The invention also includes semiconductor constructions having metal-containing layers which include one or more of copper, cobalt, gold and nickel in combination with one or more of palladium, platinum, iridium, rhodium and ruthenium.
    Type: Application
    Filed: May 25, 2004
    Publication date: August 16, 2007
    Inventors: Chien Wai, Hiroyuki Ohde, Steve Kramer
  • Publication number: 20070049019
    Abstract: A method for depositing one or more materials on a substrate, such as for example, a semiconductor substrate that includes providing the substrate; applying a polymer film to at least a portion of a surface of the substrate; and exposing the semiconductor substrate to a supercritical fluid containing at least one reactant for a time sufficient for the supercritical fluid to swell the polymer and for the at least one reactant to penetrate the polymer film. The reactant is reacted to cause the deposition of the material on at least a portion of the substrate. The substrate is removed from the supercritical fluid, and the polymer film is removed. The process permits the precise deposition of materials without the need for removal of excess material using chemical, physical, or a combination of chemical and physical removal techniques.
    Type: Application
    Filed: September 1, 2005
    Publication date: March 1, 2007
    Inventors: Chien Wai, Hiroyuki Ohde, Steve Kramer
  • Publication number: 20060204651
    Abstract: Metal and/or silicon oxides are produced by hydrolysis of alkoxide precursors in the presence of either an acid catalyst or a base catalyst in a supercritical fluid solution. The solubility of the acid catalysts in the supercritical fluid can be increased by complexing the catalyst with a Lewis base that is soluble in the supercritical fluid. The solubility of the base catalysts in the supercritical fluid can be increased by complexing the catalyst with a Lewis acid that is soluble in the supercritical fluid. The solubility of water in the solution is increased by the interaction with the acid or base catalyst.
    Type: Application
    Filed: March 9, 2005
    Publication date: September 14, 2006
    Inventors: Chien Wai, Hiroyuki Ohde, Stephen Kramer
  • Publication number: 20060160367
    Abstract: The invention includes methods of treating semiconductor substrates with one or more reactants dispersed in supercritical fluid. A substrate can be provided within a reaction chamber having an interior periphery. The interior periphery can include a bottom region, a top region, and one or more sidewall regions between the bottom and top regions. The reaction chamber can be oriented in a gravitational field such that the field pulls from the top region toward the bottom region. The semiconductor substrate can be attached to one of the regions of the interior periphery other than the bottom region, and thereafter treated within the reaction chamber by exposing the semiconductor substrate to one or more reactants dispersed within a supercritical fluid.
    Type: Application
    Filed: January 19, 2005
    Publication date: July 20, 2006
    Inventors: Chien Wai, Hiroyuki Ohde, Stephen Kramer
  • Publication number: 20060157860
    Abstract: The invention includes a method of forming a metal-containing film over a surface of a semiconductor substrate. The surface is exposed to a supercritical fluid. The supercritical fluid has H2, at least one H2-activating catalyst, and at least one metal-containing precursor dispersed therein. A metal-containing film is formed across the surface of the semiconductor substrate from metal of the at least one metal-containing precursor. The invention also includes semiconductor constructions having metal-containing layers which include one or more of copper, cobalt, gold and nickel in combination with one or more of palladium, platinum, iridium, rhodium and ruthenium.
    Type: Application
    Filed: March 16, 2006
    Publication date: July 20, 2006
    Inventors: Chien Wai, Hiroyuki Ohde, Steve Kramer
  • Patent number: 6653236
    Abstract: The invention includes a method of forming a metal-containing film over a surface of a semiconductor substrate. The surface is exposed to a supercritical fluid. The supercritical fluid has H2, at least one H2-activating catalyst, and at least one metal-containing precursor dispersed therein. A metal-containing film is formed across the surface of the semiconductor substrate from metal of the at least one metal-containing precursor. The invention also includes semiconductor constructions having metal-containing layers which include one or more of copper, cobalt, gold and nickel in combination with one or more of palladium, platinum, iridium, rhodium and ruthenium.
    Type: Grant
    Filed: March 29, 2002
    Date of Patent: November 25, 2003
    Assignee: Micron Technology, Inc.
    Inventors: Chien M. Wai, Hiroyuki Ohde, Steve Kramer
  • Publication number: 20030183938
    Abstract: The invention includes a method of forming a metal-containing film over a surface of a semiconductor substrate. The surface is exposed to a supercritical fluid. The supercritical fluid has H2, at least one H2-activating catalyst, and at least one metal-containing precursor dispersed therein. A metal-containing film is formed across the surface of the semiconductor substrate from metal of the at least one metal-containing precursor. The invention also includes semiconductor constructions having metal-containing layers which include one or more of copper, cobalt, gold and nickel in combination with one or more of palladium, platinum, iridium, rhodium and ruthenium.
    Type: Application
    Filed: March 29, 2002
    Publication date: October 2, 2003
    Inventors: Chien M. Wai, Hiroyuki Ohde, Steve Kramer
  • Patent number: 5629939
    Abstract: A time slot rearranging apparatus provided in a multiplexer in which a plurality of subscriber multiple signals transmitted through a subscriber line are converted into a primary rate multiple signal having a predetermined format. The time slot rearranging apparatus includes a format detecting circuit for detecting a type of format of the primary rate multiple signal, and an rearranging circuit for rearranging time slots of channels included in the plurality of subscriber multiple signals in accordance with the type of format detected by the format detecting circuit so that the primary rate multiple signal having the detected type of format is obtained.
    Type: Grant
    Filed: July 14, 1994
    Date of Patent: May 13, 1997
    Assignee: Fujitsu Limited
    Inventors: Hiroyuki Ohde, Noriyuki Kutsuwada