Abstract: The flow rate control device 10 includes a control valve 11, a restriction part 12 provided downstream of the control valve 11, an upstream pressure sensor 13 for measuring a pressure P1 between the control valve 11 and the restriction part 12, a differential pressure sensor 20 for measuring a differential pressure ?P between the upstream and the downstream of the restriction part 12, and an arithmetic control circuit 16 connected to the control valve 11, the upstream pressure sensor 13, and the differential pressure sensor 20.

Abstract: The flow rate control device 10 includes a control valve 11, a restriction part 12 provided downstream of the control valve 11, an upstream pressure sensor 13 for measuring a pressure P1 between the control valve 11 and the restriction part 12, a differential pressure sensor 20 for measuring a differential pressure ?P between the upstream and the downstream of the restriction part 12, and an arithmetic control circuit 16 connected to the control valve 11, the upstream pressure sensor 13, and the differential pressure sensor 20.

Abstract: A pulse tube refrigerator that is small in size and free from vibration and electric noise. A pulse tube refrigerator (1) has a pulse tube, a cool storage unit connected to the low-temperature side of the pulse tube, a vibration generator connected to the high-temperature side of the cool storage unit, and a reservoir with an orifice, connected to the high-temperature side of the pulse tube. The vibration generator is a thermally driven pressure wave generator having thermal drive tubes (heat exchangers (4-4a) for heat radiation), a phase shifter (7), and a return path (6). Sufficiently heating a heat exchanger (3) for heating causes self-exciting vibration to be generated in a work transmission tube (5), and work is returned to the thermal drive tubes through the phase shifter (7) and the return path (6) arranged on the work output side of the work transmission tube (5).

Abstract: In the pressure oscillation generator 1, self-excited vibration is generated in a work transfer tube 30 by heating a heat input section 22 and also a resonator 50 is resonated, and when a work is inputted into a heat exchanger 20, the work is amplified by the heat exchanger 20, and is transferred to the heat transfer tube 30 and is then outputted to an output section 40. Because of the configuration, an outputted work can be amplified to a work larger than the inputted work, so that, by using a portion of the outputted work as energy for driving the cylinder 10, the pressure oscillation generator 1 can continuously be driven only by heating and without using electric energy generated by a large scale solar system or the like, which enables substantial size reduction of the pressure oscillation generator 1.

Abstract: In the pressure oscillation generator 1, self-excited vibration is generated in a work transfer tube 30 by heating a heat input section 22 and also a resonator 50 is resonated, and when a work is inputted into a heat exchanger 20, the work is amplified by the heat exchanger 20, and is transferred to the heat transfer tube 30 and is then outputted to an output section 40. Because of the configuration, an outputted work can be amplified to a work larger than the inputted work, so that, by using a portion of the outputted work as energy for driving the cylinder 10, the pressure oscillation generator 1 can continuously be driven only by heating and without using electric energy generated by a large scale solar system or the like, which enables substantial size reduction of the pressure oscillation generator 1.