Abstract: An optical foreign matter inspection device includes a rotation stage; a laser light source; a sensor that is a charge accumulation type sensor; a detecting circuit; a light emission timing signal generating circuit configured to generate a light emission timing synchronizing signal synchronized with laser emission; a trigger signal generating circuit configured to receive a first signal (a stage encoder signal) indicating a rotation state of a sample, and generate a trigger signal synchronized with the light emission timing synchronizing signal; a number-of-emitted-pulse calculating circuit configured to receive the light emission timing synchronizing signal and the first signal, and calculate the number of pulses in each period corresponding to a position in a radial direction of the sample; and a processing system configured to measure a state of each position on a surface of the sample by using a detection signal and the number of pulses.

Abstract: A defect inspection apparatus includes an illumination unit configured to irradiate a surface of a sample with a linear illumination spot; a condensing detection unit configured to condense reflected light of the illumination spot and to control a polarization state of the incident light to form an optical image; and a sensor unit configured to output the optical image and including an array-shaped light receiving portion and an antireflection film at a position conjugate with the illumination spot, in which the condensing detection unit includes a polarization control unit configured to increase light incident efficiency to the sensor unit. The normal line of the light receiving surface of the sensor unit is inclined from the optical axis of the condensing detection unit by 10 degrees or more and less than 80 degrees. The light condensing detection unit increases the optical magnification in the lateral direction of the illumination spot.

Abstract: A defect inspection device includes an illumination unit that irradiates a sample with a linear illumination spot; a condensing detection unit that condenses reflected light of the illumination spot from the sample; and a sensor unit that forms an optical image on a light reception surface, and outputs the optical image as an electrical signal. An angle ? formed between an optical axis of the condensing detection unit and a longitudinal direction of the linear illumination spot is 10° or more and less than 80°. The sensor unit is a line sensor provided with an array-like light reception unit at a position conjugate with the illumination spot. An angle ? formed between direction of the line sensor and the optical axis of the condensing detection unit is 10° or more and less than 80°, and has a difference from the angle ? of 5° or more.

Abstract: It is an object of the present invention to reduce noise in a detection circuit for use in a sensor system. According to an aspect of the present invention, provided is a high-sensitivity sensor system which includes an acceleration sensor, a detection circuit system that detects an output of the acceleration sensor, a feedback circuit system including a reference voltage power source that generates a feedback signal to be fed back to the acceleration sensor based on an output of the detection circuit system, and a correction circuit system.

Abstract: A defect inspection apparatus includes a light irradiation unit irradiating a sample placed on a table unit with illumination light, a detection optical system forming a scattered light image from the sample and detecting the generated scattered light image through an image sensor, a processing unit receiving a signal from the image sensor of the detection optical system that detects the scattered light image, generating an image of the scattered light, and detecting a defect of the sample by processing the generated image, an output unit outputting the defect image processed by the image processing unit, and a control unit controlling the stable unit, the light irradiation unit, the detection optical system, and the image processing unit. The image processing unit includes an image generation unit that receives the signal and generates the image, a correction unit that corrects lightness discontinuity and a defect detection unit for image processing.

Abstract: A defect inspection apparatus includes a light irradiation unit irradiating a sample placed on a table unit with illumination light, a detection optical system forming a scattered light image from the sample and detecting the generated scattered light image through an image sensor, a processing unit receiving a signal from the image sensor of the detection optical system that detects the scattered light image, generating an image of the scattered light, and detecting a defect of the sample by processing the generated image, an output unit outputting the defect image processed by the image processing unit, and a control unit controlling the stable unit, the light irradiation unit, the detection optical system, and the image processing unit. The image processing unit includes an image generation unit that receives the signal and generates the image, a correction unit that corrects lightness discontinuity and a defect detection unit for image processing.

Abstract: It is an object of the present invention to reduce noise in a detection circuit for use in a sensor system. According to an aspect of the present invention, provided is a high-sensitivity sensor system which includes an acceleration sensor, a detection circuit system that detects an output of the acceleration sensor, a feedback circuit system including a reference voltage power source that generates a feedback signal to be fed back to the acceleration sensor based on an output of the detection circuit system, and a correction circuit system.

