Patents by Inventor Hisae Sibuya

Hisae Sibuya has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for analyzing defect information
    Publication number: 20040044484
    Abstract: To efficiently extract identification of apparatuses causing problems in a thin-film device manufacturing process, candidates for the problem-generating manufacturing apparatus are extracted by evaluating data obtained in relation to product inspections and data indicating the states of the manufacturing apparatus, with respect to products that enable efficient extraction of problem-generated apparatuses in a thin-film device manufacturing process. This facilitates inferring the identification of the problem-generating apparatus.
    Type: Application
    Filed: May 29, 2003
    Publication date: March 4, 2004
    Applicant: Hitachi, Ltd.
    Inventors: Kenji Obara, Yuji Takagi, Hisae Sibuya