Abstract: A heating device made of ceramics includes: a plate-like heating base having a heating surface; and a hollow cylindrical support member bonded to a back surface of the heating base. A concave surface portion that connects the back surface of the heating base and an outer surface of the support member smoothly to each other is formed in the vicinity of an outer end of a bonding interface between the heating base and the support member. On a cross section including an axis of the support member, the concave surface portion has a curved line of an arc of a ellipsoid in which a minor axis direction is parallel to an axis direction of the support member.

Abstract: A heating device is provided, including a ceramic base in which a resistance heating body is embedded, gas flow passages formed in an inside portion of the base, and adjustment members which vary flow rates of a gas provided in the gas flow passages.

Abstract: A heating device made of ceramics includes: a plate-like heating base having a heating surface; and a hollow cylindrical support member bonded to a back surface of the heating base. A concave surface portion that connects the back surface of the heating base and an outer surface of the support member smoothly to each other is formed in the vicinity of an outer end of a bonding interface between the heating base and the support member. On a cross section including an axis of the support member, the concave surface portion has a curved line of an arc of a ellipsoid in which a minor axis direction is parallel to an axis direction of the support member.

Abstract: A heating apparatus for a semiconductor producing system is provided, including a heater having a mounting face, an opposed back face, a first resistance heating element, a second resistance heating element provided along substantially the same plane as the first heating element, a first terminal connected with the first heating element and a second terminal connected with the second heating element. A supporting member is fixed to the back face of the heater. First and second power supply means are respectively connected with the first and second terminals and contained in an inner space of the supporting member. A conductive connector connects the first heating element and the first terminal but not the second heating element. The first heating element is provided in a first zone, the second heating element is provided in a second zone, and the conductive connector is provided in the plane and the second zone.

Abstract: A heater includes a heating member formed in a plate shape that includes a substrate-heating surface on which a substrate is mounted and a heating member rear surface which is on the opposite side of the substrate-heating surfaces. The heater also has a resistance heating element embedded therein. An auxiliary member is placed on the side of the heating member rear surface of the heating member and has an opposing surface which opposes the heating member rear surface. A planar gas path for gas ejected on the substrate-heating surface is formed between the heating member rear surface and the opposing surface.

Abstract: A heating device includes: a plate-shaped heating substrate; and a hollow rod material an end face of which is joined to one surface of the heating substrate, and the heating substrate includes a lateral surface portion and a concave surface portion in the vicinity of a joint with the hollow rod material. The lateral surface portion forms a same plane surface with an outer peripheral surface of the hollow rod material, and the concave surface portion connects to the lateral surface portion. Moreover, an edge of a joint interface of the heating substrate and the hollow rod material is located between the lateral surface portion of the heating substrate and the outer peripheral surface of the hollow rod material.

Abstract: A heater is provided including a plate having a heating surface for heating an object to be heated and a resistance heater element provided in the plate. This resistance heater element includes a continuous wiring pattern including a plurality of flexures and a thermal uniform pattern part which improves thermal uniformity. The continuous wiring pattern includes a plurality of folding parts as the flexures. A first distance between the wirings in a first region of the wiring pattern other than a second region proximate the folding parts is substantially constant, and a second distance between the wirings in the second region is greater than the first distance.

Abstract: A heater comprises a heating member formed in a plate shape that includes a substrate-heating surface on which a substrate is mounted and a heating member rear surface which is on the opposite side of the substrate-heating surface, has a resistance heating element embedded therein; and an auxiliary member that is placed on the side of the heating member rear surface of the heating member and has an opposing surface which opposes the heating member rear surface. A planar gas path that is a path for gas ejected on the substrate-heating surface is formed between the heating member rear surface and the opposing surface.

Abstract: A heating device includes: a base containing ceramics, in which a resistance heating body is embedded; gas flow passages formed in an inside of the base; and adjustment members which vary flow rates of gas in the gas flow passages.

Abstract: An object of the present invention is to provide a heater having a ceramic substrate with a through hole formed therein so that the uniformity of temperature on the heating face of the substrate can be improved and the use life of the ceramic substrate can be improved upon thermal cycles. A ceramic heater comprises a substrate made of a ceramic material and having a heating face where three or more zones 3C, 3F are allocated, heating resistances corresponding to the zones, respectively, and terminals 5C electrically connected to the heating resistances, respectively. Three or more holes 4 are formed in the substrate. Distances of the terminals 5C and the wall surfaces facing the holes 4 are 8 mm or more, respectively. The heating resistance 15 intersects a straight line 16 connecting the center of the terminal and the center 4a of the hole in a plan view.

Abstract: An object of the present invention is to provide a heater having a ceramic substrate with a through hole formed therein so that the uniformity of temperature on the heating face of the substrate can be improved and the use life of the ceramic substrate can be improved upon thermal cycles. A ceramic heater comprises a substrate made of a ceramic material and having a heating face where three or more zones 3C, 3F are allocated, heating resistances corresponding to the zones, respectively, and terminals 5C electrically connected to the heating resistances, respectively. Three or more holes 4 are formed in the substrate. Distances of the terminals 5C and the wall surfaces facing the holes 4 are 8 mm or more, respectively. The heating resistance 15 intersects a straight line 16 connecting the center of the terminal and the center 4a of the hole in a plan view.

Abstract: A heating system 25 has a main electric heat-generating element 3 and a heating surface 4a for heating an object, auxiliary electric heat-generating elements 5A to 5D, and a main power source 1 for supplying power to the main heating element. The system 25 further has an auxiliary power source 2 for supplying power to the auxiliary heating elements, and a power source controller for controlling the power supplied to the main heating element and to the auxiliary heating elements respectively and independently. Power supplied to the main heating element 3 is controlled by the controller within a first power range and power supplied to the auxiliary heating elements is controlled by the controller within a second power range. The second power range has a width smaller than that of the first power range so as to control temperature distribution on the heating surface 4a.

