Patents by Inventor Hisaaki Oguri

Hisaaki Oguri has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Position detection apparatus having a plurality of detection sections, and exposure apparatus
    Patent number: 7072023
    Abstract: A surface position detection apparatus of this invention includes a position detection section having a plurality of electrodes opposing the object surface to be measured, and a measurement device for selecting at least one electrode of the plurality of electrodes in accordance with the shape of the object surface, supplying an AC current to the selected electrode, and measuring the current flowing to the electrode, thereby measuring the distance between the electrode and object surface.
    Type: Grant
    Filed: January 31, 2002
    Date of Patent: July 4, 2006
    Assignee: Canon Kabushiki Kaisha
    Inventors: Hisaaki Oguri, Toyoshige Sasaki, Masanobu Hasegawa
  • Position detection apparatus having a plurality of detection sections, and exposure apparatus
    Patent number: 6529263
    Abstract: A surface position detection apparatus includes a position detection section having a plurality of electrodes opposing an object surface to be measured, and a measurement device for selecting at least one electrode of the plurality of electrodes in accordance with the shape of the object surface, supplying an AC current to the selected electrode, and measuring the current flowing to the electrode, thereby measuring the distance between the electrode and the object surface.
    Type: Grant
    Filed: September 1, 1999
    Date of Patent: March 4, 2003
    Assignee: Canon Kabushiki Kaisha
    Inventors: Hisaaki Oguri, Toyoshige Sasaki, Masanobu Hasegawa
  • Position detection apparatus having a plurality of detection sections, and exposure apparatus
    Publication number: 20020093635
    Abstract: A surface position detection apparatus of this invention includes a position detection section having a plurality of electrodes opposing the object surface to be measured, and a measurement device for selecting at least one electrode of the plurality of electrodes in accordance with the shape of the object surface, supplying an AC current to the selected electrode, and measuring the current flowing to the electrode, thereby measuring the distance between the electrode and object surface.
    Type: Application
    Filed: January 31, 2002
    Publication date: July 18, 2002
    Inventors: Hisaaki Oguri, Toyoshige Sasaki, Masanobu Hasegawa
  • POSITION DETECTION APPARATUS HAVING A PLURALITY OF DETECTION SECTIONS, AND EXPOSURE APPARATUS
    Publication number: 20020041367
    Abstract: A surface position detection apparatus of this invention includes a position detection section having a plurality of electrodes opposing the object surface to be measured, and a measurement device for selecting at least one electrode of the plurality of electrodes in accordance with the shape of the object surface, supplying an AC current to the selected electrode, and measuring the current flowing to the electrode, thereby measuring the distance between the electrode and object surface.
    Type: Application
    Filed: September 1, 1999
    Publication date: April 11, 2002
    Inventors: HISAAKI OGURI, TOYOSHIGE SASAKI, MASANOBU HASEGAWA