Abstract: A substrate processing apparatus includes a first transfer path that is a transfer path for a substrate after MOR film formation and before exposure, and a second transfer path that is a transfer path for the substrate after exposure; and one or a plurality of nitrogen atmosphere placement stages provided on at least one of the first transfer path and the second transfer path and configured to place the substrate in an environment with a nitrogen concentration of an atmosphere set higher than that of air.

Abstract: A primer composition may include an olefin-based resin (A), and a flaky pigment (B), and satisfy: (1) the primer composition contains a water-immiscible organic solvent, the pigment (B) has an average particle size of?25 ?m and is present in 17+wt. %, based on total primer composition solids; (2) the primer composition contains a water-immiscible organic solvent, the pigment (B) has an average particle size of<25 ?m is present in 42+wt. %, based on total primer composition solids, or (3): the primer composition contains water, the resin (A) is a water-based resin, and a pigment (B) content is 50 wt. % or higher based on total primer composition solids. Such a primer composition can be used in a primer coating film, a layered antifouling coating film, a method for producing a primer coated substrate, or a method for producing a layered antifouling coated substrate.

Abstract: A booster system includes: a cooling temperature regulating unit configured to regulate a temperature of an intermediate supercritical pressure liquid cooled and generated by a main cooling unit on upstream of a pump unit according to a flow rate of a supplied cooling medium; and a pressure detection unit configured to detect inlet pressure of the intermediate supercritical pressure liquid on an inlet side of the pump unit and detect outlet pressure of a target supercritical fluid on an outlet side of the pump unit. The cooling temperature regulating unit controls the flow rate of the cooling medium based on a pressure difference between the inlet pressure and the outlet pressure or a pressure ratio between the inlet pressure and the outlet pressure.

Abstract: A booster system includes: a cooling temperature regulating unit configured to regulate a temperature of an intermediate supercritical pressure liquid cooled and generated by a main cooling unit on upstream of a pump unit according to a flow rate of a supplied cooling medium; and a pressure detection unit configured to detect inlet pressure of the intermediate supercritical pressure liquid on an inlet side of the pump unit and detect outlet pressure of a target supercritical fluid on an outlet side of the pump unit. The cooling temperature regulating unit controls the flow rate of the cooling medium based on a pressure difference between the inlet pressure and the outlet pressure or a pressure ratio between the inlet pressure and the outlet pressure.

Abstract: The hydroxyalkyl acrylate according to the present invention is characterized in that a content amount of an ester generated from acrylic acid dimer and an alkylene oxide is not more than 0.10 mass %. The method for producing a hydroxyalkyl acrylate according to the present invention is characterized in comprising the step of reacting acrylic acid with an alkylene oxide in the presence of a catalyst, wherein a content amount of acrylic acid dimer in the raw material acrylic acid is not more than 3.00 mass %.

Abstract: Disclosed is a gradient information acquisition method comprising: a speed measured value acquisition step in which a measured value of the speed of a rail vehicle is acquired; a speed calculation step in which a calculated value of the speed of said vehicle is found using an equation of movement including a parameter indicating the gradient of the path of travel of said rail vehicle; a parameter value acquisition step in which a parameter value is found of a function indicating said gradient, for which parameter the difference of said measured value of the speed and said calculated value of the speed is a minimum; and a gradient information acquisition step of finding the gradient of said path of travel, based on the parameter value of the function indicating said gradient that was acquired in said parameter value acquisition step.

Abstract: The present invention provides an N-phenylmaleimide compound that can improve the quality of the obtained copolymer by using N-phenylmaleimide containing impurities in specific amounts or less as at least one component of the copolymerization monomers. The N-phenylmaleimide compound of the present invention contains 0.1% by weight or less of N-(2,5-dioxo-1-phenyl-3-pyrrolidinyl)-N-phenylmaleamic acid (PPMA) and/or 0.3% by weight or less of N-phenylfumaramic acid (PFA).

Abstract: The hydroxyalkyl acrylate according to the present invention is characterized in that a content amount of an ester generated from acrylic acid dimer and an alkylene oxide is not more than 0.10 mass %. The method for producing a hydroxyalkyl acrylate according to the present invention is characterized in comprising the step of reacting acrylic acid with an alkylene oxide in the presence of a catalyst, wherein a content amount of acrylic acid dimer in the raw material acrylic acid is not more than 3.00 mass %.

Abstract: The objective of the present invention is to provide a highly stable hydroxyalkyl(meth)acrylate. The hydroxyalkyl(meth)acrylate according to the present invention is characterized in that a contained amount of dialkylene glycol is not more than 0.05 mass %.