Abstract: A heater includes a plate having a heating surface for heating an object to be heated and a resistant heater element provided in the plate. This resistant heater element includes a continuous wiring pattern with a plurality of flexures and including a thermal uniform pattern part which improves thermal uniformity. If the resistant heater element includes a continuous wiring pattern with a plurality of folding parts as the flexures, a space between wirings before folding and after folding with respect to each of the folding parts is approximately the same as a width L3 in a region other than the folding part and the vicinity thereof and is made wider than the width L3 at the folding part and in the vicinity thereof.

Abstract: A heating apparatus 10A usable for a system for producing a semiconductor is provided. The apparatus has a heater 1A with a mounting face 2a for mounting a semiconductor and a back face 2b, a supporting member 11 fixed to the back face 2b of the heater 1A and having an outer surface and an inner surface facing an inner space. The apparatus further has a first power supply means 15 and a second power supply means 14. The heater 1A has a plate-shaped substrate 2, a first heating element 3 composed of a resistance heating material, and a second heating element 4 composed of a resistance heating material and controllable independently with respect to the element 3. The heater further has a first terminal 6A connected with the first heating element 3 and a second terminal 7 connected with the second heating element 4. The supporting member 11 has a length larger than the width “L” of the supporting member 11.

Abstract: A heating system 25 has a main heating element 3 generating heat be supplying an electric power supplied and having a heating surface 4a for heating an object, auxiliary heating elements 5A to 5D generating heat by supplying an electric power, and a main power source 1 for supplying the to the main heating element 3. The system 25 further has an auxiliary power source 2 supplying the power to the auxiliary heating elements 5A to 5D, and a power source controller 2 for controlling the power supplied to the main heating element and the power supplied to the auxiliary heating elements respectively and independently. The power supplied from the main power source 1 to the main heating element 3 is controlled by the controller 2 within a first power range. The power supplied from the auxiliary power source to the auxiliary heating elements is controlled by the controller 2 within a second power range.

Abstract: An optical voltage electric field sensor of the type which includes a light source, a polarizer for linearly polarizing an incident light beam emanated from the light source, a phase plate for applying a phase difference to the linearly polarized light beam, a Pockels element for modulating the linearly polarized light beam applied with the phase difference in accordance with a voltage or electric filed applied thereto, an analyzer for separating the modulated light beam into a S-polarized light beam and a P-polarized light beam, a first light-receiving element arranged to receive the S-polarized light beam for converting the S-polarized light beam into a first electric signal V.sub.1 indicative of the intensity of the light beam, and a second light-receiving element arranged to receive the P-polarized light beam for converting the P-polarized light beam into a second electric signal indicative of the intensity of the light beam.

Abstract: An optical magnetic field sensor is provided that can precisely measure a magnetic field strength without measuremental errors caused by temperature change. The sensor includes a light source, a polarizer, a Faraday's element, an analyzer, a first light beam-receiving element, a first calculation circuit, a second light beam-receiving element, a second calculation circuit, and a third calculation circuit, wherein the light beam emitted from the light source is passed through the polarizer, the Faraday's element and the analyzer in sequence, an S polarized light beam after passed through the analyzer is passed through the first light beam-receiving element, an output signal therefrom is calculated in the first calculation circuit, a P polarized light beam after passed through the analyzer is passed through the second light beam-receiving element, an output signal therefrom is calculated in the second calculation circuit, the third calculation circuit is supplied with the outputs V.sub.11 and V.sub.

Abstract: An optical magnetic-field sensor includes a base fixed relative to distal ends of optical fibers inserted in the sensor, optical parts and an optical element for transmitting optical signals between the distal ends of the optical fibers. The optical signals are collimated between the optical parts and the distal ends of the optical fibers. The optical magnetic-field sensor further includes spherical lenses optically aligned with the distal ends of the optical fibers for collimating the optical signals, and synthetic resin members filled in clearances between the distal ends of the optical fibers and the spherical lenses, respectively. With the above arrangement, it is possible to effect the alignment of optical axes of the optical fibers and the spherical lenses easily with high accuracy in a short period of time.

Abstract: An excellent optical magnetic-field sensor having a magnetooptical element, a polarizer, an analyzer and a substrate is provided which can decrease light loss as well as temperature dependency of the modulation rate and prevent displacement and detachment of the magnetooptical element from the polarizer and the analyzer, wherein a synthetic resin adhesive agent is filled in a space between the magnetooptical element and the polarizer and in a space between the magnetooptical element and the analyzer, and the magnetooptical element, the polarizer and the analyzer are respectively adhered or bonded to the substrate.

Abstract: An optical ferrule including a non-metallic sleeve 11 formed with a through bore having a small bore portion 14 and a large bore portion 1. A bare fiber 13 and a coating 15 of an optical fiber 12 are adhesively fixed in the small bore portion and the large bore portion, respectively. The large bore portion 16 has at least one groove 17 formed in the inner surface thereof, the optical fiber has a rough surface portion 20 formed in the coating in at least a portion opposing to the groove, a glass tube 18 is inserted in the large bore portion between the small bore portion and the end face of the coating of the optical fiber and has an outer diameter larger than the inner diameter of the small bore portion and an inner diameter adapted for insertion of the bare fiber, and an adhesive 21 is filled between the components including the inner surface of the sleeve. The optical ferrule has superior reliability, durability and stability.