Abstract: This weak signal detection system has: a statistical data acquisition unit which measures the average value or distribution of an input signal in which is noise superimposed on a desired signal, calculates parameters such as the amplitude or noise dispersion of the desired signal, and outputs the calculated data obtained thereby; a nonlinear characteristic unit which outputs a signal having a nonlinear response with respect to the magnitude of the voltage or the current of the input signal; a signal detection ratio evaluation unit which determines whether the output signal from the nonlinear characteristic unit is the desired signal, calculates the detection ratio in the event that the signal is the desired signal, and outputs detection ratio data; a parameter adjustment unit which, on the basis of detection ratio data obtained by the signal detection ratio evaluation unit and calculated data obtained by the statistical data acquisition unit, adjusts a control parameter pertaining to the responsiveness of the

Abstract: There is provided a charged particle beam apparatus radiating a charged particle beam to a specimen so as to acquire an image of the specimen, the charged particle beam apparatus including: a charged particle gun that generates the charged particle beam; an electron optical system that radiates the charged particle beam emitted from the charged particle gun onto a surface of the specimen so as to scan the surface of the specimen; a detecting unit that detects secondary electrons or reflection electrons emitted from the specimen, and converts the electrons into pulse signals; a pulse signal detecting circuit that detects time detecting information regarding time of the pulse signals converted by the detecting unit, and peak value detecting information regarding each peak value of the pulse signals; and an image processing unit that generates luminance gradation of the acquired image based on a time detecting signal and a peak value detecting signal of the pulse signals detected by the pulse signal detecting ci

Abstract: This weak signal detection system has: a statistical data acquisition unit which measures the average value or distribution of an input signal in which is noise superimposed on a desired signal, calculates parameters such as the amplitude or noise dispersion of the desired signal, and outputs the calculated data obtained thereby; a nonlinear characteristic unit which outputs a signal having a nonlinear response with respect to the magnitude of the voltage or the current of the input signal; a signal detection ratio evaluation unit which determines whether the output signal from the nonlinear characteristic unit is the desired signal, calculates the detection ratio in the event that the signal is the desired signal, and outputs detection ratio data; a parameter adjustment unit which, on the basis of detection ratio data obtained by the signal detection ratio evaluation unit and calculated data obtained by the statistical data acquisition unit, adjusts a control parameter pertaining to the responsiveness of the

Abstract: There is provided a charged particle beam apparatus radiating a charged particle beam to a specimen so as to acquire an image of the specimen, the charged particle beam apparatus including: a charged particle gun that generates the charged particle beam; an electron optical system that radiates the charged particle beam emitted from the charged particle gun onto a surface of the specimen so as to scan the surface of the specimen; a detecting unit that detects secondary electrons or reflection electrons emitted from the specimen, and converts the electrons into pulse signals; a pulse signal detecting circuit that detects time detecting information regarding time of the pulse signals converted by the detecting unit, and peak value detecting information regarding each peak value of the pulse signals; and an image processing unit that generates luminance gradation of the acquired image based on a time detecting signal and a peak value detecting signal of the pulse signals detected by the pulse signal detecting ci

Abstract: In an environment in which signal-to-noise is poor, a method and a system configuration for power-saving, low-cost, and general minute signal detection are provided.

Abstract: In order to enable the mass spectroscope to reduce the operation load of the adjustment of the amplitude difference, and to reduce the increase in power consumption caused by the difference between the resonance frequency and the drive frequency, the resonance circuit unit of the ion trap section is configured to control the amplitude difference adjustment section of the resonance circuit unit to adjust that the amplitude difference between the high-voltage RF signals decreases, and controls the frequency synchronizing section of the resonance circuit unit to adjust that the resonance frequency of the resonance circuit is aligned with the drive frequency of the RF signal source, on the basis of the information about the amplitude difference between the high-voltage RF signals and the resonance frequency of the resonance circuit unit, which have been measured by a resonance frequency/amplitude difference measuring unit.

Abstract: In an adjustment method of waveform equalization coefficient, one of jitter and amplitude is measured only in a case of an arbitrary signal sequence and a waveform equalization coefficient is adjusted. Particularly, using a signal of received signals other than a 010 signal or a 101 signal, code inversion time is measured. Since the code inversion time in a case where such signals are used becomes steeper in comparison with that in the conventional technique, adjustment time of the waveform equalization coefficient can be reduced.

