Abstract: A substrate processing apparatus includes: a substrate processing part including a load port configured to place thereon a substrate accommodating vessel in which at least one substrate is accommodated, and configured to take out the at least one substrate from the substrate accommodating vessel and to perform a series of processes on the at least one substrate; and a controller configured to control an opening and closing of a lid of the substrate accommodating vessel, wherein the controller performs control to open the lid after the substrate accommodating vessel is placed on the load port, and the controller performs control to close the lid when an abnormality occurs in the substrate processing part and when none of the at least one substrate removed from the substrate accommodating vessel can be recovered to the substrate accommodating vessel after a predetermined period of time from the occurrence of the abnormality.

Abstract: A substrate processing apparatus includes: a substrate processing part including a load port configured to place thereon a substrate accommodating vessel in which at least one substrate is accommodated, and configured to take out the at least one substrate from the substrate accommodating vessel and to perform a series of processes on the at least one substrate; and a controller configured to control an opening and closing of a lid of the substrate accommodating vessel, wherein the controller performs control to open the lid after the substrate accommodating vessel is placed on the load port, and the controller performs control to close the lid when an abnormality occurs in the substrate processing part and when none of the at least one substrate removed from the substrate accommodating vessel can be recovered to the substrate accommodating vessel after a predetermined period of time from the occurrence of the abnormality.

Abstract: A device and a method of screening for individual balls are provided. The device for screening for individual balls has a supply device, a slope, and a recovering part jointed to a gas-tight chamber, and has a pressure reducing device for decompressing and maintaining the pressure of the gas-tight chamber lower than 1000 Pa in the gas-tight chamber. The supply device is used for supplying the balls, the slope is used for enabling the balls to roll down, and the recovering part is used for recovering the balls from the slope. Further, the method for screening for individual balls includes supplying the balls from the supply device to the slope, rolling the balls down the slope, screening for the balls according to the speed is difference and/or the direction difference of the balls, and recovering the balls in the recovering part, in the gas-tight chamber with the pressure below 1000 Pa.

Abstract: A mercury-free vehicle discharge bulb is provided. The discharge bulb includes an arc tube a glass shroud extending in a front-rear direction to cylindrically surround the arc tube, a metal band surrounding and holding a rear end portion of the glass shroud, and an insulating plug supporting the glass shroud in a fixed manner via the metal band. A ratio S1/S2 of a first area S1 to a second area S2 is 1 to 3. The first area S1 is a surface area of an outer surface of the glass shroud in a region from a circumference of the glass shroud at a position of a center of the discharge space to a front end edge of the metal band, and the second area S2 is a surface area of a surface of the metal band that touches the glass shroud.

Abstract: A mercury-free vehicle discharge bulb is provided. The discharge bulb includes an arc tube a glass shroud extending in a front-rear direction to cylindrically surround the arc tube, a metal band surrounding and holding a rear end portion of the glass shroud, and an insulating plug supporting the glass shroud in a fixed manner via the metal band. A ratio S1/S2 of a first area S1 to a second area S2 is 1 to 3. The first area S1 is a surface area of an outer surface of the glass shroud in a region from a circumference of the glass shroud at a position of a center of the discharge space to a front end edge of the metal band, and the second area S2 is a surface area of a surface of the metal band that touches the glass shroud.

Abstract: There is provided a mercury-free arc tube for a discharge lamp unit. The mercury-free arc tube includes a plurality of electrodes and a sealed chamber including a metal halide and a starting rare gas enclosed in the sealed chamber. A clearness index value P2·W/? is equal to or greater than about 800, where ? denotes a density (mg/cm3) of the enclosed metal halide, P denotes a pressure (atmospheres) of the enclosed starting rare gas, and W denotes a maximum input power (watts) input to the sealed chamber through the electrodes.

Abstract: A device and a method of screening for individual balls are provided. The device for screening for individual balls has a supply device, a slope, and a recovering part jointed to a gas-tight chamber, and has a pressure reducing device for decompressing and maintaining the pressure of the gas-tight chamber lower than 1000 Pa in the gas-tight chamber. The supply device is used for supplying the balls, the slope is used for enabling the balls to roll down, and the recovering part is used for recovering the balls from the slope. Further, the method for screening for individual balls includes supplying the balls from the supply device to the slope, rolling the balls down the slope, screening for the balls according to the speed is difference and/or the direction difference of the balls, and recovering the balls in the recovering part, in the gas-tight chamber with the pressure below 1000 Pa.

Abstract: There is provided a mercury-free arc tube for a discharge lamp unit. The mercury-free arc tube includes a plurality of electrodes and a sealed chamber including a metal halide and a starting rare gas enclosed in the sealed chamber. A clearness index value P2·W/? is equal to or greater than about 800, where ? denotes a density (mg/cm3) of the enclosed metal halide, P denotes a pressure (atmospheres) of the enclosed starting rare gas, and W denotes a maximum input power (watts) input to the sealed chamber through the electrodes.

Abstract: A discharge bulb is equipped with a discharge light emitting chamber tube in which discharge electrodes are provided face to face and a luminescent material is filled at the center of the ceramic tube in longitudinal direction. A metallic pipe is jointed into the pore of a tube end communicating with the discharge light emitting chamber. The rear end of an electrode rod inserted into the pipe with its tip protruding into the discharge light emitting chamber to constitute an electrode is jointed to the protruding tip of the pipe. A constricted part is arranged in the part between the tube center corresponding to the discharge light emitting chamber of the ceramic tube and the tube end. The thickness of the tube wall of the tube end is augmented to enhance the thermal shock resistance of the tube end.

Abstract: A paraboloidal effective reflecting surface of a reflector is divided into an upper effective reflecting surface for forming a preset pattern of the low beam and a lower effective reflecting surface for forming a preset pattern for supplementing the pattern. First shades for forming clear cutting lines of the low beams is disposed close to an arc tube as a light source. The glare caused by the reflection of light on the upper effective reflecting surface is reduced. The resultant clear cutting lines are sharp. The second shades, which are provided outside the first shades, cut the light beams that pass above the first shades and direct to the partition lines (stepped parts). As a result, no glare is caused by the reflection of light at the partition lines.