Abstract: Disclosed is a gradient information acquisition method comprising: a speed measured value acquisition step in which a measured value of the speed of a rail vehicle is acquired; a speed calculation step in which a calculated value of the speed of said vehicle is found using an equation of movement including a parameter indicating the gradient of the path of travel of said rail vehicle; a parameter value acquisition step in which a parameter value is found of a function indicating said gradient, for which parameter the difference of said measured value of the speed and said calculated value of the speed is a minimum; and a gradient information acquisition step of finding the gradient of said path of travel, based on the parameter value of the function indicating said gradient that was acquired in said parameter value acquisition step.

Abstract: The present invention provides an N-phenylmaleimide compound that can improve the quality of the obtained copolymer by using N-phenylmaleimide containing impurities in specific amounts or less as at least one component of the copolymerization monomers. The N-phenylmaleimide compound of the present invention contains 0.1% by weight or less of N-(2,5-dioxo-1-phenyl-3-pyrrolidinyl)-N-phenylmaleamic acid (PPMA) and/or 0.3% by weight or less of N-phenylfumaramic acid (PFA).

Abstract: Processes for producing a hydroxyalkyl(meth)acrylate which comprise reacting (meth)acrylic acid with an alkylene oxide in the presence of a catalyst. A first process is characterized in that the amount of the acid ingredient is kept, on calculation, at 0.010 or more in terms of molar ratio to the catalyst present in the liquid reaction mixture and that the liquid reaction mixture from which the hydroxyalkyl(meth)acrylate has been distilled off is used in the subsequent reaction. A second process is characterized in that a dialkylene glycol mono(meth)acylate is supplied to the reaction system to cause the dialkyleneglycol mono(meth)acylate to coexist in the liquid reaction mixture.

Abstract: Processes for producing a hydroxyalkyl(meth)acrylate which comprise reacting (meth)acrylic acid with an alkylene oxide in the presence of a catalyst. A first process is characterized in that the amount of the acid ingredient is kept, on calculation, at 0.010 or more in terms of molar ratio to the catalyst present in the liquid reaction mixture and that the liquid reaction mixture from which the hydroxyalkyl(meth)acrylate has been distilled off is used in the subsequent reaction. A second process is characterized in that a dialkylene glycol mono(meth)acylate is supplied to the reaction system to cause the dialkyleneglycol mono(meth)acylate to coexist in the liquid reaction mixture.

Abstract: The present invention provides: a high-quality hydroxyalkyl (meth)acrylate of which the alkylene glycol di(meth)acrylate content and the acid component content are both low; and its novel production process. The hydroxyalkyl (meth)acrylate, which has a content, in terms of an alkylene glycol di(meth)acrylate as an impurity, of not more than 0.1 weight % and an acid component content of not more than 0.1 weight %, is obtained by a process comprising the step of carrying out a batch reaction between (meth)acrylic acid and an alkylene oxide in the presence of a catalyst in order to produce the hydroxyalkyl (meth)acrylate; with the process making an adjustment as to charging of both raw materials in such a manner that, for, of a time as needed for supplying both raw materials, a supplying time of not less than 40% of a total supplying time when the raw materials as supplied have a temperature of not lower than 40° C.

Abstract: There is disclosed a novel production process for a hydroxyalkyl (meth)acrylate in which: the diffusion of harmful substances due to disposal of catalysts can be reduced; and also the amount of the catalyst as used can be greatly saved in the entire production process. This production process comprises the step of carrying out a reaction between (meth)acrylic acid and an alkylene oxide in the presence of a catalyst in order to produce the hydroxyalkyl (meth)acrylate; with the production process being characterized by further comprising the step of recovering the catalyst as has been used for the reaction.

Abstract: There is disclosed a novel production process for a hydroxyalkyl (meth)acrylate in which: the diffusion of harmful substances due to disposal of catalysts can be reduced; and also the amount of the catalyst as used can be greatly saved in the entire production process. This production process comprises the step of carrying out a reaction between (meth)acrylic acid and an alkylene oxide in the presence of a catalyst in order to produce the hydroxyalkyl (meth)acrylate; with the production process being characterized by further comprising the step of recovering the catalyst as has been used for the reaction.

Abstract: The present invention provides: a high-quality hydroxyalkyl (meth)acrylate of which the alkylene glycol di(meth)acrylate content and the acid component content are both low; and its novel production process. The hydroxyalkyl (meth)acrylate, which has a content, in terms of an alkylene glycol di(meth)acrylate as an impurity, of not more than 0.1 weight % and an acid component content of not more than 0.1 weight %, is obtained by a process comprising the step of carrying out a batch reaction between (meth)acrylic acid and an alkylene oxide in the presence of a catalyst in order to produce the hydroxyalkyl (meth)acrylate; with the process making an adjustment as to charging of both raw materials in such a manner that, for, of a time as needed for supplying both raw materials, a supplying time of not less than 40% of a total supplying time when the raw materials as supplied have a temperature of not lower than 40° C.