Abstract: In a semiconductor circuit, an impedance adjustment circuit having the characteristics same as those of a circuit having the nonlinear resistance characteristics is configured to include an operating point calculation circuit automatically calculating an operating point with a reference resistance through feedback control, and an impedance calculation circuit calculating the impedance at the operating point found by the operating point calculation circuit. The impedance adjustment circuit is also provided with an impedance determination circuit that determines whether or not the impedance found by the impedance calculation circuit is in a predetermined range. These components, i.e., the operating point calculation circuit, the impedance calculation circuit, and the impedance determination circuit, are provided each two for High-side and Low-side impedance adjustment use.

Abstract: An output buffer circuit, a differential output buffer circuit, an output buffer circuit having a regulation circuit and a regulation function, and a transmission method, to improve resolution of a pre-emphasis amount without increasing power consumption or a circuit area. The output buffer includes a delay circuit, an inverter and output buffers to transmit a logical signal to a transmission line and generate a waveform having four or more types of signal voltages on a transmission side according to a signal attenuation amount of the transmission line. The output buffer has a selector and a variable resistance portion at an output resistance to change a pre-emphasis amount according to a change in a variable resistance value. The inverter is configured to select a signal to input into the output buffer, invert a data signal and adjust a tap pre-emphasis amount by a select signal of the selector logic.

Abstract: A level conversion circuit capable of realizing low-power/high-speed operation and suppression of variations in input/output characteristics due to variations in source voltage and temperature and device variation. The level conversion circuit comprises: a source follower circuit including a first transistor to input an AC signal of CML level thereto and a second transistor to input a control voltage thereto; and a control-voltage generating circuit to generate the control voltage to be inputted to the second transistor. The control-voltage generating circuit comprises: a replica source follower circuit which is a replica of the source follower circuit including a third transistor to input a central voltage of CML level thereto and a fourth transistor to input the control voltage thereto; and a comparator which controls the control voltage, thereby equalizing an output voltage of the replica source follower and a threshold voltage of a CMOS circuit.

Abstract: An output buffer circuit, a differential output buffer circuit, an output buffer circuit having a regulation circuit and a regulation function, and a transmission method, capable of improving resolution of a pre-emphasis amount without increasing power consumption or a circuit area, in which the output buffer circuit 10 has a function which includes a delay circuit 23, an inverter 22 and output buffers 3 to 7 to transmit a logical signal to a transmission line 2 and generate a waveform having four or more types of signal voltages on a transmission side according to a signal attenuation amount of the transmission line 2 and the output buffer 3 has a variable resistance portion 12 at an on-resistance to change a pre-emphasis amount according to a change in a variable resistance value. The output buffer 3 has a selector 20 on a forward stage and a variable resistance portion 12 at an on-resistance.

Abstract: In a semiconductor circuit, an impedance adjustment circuit having the characteristics same as those of a circuit having the nonlinear resistance characteristics is configured to include an operating point calculation circuit automatically calculating an operating point with a reference resistance through feedback control, and an impedance calculation circuit calculating the impedance at the operating point found by the operating point calculation circuit. The impedance adjustment circuit is also provided with an impedance determination circuit that determines whether or not the impedance found by the impedance calculation circuit is in a predetermined range. These components, i.e., the operating point calculation circuit, the impedance calculation circuit, and the impedance determination circuit, are provided each two for High-side and Low-side impedance adjustment use.

Abstract: The present invention provides a highly accurate oscillation circuit. For example, the oscillation circuit includes plural ring oscillator units RO1 and RO2 including inverter circuits IV of an odd number of stages, and an adding unit ADD that adds signals of output nodes RO—01 and RO—02 of the RO1 and RO2. It outputs an addition result of the ADD from an output node OSC_O as a clock signal, and feeds the output node OSC_O back to input nodes RO_I1 and RO_I2 of the RO1 and RO2. Thereby, for example, when each of delay times of the RO1 and RO2 disperses based on a normal distribution of standard deviation ?, the dispersion of a clock signal obtained from the OSC_O can be confined to ?/?{square root over (2)}.