Patents by Inventor Hirushi Doi

Hirushi Doi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Plasma treating method
    Patent number: 5656334
    Abstract: The present invention is directed to a plasma treating apparatus, for generating plasma in a dielectric container and for treating the surface of a substrate with the plasma generated, which includes a hot air heating system for heating the dielectric container by blowing hot air to a central location on the outside surface of the dielectric container.The present invention is further directed to a plasma treating method for generating plasma in a dielectric container and for,treating the surface of a substrate with the plasma generated which includes hot air heating for heating the dielectric container by blowing hot air to the outside surface of the dielectric container to a temperature at which a thin film does not deposit on the inside surface of the dielectric container.
    Type: Grant
    Filed: October 8, 1996
    Date of Patent: August 12, 1997
    Assignee: Anelva Corporation
    Inventor: Hirushi Doi